Schottky barrier height of sputtered HfN contacts on silicon

Eric Pan, Ilkka Suni, Marc Nicolet

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)
Original languageEnglish
Pages (from-to)775 - 777
Number of pages3
JournalSolid-State Electronics
Volume28
Issue number8
DOIs
Publication statusPublished - 1985
MoE publication typeNot Eligible

Cite this

Pan, Eric ; Suni, Ilkka ; Nicolet, Marc. / Schottky barrier height of sputtered HfN contacts on silicon. In: Solid-State Electronics. 1985 ; Vol. 28, No. 8. pp. 775 - 777.
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title = "Schottky barrier height of sputtered HfN contacts on silicon",
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Schottky barrier height of sputtered HfN contacts on silicon. / Pan, Eric; Suni, Ilkka; Nicolet, Marc.

In: Solid-State Electronics, Vol. 28, No. 8, 1985, p. 775 - 777.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Schottky barrier height of sputtered HfN contacts on silicon

AU - Pan, Eric

AU - Suni, Ilkka

AU - Nicolet, Marc

PY - 1985

Y1 - 1985

U2 - 10.1016/0038-1101(85)90063-2

DO - 10.1016/0038-1101(85)90063-2

M3 - Article

VL - 28

SP - 775

EP - 777

JO - Solid-State Electronics

JF - Solid-State Electronics

SN - 0038-1101

IS - 8

ER -