Second order temperature compensated piezoelectrically driven 23 MHz heavily doped silicon resonators with ±10 ppm temperature stability
- Antti Jaakkola
- , Panu Pekko
- , James R. Dekker
- , Mika Prunnila
- , Tuomas Pensala
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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