Self-aligned doping profiles in semiconductor nanostructures

    Research output: Contribution to conferenceOther conference contributionScientificpeer-review

    Original languageEnglish
    Publication statusPublished - 2005
    MoE publication typeNot Eligible
    Event12th International Conference on Modulated Semiconductor Structures, MSS12 - Albuquerque, United States
    Duration: 10 Jul 200515 Jul 2005

    Conference

    Conference12th International Conference on Modulated Semiconductor Structures, MSS12
    Abbreviated titleMSS12
    CountryUnited States
    CityAlbuquerque
    Period10/07/0515/07/05

    Cite this

    Prunnila, M., Pursula, E., & Ahopelto, J. (2005). Self-aligned doping profiles in semiconductor nanostructures. 12th International Conference on Modulated Semiconductor Structures, MSS12, Albuquerque, United States.
    Prunnila, Mika ; Pursula, Eeva ; Ahopelto, Jouni. / Self-aligned doping profiles in semiconductor nanostructures. 12th International Conference on Modulated Semiconductor Structures, MSS12, Albuquerque, United States.
    @conference{1cd4a3e4efc94b6ca9592120c8b4c8dd,
    title = "Self-aligned doping profiles in semiconductor nanostructures",
    author = "Mika Prunnila and Eeva Pursula and Jouni Ahopelto",
    year = "2005",
    language = "English",
    note = "12th International Conference on Modulated Semiconductor Structures, MSS12, MSS12 ; Conference date: 10-07-2005 Through 15-07-2005",

    }

    Prunnila, M, Pursula, E & Ahopelto, J 2005, 'Self-aligned doping profiles in semiconductor nanostructures', 12th International Conference on Modulated Semiconductor Structures, MSS12, Albuquerque, United States, 10/07/05 - 15/07/05.

    Self-aligned doping profiles in semiconductor nanostructures. / Prunnila, Mika; Pursula, Eeva; Ahopelto, Jouni.

    2005. 12th International Conference on Modulated Semiconductor Structures, MSS12, Albuquerque, United States.

    Research output: Contribution to conferenceOther conference contributionScientificpeer-review

    TY - CONF

    T1 - Self-aligned doping profiles in semiconductor nanostructures

    AU - Prunnila, Mika

    AU - Pursula, Eeva

    AU - Ahopelto, Jouni

    PY - 2005

    Y1 - 2005

    M3 - Other conference contribution

    ER -

    Prunnila M, Pursula E, Ahopelto J. Self-aligned doping profiles in semiconductor nanostructures. 2005. 12th International Conference on Modulated Semiconductor Structures, MSS12, Albuquerque, United States.