Self-aligned doping profiles in nanoscale silicon structures

Keyphrases

• Self-aligned 100%
• Nanoscale Silicon 100%
• Doping Profile 100%
• Silicon Structure 100%
• P-type 50%
• Nanowires 50%
• Thermal Oxidation 50%
• Silicon Devices 50%
• Impurity Concentration 50%
• P-type Dopant 50%
• Diode-like 50%
• Segregation Behavior 50%
• Field-effect Device 50%

INIS

• silicon 100%
• nanostructures 100%
• devices 66%
• simulation 33%
• control 33%
• segregation 33%
• doped materials 33%
• concentration 33%
• oxidation 33%
• impurities 33%
• nanowires 33%

Material Science

• Silicon 100%
• Doping (Additives) 50%
• Silicon Device 50%
• Nanowires 50%