Sensors, components and miniaturized devices from single-crystal silicon

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publicationProceedings of the XXXIII Annual Conference of the Finnish Physical Society
    Subtitle of host publicationAbstracts
    EditorsEnsio Laine, Markus Lindberg
    PublisherUniversity of Turku
    Pages8.25
    ISBN (Print)951-29-1378-X
    Publication statusPublished - 1999
    MoE publication typeNot Eligible
    EventXXXIII Annual Conference of the Finnish Physical Society - Turku, Finland
    Duration: 4 Mar 19996 Mar 1999

    Publication series

    SeriesUniversity of Turku: Department of Physical Sciences. Report L
    Number28
    ISSN0788-9305

    Conference

    ConferenceXXXIII Annual Conference of the Finnish Physical Society
    CountryFinland
    CityTurku
    Period4/03/996/03/99

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