Schottky barrier height of sputtered HfN contacts on silicon

Eric Pan, Ilkka Suni, Marc Nicolet

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)
Original languageEnglish
Pages (from-to)775 - 777
Number of pages3
JournalSolid-State Electronics
Volume28
Issue number8
DOIs
Publication statusPublished - 1985
MoE publication typeNot Eligible

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