(Semi-)transparent ALD TiN microelectrodes

Tomi Ryynänen (Corresponding author), Anssi Pelkonen, Kestutis Grigoras, Oili Ylivaara, Jouni Ahopelto, Mika Prunnila, Susanna Narkilahti, Jukka Lekkala

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsResearchpeer-review

LanguageEnglish
Title of host publicationFront. Cell. Neurosci. Conference Abstract
Subtitle of host publicationMEA Meeting 2018, 11th International Meeting on Substrate Integrated Microelectrode Arrays
PublisherFrontiers Media
DOIs
Publication statusPublished - 27 Jul 2018
Event11th International Meeting on Substrate Integrated Microelectrode Arrays, MEA Meeting 2018 - City Hall, Reutlingen, Germany
Duration: 4 Jul 20186 Jul 2018

Publication series

NameFrontiers in Cellular Neuroscience
ISSN (Electronic)1662-5102

Conference

Conference11th International Meeting on Substrate Integrated Microelectrode Arrays, MEA Meeting 2018
Abbreviated titleMEA Meeting 2018
CountryGermany
CityReutlingen
Period4/07/186/07/18

Keywords

  • Microelectrode Array
  • MEA
  • ALD
  • Atomic Layer Deposition
  • TiN
  • titanium nitride
  • transparent

Cite this

Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O., Ahopelto, J., Prunnila, M., ... Lekkala, J. (2018). (Semi-)transparent ALD TiN microelectrodes. In Front. Cell. Neurosci. Conference Abstract: MEA Meeting 2018, 11th International Meeting on Substrate Integrated Microelectrode Arrays (Frontiers in Cellular Neuroscience ). Frontiers Media. https://doi.org/10.3389/conf.fncel.2018.38.00111
Ryynänen, Tomi ; Pelkonen, Anssi ; Grigoras, Kestutis ; Ylivaara, Oili ; Ahopelto, Jouni ; Prunnila, Mika ; Narkilahti, Susanna ; Lekkala, Jukka. / (Semi-)transparent ALD TiN microelectrodes. Front. Cell. Neurosci. Conference Abstract: MEA Meeting 2018, 11th International Meeting on Substrate Integrated Microelectrode Arrays. Frontiers Media, 2018. (Frontiers in Cellular Neuroscience ).
@inbook{0f5537ed05ee4320b28c10d2fd2a71a7,
title = "(Semi-)transparent ALD TiN microelectrodes",
keywords = "Microelectrode Array, MEA, ALD, Atomic Layer Deposition, TiN, titanium nitride, transparent",
author = "Tomi Ryyn{\"a}nen and Anssi Pelkonen and Kestutis Grigoras and Oili Ylivaara and Jouni Ahopelto and Mika Prunnila and Susanna Narkilahti and Jukka Lekkala",
note = "Abstract reviewed and published. Poster presentation",
year = "2018",
month = "7",
day = "27",
doi = "10.3389/conf.fncel.2018.38.00111",
language = "English",
series = "Frontiers in Cellular Neuroscience",
publisher = "Frontiers Media",
booktitle = "Front. Cell. Neurosci. Conference Abstract",
address = "Switzerland",

}

Ryynänen, T, Pelkonen, A, Grigoras, K, Ylivaara, O, Ahopelto, J, Prunnila, M, Narkilahti, S & Lekkala, J 2018, (Semi-)transparent ALD TiN microelectrodes. in Front. Cell. Neurosci. Conference Abstract: MEA Meeting 2018, 11th International Meeting on Substrate Integrated Microelectrode Arrays. Frontiers in Cellular Neuroscience , Frontiers Media, 11th International Meeting on Substrate Integrated Microelectrode Arrays, MEA Meeting 2018, Reutlingen, Germany, 4/07/18. https://doi.org/10.3389/conf.fncel.2018.38.00111

(Semi-)transparent ALD TiN microelectrodes. / Ryynänen, Tomi (Corresponding author); Pelkonen, Anssi ; Grigoras, Kestutis; Ylivaara, Oili; Ahopelto, Jouni; Prunnila, Mika; Narkilahti, Susanna ; Lekkala, Jukka.

Front. Cell. Neurosci. Conference Abstract: MEA Meeting 2018, 11th International Meeting on Substrate Integrated Microelectrode Arrays. Frontiers Media, 2018. (Frontiers in Cellular Neuroscience ).

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsResearchpeer-review

TY - CHAP

T1 - (Semi-)transparent ALD TiN microelectrodes

AU - Ryynänen, Tomi

AU - Pelkonen, Anssi

AU - Grigoras, Kestutis

AU - Ylivaara, Oili

AU - Ahopelto, Jouni

AU - Prunnila, Mika

AU - Narkilahti, Susanna

AU - Lekkala, Jukka

N1 - Abstract reviewed and published. Poster presentation

PY - 2018/7/27

Y1 - 2018/7/27

KW - Microelectrode Array

KW - MEA

KW - ALD

KW - Atomic Layer Deposition

KW - TiN

KW - titanium nitride

KW - transparent

UR - https://www.frontiersin.org/10.3389/conf.fncel.2018.38.00111/event_abstract?sname=MEA_Meeting_2018_|_11th_International_Meeting_on_Substrate_Integrated_Microelectrode_Arrays

U2 - 10.3389/conf.fncel.2018.38.00111

DO - 10.3389/conf.fncel.2018.38.00111

M3 - Conference abstract in proceedings

T3 - Frontiers in Cellular Neuroscience

BT - Front. Cell. Neurosci. Conference Abstract

PB - Frontiers Media

ER -

Ryynänen T, Pelkonen A, Grigoras K, Ylivaara O, Ahopelto J, Prunnila M et al. (Semi-)transparent ALD TiN microelectrodes. In Front. Cell. Neurosci. Conference Abstract: MEA Meeting 2018, 11th International Meeting on Substrate Integrated Microelectrode Arrays. Frontiers Media. 2018. (Frontiers in Cellular Neuroscience ). https://doi.org/10.3389/conf.fncel.2018.38.00111