(Semi-)transparent ALD TiN microelectrodes

Tomi Ryynänen (Corresponding author), Anssi Pelkonen, Kestutis Grigoras, Oili Ylivaara, Jouni Ahopelto, Mika Prunnila, Susanna Narkilahti, Jukka Lekkala

    Research output: Contribution to conferenceConference PosterScientificpeer-review

    Original languageEnglish
    DOIs
    Publication statusPublished - 27 Jul 2018
    MoE publication typeNot Eligible
    Event11th International Meeting on Substrate Integrated Microelectrode Arrays, MEA Meeting 2018 - City Hall, Reutlingen, Germany
    Duration: 4 Jul 20186 Jul 2018

    Conference

    Conference11th International Meeting on Substrate Integrated Microelectrode Arrays, MEA Meeting 2018
    Abbreviated titleMEA Meeting 2018
    CountryGermany
    CityReutlingen
    Period4/07/186/07/18

    Keywords

    • Microelectrode Array
    • MEA
    • ALD
    • Atomic Layer Deposition
    • TiN
    • titanium nitride
    • transparent

    Cite this

    Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O., Ahopelto, J., Prunnila, M., ... Lekkala, J. (2018). (Semi-)transparent ALD TiN microelectrodes. Poster session presented at 11th International Meeting on Substrate Integrated Microelectrode Arrays, MEA Meeting 2018, Reutlingen, Germany. https://doi.org/10.3389/conf.fncel.2018.38.00111
    Ryynänen, Tomi ; Pelkonen, Anssi ; Grigoras, Kestutis ; Ylivaara, Oili ; Ahopelto, Jouni ; Prunnila, Mika ; Narkilahti, Susanna ; Lekkala, Jukka. / (Semi-)transparent ALD TiN microelectrodes. Poster session presented at 11th International Meeting on Substrate Integrated Microelectrode Arrays, MEA Meeting 2018, Reutlingen, Germany.
    @conference{0f5537ed05ee4320b28c10d2fd2a71a7,
    title = "(Semi-)transparent ALD TiN microelectrodes",
    keywords = "Microelectrode Array, MEA, ALD, Atomic Layer Deposition, TiN, titanium nitride, transparent",
    author = "Tomi Ryyn{\"a}nen and Anssi Pelkonen and Kestutis Grigoras and Oili Ylivaara and Jouni Ahopelto and Mika Prunnila and Susanna Narkilahti and Jukka Lekkala",
    note = "Abstract reviewed and published. Poster presentation; 11<sup>th</sup> International Meeting on Substrate Integrated Microelectrode Arrays, MEA Meeting 2018, MEA Meeting 2018 ; Conference date: 04-07-2018 Through 06-07-2018",
    year = "2018",
    month = "7",
    day = "27",
    doi = "10.3389/conf.fncel.2018.38.00111",
    language = "English",

    }

    Ryynänen, T, Pelkonen, A, Grigoras, K, Ylivaara, O, Ahopelto, J, Prunnila, M, Narkilahti, S & Lekkala, J 2018, '(Semi-)transparent ALD TiN microelectrodes', 11th International Meeting on Substrate Integrated Microelectrode Arrays, MEA Meeting 2018, Reutlingen, Germany, 4/07/18 - 6/07/18. https://doi.org/10.3389/conf.fncel.2018.38.00111

    (Semi-)transparent ALD TiN microelectrodes. / Ryynänen, Tomi (Corresponding author); Pelkonen, Anssi ; Grigoras, Kestutis; Ylivaara, Oili; Ahopelto, Jouni; Prunnila, Mika; Narkilahti, Susanna ; Lekkala, Jukka.

    2018. Poster session presented at 11th International Meeting on Substrate Integrated Microelectrode Arrays, MEA Meeting 2018, Reutlingen, Germany.

    Research output: Contribution to conferenceConference PosterScientificpeer-review

    TY - CONF

    T1 - (Semi-)transparent ALD TiN microelectrodes

    AU - Ryynänen, Tomi

    AU - Pelkonen, Anssi

    AU - Grigoras, Kestutis

    AU - Ylivaara, Oili

    AU - Ahopelto, Jouni

    AU - Prunnila, Mika

    AU - Narkilahti, Susanna

    AU - Lekkala, Jukka

    N1 - Abstract reviewed and published. Poster presentation

    PY - 2018/7/27

    Y1 - 2018/7/27

    KW - Microelectrode Array

    KW - MEA

    KW - ALD

    KW - Atomic Layer Deposition

    KW - TiN

    KW - titanium nitride

    KW - transparent

    UR - https://www.frontiersin.org/10.3389/conf.fncel.2018.38.00111/event_abstract?sname=MEA_Meeting_2018_|_11th_International_Meeting_on_Substrate_Integrated_Microelectrode_Arrays

    U2 - 10.3389/conf.fncel.2018.38.00111

    DO - 10.3389/conf.fncel.2018.38.00111

    M3 - Conference Poster

    ER -

    Ryynänen T, Pelkonen A, Grigoras K, Ylivaara O, Ahopelto J, Prunnila M et al. (Semi-)transparent ALD TiN microelectrodes. 2018. Poster session presented at 11th International Meeting on Substrate Integrated Microelectrode Arrays, MEA Meeting 2018, Reutlingen, Germany. https://doi.org/10.3389/conf.fncel.2018.38.00111