Self-aligned doping profiles in semiconductor nanostructures

Research output: Contribution to conference › Other conference contribution › Scientific › peer-review

Original language	English
Publication status	Published - 2005
MoE publication type	Not Eligible
Event	12th International Conference on Modulated Semiconductor Structures, MSS12 - Albuquerque, United States Duration: 10 Jul 2005 → 15 Jul 2005

Conference	12th International Conference on Modulated Semiconductor Structures, MSS12
Abbreviated title	MSS12
Country/Territory	United States
City	Albuquerque
Period	10/07/05 → 15/07/05

Cite this

@conference{1cd4a3e4efc94b6ca9592120c8b4c8dd,

title = "Self-aligned doping profiles in semiconductor nanostructures",

author = "Mika Prunnila and Eeva Pursula and Jouni Ahopelto",

year = "2005",

language = "English",

note = "12th International Conference on Modulated Semiconductor Structures, MSS12, MSS12 ; Conference date: 10-07-2005 Through 15-07-2005",

}