Self-aligned doping profiles in nanoscale silicon structures

Jouni Ahopelto (Corresponding Author), Mika Prunnila, Eeva Pursula

    Research output: Contribution to journalArticleScientificpeer-review

    2 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Self-aligned doping profiles in nanoscale silicon structures'. Together they form a unique fingerprint.

    Engineering & Materials Science

    Chemical Compounds

    Physics & Astronomy