(Semi-)transparent ALD TiN microelectrodes

Tomi Ryynänen (Corresponding author), Anssi Pelkonen, Kestutis Grigoras, Oili Ylivaara, Jouni Ahopelto, Mika Prunnila, Susanna Narkilahti, Jukka Lekkala

    Research output: Contribution to conferenceConference PosterScientificpeer-review

    Original languageEnglish
    DOIs
    Publication statusPublished - 27 Jul 2018
    MoE publication typeNot Eligible
    Event11th International Meeting on Substrate Integrated Microelectrode Arrays, MEA Meeting 2018 - City Hall, Reutlingen, Germany
    Duration: 4 Jul 20186 Jul 2018

    Conference

    Conference11th International Meeting on Substrate Integrated Microelectrode Arrays, MEA Meeting 2018
    Abbreviated titleMEA Meeting 2018
    CountryGermany
    CityReutlingen
    Period4/07/186/07/18

    Keywords

    • Microelectrode Array
    • MEA
    • ALD
    • Atomic Layer Deposition
    • TiN
    • titanium nitride
    • transparent
    • OtaNano

    Projects

    Equipment

  • Cite this

    Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O., Ahopelto, J., Prunnila, M., Narkilahti, S., & Lekkala, J. (2018). (Semi-)transparent ALD TiN microelectrodes. Poster session presented at 11th International Meeting on Substrate Integrated Microelectrode Arrays, MEA Meeting 2018, Reutlingen, Germany. https://doi.org/10.3389/conf.fncel.2018.38.00111