Schottky barrier height of sputtered HfN contacts on silicon

Eric Pan, Ilkka Suni, Marc Nicolet

Research output: Contribution to journal › Article › Scientific › peer-review

2 Citations (Scopus)

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@article{2dc86ae13f21407eae58e749899510ed,

title = "Schottky barrier height of sputtered HfN contacts on silicon",

author = "Eric Pan and Ilkka Suni and Marc Nicolet",

year = "1985",

doi = "10.1016/0038-1101(85)90063-2",

language = "English",

volume = "28",

pages = "775--777",

journal = "Solid-State Electronics",

issn = "0038-1101",

publisher = "Elsevier",

number = "8",

}