Self-aligned doping profiles in semiconductor nanostructures

    Research output: Contribution to conferenceOther conference contributionScientificpeer-review

    Original languageEnglish
    Publication statusPublished - 2005
    MoE publication typeNot Eligible
    Event12th International Conference on Modulated Semiconductor Structures, MSS12 - Albuquerque, United States
    Duration: 10 Jul 200515 Jul 2005

    Conference

    Conference12th International Conference on Modulated Semiconductor Structures, MSS12
    Abbreviated titleMSS12
    CountryUnited States
    CityAlbuquerque
    Period10/07/0515/07/05

    Cite this

    Prunnila, M., Pursula, E., & Ahopelto, J. (2005). Self-aligned doping profiles in semiconductor nanostructures. 12th International Conference on Modulated Semiconductor Structures, MSS12, Albuquerque, United States.