Scatterometric characterization of diffractive optical elements

Toni Saastamoinen, Hannu Husu, Janne Laukkanen, Samuli Siitonen, Jari Turunen, Antti Lassila

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

Diffractive optical elements offer a great way to control light beyond the capabilities of traditional refractive components. Because of the very small feature sizes, the characterization of diffractive optical elements is challenging. Using current invasive methods, such as scanning electron microscope (SEM) or atomic force microscope (AFM), the measurements are slow and potentially destructive to the element. Employing optical scatterometery, the measurements are not only fast and non-destructive but also integrable to inline control of the fabrication and replication processes. In this work we use scatterometer to determine the dimensional parameters of binary diffractive optical elements and compare the results with the parameters obtained with AFM and SEM

Original languageEnglish
Title of host publicationInstrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII
EditorsMichael T. Postek, Ndubuisi G. Orji
PublisherInternational Society for Optics and Photonics SPIE
ISBN (Electronic)978-1-6284-1200-0
DOIs
Publication statusPublished - 1 Jan 2014
MoE publication typeA4 Article in a conference publication
EventInstrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII - San Diego, United States
Duration: 20 Aug 2014 → …

Publication series

SeriesProceedings of SPIE
Volume9173
ISSN0277-786X

Conference

ConferenceInstrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII
CountryUnited States
CitySan Diego
Period20/08/14 → …

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Keywords

  • diffractive optical elements
  • scatterometry

Cite this

Saastamoinen, T., Husu, H., Laukkanen, J., Siitonen, S., Turunen, J., & Lassila, A. (2014). Scatterometric characterization of diffractive optical elements. In M. T. Postek, & N. G. Orji (Eds.), Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII [91730I] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 9173 https://doi.org/10.1117/12.2061699