Self-Actuation Tests of Ohmic Contact and Capacitive RF-MEMS Switches for Wideband RF Power Limiter Circuits

R. Malmqvist, R. Jonsson, C. Samuelsson, S. Reyaz, A. Ouacha, Pekka Rantakari, Tauno Vähä-Heikkilä, Jussi Varis, J. Rydberg

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

8 Citations (Scopus)

Abstract

This paper presents an experimental study on the high power handling capabilities of some ohmic contact based and capacitive RF-MEMS switches (incl. self-actuation tests made up to 18 GHz). Such tests carried out on a series and shunt connected ohmic contact COTS MEMS switch show that self-actuation occurred at 29-37 dBm of RF input power (Pin) given a DC bias (Vbias) of 42-47 V. Corresponding high power tests of a capacitive MEMS switch made on quartz (at 4 GHz) show that self-actuation occurred at Pin=24-31 dBm with Vbias=0-19 V. The experimental results further indicate a potential usefulness of employing ohmic contact and capacitive MEMS switches to realize optimised low-loss wideband power limiter circuits
Original languageEnglish
Title of host publicationProceedings of the 2012 International Semiconductor Conference, CAS 2012
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages217-220
ISBN (Electronic)978-1-4673-0738-3
ISBN (Print)978-1-4673-0737-6
DOIs
Publication statusPublished - 2012
MoE publication typeA4 Article in a conference publication
Event35th International Semiconductor Conference, CAS 2012 - Sinaia, Romania
Duration: 15 Nov 201217 Nov 2012

Conference

Conference35th International Semiconductor Conference, CAS 2012
Abbreviated titleCAS 2012
CountryRomania
CitySinaia
Period15/11/1217/11/12

Keywords

  • Limiter
  • radio frequency micro-electro-mechanical systems (RF MEMS)
  • self-actuation
  • switches

Fingerprint Dive into the research topics of 'Self-Actuation Tests of Ohmic Contact and Capacitive RF-MEMS Switches for Wideband RF Power Limiter Circuits'. Together they form a unique fingerprint.

  • Cite this

    Malmqvist, R., Jonsson, R., Samuelsson, C., Reyaz, S., Ouacha, A., Rantakari, P., Vähä-Heikkilä, T., Varis, J., & Rydberg, J. (2012). Self-Actuation Tests of Ohmic Contact and Capacitive RF-MEMS Switches for Wideband RF Power Limiter Circuits. In Proceedings of the 2012 International Semiconductor Conference, CAS 2012 (pp. 217-220). IEEE Institute of Electrical and Electronic Engineers. https://doi.org/10.1109/SMICND.2012.6400650