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Semiconductor apparatus
Heikki Viljanen
(Inventor)
,
Pekka Rantakari
(Inventor)
,
Tauno Vähä-Heikkilä
(Inventor)
, Esa Tuovinen (Inventor)
BA62 Microelectronics and quantum technology
Research output
:
Patent
›
Patent
Overview
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Keyphrases
Silicon Substrate
100%
Substrate Layer
100%
Semiconductor Equipment
100%
Dopant
66%
Insulator Layer
66%
Electric Charge
33%
Patent Family
33%
Conductivity Type
33%
INIS
layers
100%
semiconductor materials
100%
apparatus
100%
silicon
60%
doped materials
60%
substrates
60%
patents
20%
electric charges
20%
Material Science
Silicon
100%
Doping (Additives)
66%