Sensors, components and miniaturized devices from single-crystal silicon

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Original languageEnglish
Title of host publicationProceedings of the XXXIII Annual Conference of the Finnish Physical Society
Subtitle of host publicationAbstracts
EditorsEnsio Laine, Markus Lindberg
PublisherUniversity of Turku
Pages8.25
ISBN (Print)951-29-1378-X
Publication statusPublished - 1999
MoE publication typeNot Eligible
EventXXXIII Annual Conference of the Finnish Physical Society - Turku, Finland
Duration: 4 Mar 19996 Mar 1999

Publication series

SeriesUniversity of Turku: Department of Physical Sciences. Report L
Number28
ISSN0788-9305

Conference

ConferenceXXXIII Annual Conference of the Finnish Physical Society
CountryFinland
CityTurku
Period4/03/996/03/99

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