(Semi-)transparent ALD TiN microelectrodes

Tomi Ryynänen; Anssi  Pelkonen; Kestutis Grigoras; Oili Ylivaara; Jouni Ahopelto; Mika Prunnila; Susanna  Narkilahti; Jukka Lekkala

doi:10.3389/conf.fncel.2018.38.00111

(Semi-)transparent ALD TiN microelectrodes

Tomi Ryynänen (Corresponding author), Anssi Pelkonen, Kestutis Grigoras, Oili Ylivaara, Jouni Ahopelto, Mika Prunnila, Susanna Narkilahti, Jukka Lekkala

Research output: Contribution to conference › Conference Poster › Scientific › peer-review

Original language	English
DOIs	https://doi.org/10.3389/conf.fncel.2018.38.00111
Publication status	Published - 27 Jul 2018
MoE publication type	Not Eligible
Event	11th International Meeting on Substrate Integrated Microelectrode Arrays, MEA Meeting 2018 - City Hall, Reutlingen, Germany Duration: 4 Jul 2018 → 6 Jul 2018

Conference

Conference	11th International Meeting on Substrate Integrated Microelectrode Arrays, MEA Meeting 2018
Abbreviated title	MEA Meeting 2018
Country/Territory	Germany
City	Reutlingen
Period	4/07/18 → 6/07/18

Keywords

Microelectrode Array
MEA
ALD
Atomic Layer Deposition
TiN
titanium nitride
transparent
OtaNano

Access to Document

10.3389/conf.fncel.2018.38.00111

Cite this

Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O., Ahopelto, J., Prunnila, M., Narkilahti, S., & Lekkala, J. (2018). (Semi-)transparent ALD TiN microelectrodes. Poster session presented at 11th International Meeting on Substrate Integrated Microelectrode Arrays, MEA Meeting 2018, Reutlingen, Baden-Württemberg, Germany. https://doi.org/10.3389/conf.fncel.2018.38.00111

@conference{0f5537ed05ee4320b28c10d2fd2a71a7,

title = "(Semi-)transparent ALD TiN microelectrodes",

keywords = "Microelectrode Array, MEA, ALD, Atomic Layer Deposition, TiN, titanium nitride, transparent, OtaNano",

author = "Tomi Ryyn{\"a}nen and Anssi Pelkonen and Kestutis Grigoras and Oili Ylivaara and Jouni Ahopelto and Mika Prunnila and Susanna Narkilahti and Jukka Lekkala",

note = "Abstract reviewed and published. Poster presentation; 11th International Meeting on Substrate Integrated Microelectrode Arrays, MEA Meeting 2018, MEA Meeting 2018 ; Conference date: 04-07-2018 Through 06-07-2018",

year = "2018",

month = jul,

day = "27",

doi = "10.3389/conf.fncel.2018.38.00111",

language = "English",

}

(Semi-)transparent ALD TiN microelectrodes. / Ryynänen, Tomi (Corresponding author); Pelkonen, Anssi ; Grigoras, Kestutis et al.
2018. Poster session presented at 11th International Meeting on Substrate Integrated Microelectrode Arrays, MEA Meeting 2018, Reutlingen, Baden-Württemberg, Germany.

Research output: Contribution to conference › Conference Poster › Scientific › peer-review

TY - CONF

T1 - (Semi-)transparent ALD TiN microelectrodes

AU - Ryynänen, Tomi

AU - Pelkonen, Anssi

AU - Grigoras, Kestutis

AU - Ylivaara, Oili

AU - Ahopelto, Jouni

AU - Prunnila, Mika

AU - Narkilahti, Susanna

AU - Lekkala, Jukka

N1 - Abstract reviewed and published. Poster presentation

PY - 2018/7/27

Y1 - 2018/7/27

KW - Microelectrode Array

KW - MEA

KW - ALD

KW - Atomic Layer Deposition

KW - TiN

KW - titanium nitride

KW - transparent

KW - OtaNano

UR - https://www.frontiersin.org/10.3389/conf.fncel.2018.38.00111/event_abstract?sname=MEA_Meeting_2018_|_11th_International_Meeting_on_Substrate_Integrated_Microelectrode_Arrays

U2 - 10.3389/conf.fncel.2018.38.00111

DO - 10.3389/conf.fncel.2018.38.00111

M3 - Conference Poster

T2 - 11th International Meeting on Substrate Integrated Microelectrode Arrays, MEA Meeting 2018

Y2 - 4 July 2018 through 6 July 2018

ER -

(Semi-)transparent ALD TiN microelectrodes

Conference

Keywords

Access to Document

Other files and links

ALDCoE: Finnish Centre of Excellence in Atomic Layer Deposition

OtaNano

Cite this

(Semi-)transparent ALD TiN microelectrodes

Conference

Keywords

Access to Document

Other files and links

Projects

ALDCoE: Finnish Centre of Excellence in Atomic Layer Deposition

Equipment

OtaNano

Cite this