Scatterometric characterization of diffractive optical elements

Toni Saastamoinen, Hannu Husu, Janne Laukkanen, Samuli Siitonen, Jari Turunen, Antti Lassila

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

Diffractive optical elements offer a great way to control light beyond the capabilities of traditional refractive components. Because of the very small feature sizes, the characterization of diffractive optical elements is challenging. Using current invasive methods, such as scanning electron microscope (SEM) or atomic force microscope (AFM), the measurements are slow and potentially destructive to the element. Employing optical scatterometery, the measurements are not only fast and non-destructive but also integrable to inline control of the fabrication and replication processes. In this work we use scatterometer to determine the dimensional parameters of binary diffractive optical elements and compare the results with the parameters obtained with AFM and SEM

Original languageEnglish
Title of host publicationInstrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII
EditorsMichael T. Postek, Ndubuisi G. Orji
PublisherInternational Society for Optics and Photonics SPIE
ISBN (Electronic)978-1-6284-1200-0
DOIs
Publication statusPublished - 1 Jan 2014
MoE publication typeA4 Article in a conference publication
EventInstrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII - San Diego, United States
Duration: 20 Aug 2014 → …

Publication series

SeriesProceedings of SPIE - The International Society for Optical Engineering
Volume9173
ISSN0277-786X

Conference

ConferenceInstrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII
CountryUnited States
CitySan Diego
Period20/08/14 → …

Fingerprint

Diffractive optical elements
Diffractive Optical Elements
Atomic Force Microscope
electron microscopes
Scanning Electron Microscope
microscopes
scatterometers
scanning
Microscopes
Electron microscopes
Scanning
fabrication
Replication
Fabrication
Binary

Keywords

  • diffractive optical elements
  • scatterometry

Cite this

Saastamoinen, T., Husu, H., Laukkanen, J., Siitonen, S., Turunen, J., & Lassila, A. (2014). Scatterometric characterization of diffractive optical elements. In M. T. Postek, & N. G. Orji (Eds.), Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII [91730I] International Society for Optics and Photonics SPIE. Proceedings of SPIE - The International Society for Optical Engineering, Vol.. 9173 https://doi.org/10.1117/12.2061699
Saastamoinen, Toni ; Husu, Hannu ; Laukkanen, Janne ; Siitonen, Samuli ; Turunen, Jari ; Lassila, Antti. / Scatterometric characterization of diffractive optical elements. Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII. editor / Michael T. Postek ; Ndubuisi G. Orji. International Society for Optics and Photonics SPIE, 2014. (Proceedings of SPIE - The International Society for Optical Engineering, Vol. 9173).
@inproceedings{d55284c0202d4ede9f73fbae74d7b174,
title = "Scatterometric characterization of diffractive optical elements",
abstract = "Diffractive optical elements offer a great way to control light beyond the capabilities of traditional refractive components. Because of the very small feature sizes, the characterization of diffractive optical elements is challenging. Using current invasive methods, such as scanning electron microscope (SEM) or atomic force microscope (AFM), the measurements are slow and potentially destructive to the element. Employing optical scatterometery, the measurements are not only fast and non-destructive but also integrable to inline control of the fabrication and replication processes. In this work we use scatterometer to determine the dimensional parameters of binary diffractive optical elements and compare the results with the parameters obtained with AFM and SEM",
keywords = "diffractive optical elements, scatterometry",
author = "Toni Saastamoinen and Hannu Husu and Janne Laukkanen and Samuli Siitonen and Jari Turunen and Antti Lassila",
year = "2014",
month = "1",
day = "1",
doi = "10.1117/12.2061699",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "International Society for Optics and Photonics SPIE",
editor = "Postek, {Michael T.} and Orji, {Ndubuisi G.}",
booktitle = "Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII",
address = "United States",

}

Saastamoinen, T, Husu, H, Laukkanen, J, Siitonen, S, Turunen, J & Lassila, A 2014, Scatterometric characterization of diffractive optical elements. in MT Postek & NG Orji (eds), Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII., 91730I, International Society for Optics and Photonics SPIE, Proceedings of SPIE - The International Society for Optical Engineering, vol. 9173, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII, San Diego, United States, 20/08/14. https://doi.org/10.1117/12.2061699

Scatterometric characterization of diffractive optical elements. / Saastamoinen, Toni; Husu, Hannu; Laukkanen, Janne; Siitonen, Samuli; Turunen, Jari; Lassila, Antti.

Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII. ed. / Michael T. Postek; Ndubuisi G. Orji. International Society for Optics and Photonics SPIE, 2014. 91730I (Proceedings of SPIE - The International Society for Optical Engineering, Vol. 9173).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Scatterometric characterization of diffractive optical elements

AU - Saastamoinen, Toni

AU - Husu, Hannu

AU - Laukkanen, Janne

AU - Siitonen, Samuli

AU - Turunen, Jari

AU - Lassila, Antti

PY - 2014/1/1

Y1 - 2014/1/1

N2 - Diffractive optical elements offer a great way to control light beyond the capabilities of traditional refractive components. Because of the very small feature sizes, the characterization of diffractive optical elements is challenging. Using current invasive methods, such as scanning electron microscope (SEM) or atomic force microscope (AFM), the measurements are slow and potentially destructive to the element. Employing optical scatterometery, the measurements are not only fast and non-destructive but also integrable to inline control of the fabrication and replication processes. In this work we use scatterometer to determine the dimensional parameters of binary diffractive optical elements and compare the results with the parameters obtained with AFM and SEM

AB - Diffractive optical elements offer a great way to control light beyond the capabilities of traditional refractive components. Because of the very small feature sizes, the characterization of diffractive optical elements is challenging. Using current invasive methods, such as scanning electron microscope (SEM) or atomic force microscope (AFM), the measurements are slow and potentially destructive to the element. Employing optical scatterometery, the measurements are not only fast and non-destructive but also integrable to inline control of the fabrication and replication processes. In this work we use scatterometer to determine the dimensional parameters of binary diffractive optical elements and compare the results with the parameters obtained with AFM and SEM

KW - diffractive optical elements

KW - scatterometry

UR - http://www.scopus.com/inward/record.url?scp=84937605296&partnerID=8YFLogxK

U2 - 10.1117/12.2061699

DO - 10.1117/12.2061699

M3 - Conference article in proceedings

AN - SCOPUS:84937605296

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII

A2 - Postek, Michael T.

A2 - Orji, Ndubuisi G.

PB - International Society for Optics and Photonics SPIE

ER -

Saastamoinen T, Husu H, Laukkanen J, Siitonen S, Turunen J, Lassila A. Scatterometric characterization of diffractive optical elements. In Postek MT, Orji NG, editors, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII. International Society for Optics and Photonics SPIE. 2014. 91730I. (Proceedings of SPIE - The International Society for Optical Engineering, Vol. 9173). https://doi.org/10.1117/12.2061699