Sensors, components and miniaturized devices from single-crystal silicon

Teuvo Sillanpää; Heikki Seppä; Jussi Graeffe; Aarne Oja; Heikki Saari; Mika Suhonen; Jyrki Kiihamäki; A. Lehto

Sensors, components and miniaturized devices from single-crystal silicon

Teuvo Sillanpää, Heikki Seppä, Jussi Graeffe, Aarne Oja, Heikki Saari, Mika Suhonen, Jyrki Kiihamäki, A. Lehto

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Original language	English
Title of host publication	Proceedings of the XXXIII Annual Conference of the Finnish Physical Society
Subtitle of host publication	Abstracts
Editors	Ensio Laine, Markus Lindberg
Publisher	University of Turku
Pages	8.25
ISBN (Print)	951-29-1378-X
Publication status	Published - 1999
MoE publication type	Not Eligible
Event	XXXIII Annual Conference of the Finnish Physical Society - Turku, Finland Duration: 4 Mar 1999 → 6 Mar 1999

Publication series

Series	University of Turku: Department of Physical Sciences. Report L
Number	28
ISSN	0788-9305

Conference

Conference	XXXIII Annual Conference of the Finnish Physical Society
Country/Territory	Finland
City	Turku
Period	4/03/99 → 6/03/99

Cite this

Sillanpää, Teuvo ; Seppä, Heikki ; Graeffe, Jussi et al. / Sensors, components and miniaturized devices from single-crystal silicon. Proceedings of the XXXIII Annual Conference of the Finnish Physical Society: Abstracts. editor / Ensio Laine ; Markus Lindberg. University of Turku, 1999. pp. 8.25 (University of Turku: Department of Physical Sciences. Report L; No. 28).

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title = "Sensors, components and miniaturized devices from single-crystal silicon",

author = "Teuvo Sillanp{\"a}{\"a} and Heikki Sepp{\"a} and Jussi Graeffe and Aarne Oja and Heikki Saari and Mika Suhonen and Jyrki Kiiham{\"a}ki and A. Lehto",

year = "1999",

language = "English",

isbn = "951-29-1378-X",

series = "University of Turku: Department of Physical Sciences. Report L",

publisher = "University of Turku",

number = "28",

pages = "8.25",

editor = "Ensio Laine and Markus Lindberg",

booktitle = "Proceedings of the XXXIII Annual Conference of the Finnish Physical Society",

address = "Finland",

note = "XXXIII Annual Conference of the Finnish Physical Society ; Conference date: 04-03-1999 Through 06-03-1999",

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Sillanpää, T, Seppä, H, Graeffe, J, Oja, A, Saari, H , Suhonen, M , Kiihamäki, J & Lehto, A 1999, Sensors, components and miniaturized devices from single-crystal silicon. in E Laine & M Lindberg (eds), Proceedings of the XXXIII Annual Conference of the Finnish Physical Society: Abstracts. University of Turku, University of Turku: Department of Physical Sciences. Report L, no. 28, pp. 8.25, XXXIII Annual Conference of the Finnish Physical Society, Turku, Finland, 4/03/99.

Sensors, components and miniaturized devices from single-crystal silicon. / Sillanpää, Teuvo; Seppä, Heikki; Graeffe, Jussi et al.
Proceedings of the XXXIII Annual Conference of the Finnish Physical Society: Abstracts. ed. / Ensio Laine; Markus Lindberg. University of Turku, 1999. p. 8.25 (University of Turku: Department of Physical Sciences. Report L; No. 28).

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

TY - CHAP

T1 - Sensors, components and miniaturized devices from single-crystal silicon

AU - Sillanpää, Teuvo

AU - Seppä, Heikki

AU - Graeffe, Jussi

AU - Oja, Aarne

AU - Saari, Heikki

AU - Suhonen, Mika

AU - Kiihamäki, Jyrki

AU - Lehto, A.

PY - 1999

Y1 - 1999

M3 - Conference abstract in proceedings

SN - 951-29-1378-X

T3 - University of Turku: Department of Physical Sciences. Report L

SP - 8.25

BT - Proceedings of the XXXIII Annual Conference of the Finnish Physical Society

A2 - Laine, Ensio

A2 - Lindberg, Markus

PB - University of Turku

T2 - XXXIII Annual Conference of the Finnish Physical Society

Y2 - 4 March 1999 through 6 March 1999

ER -

Sillanpää T, Seppä H, Graeffe J, Oja A, Saari H , Suhonen M et al. Sensors, components and miniaturized devices from single-crystal silicon. In Laine E, Lindberg M, editors, Proceedings of the XXXIII Annual Conference of the Finnish Physical Society: Abstracts. University of Turku. 1999. p. 8.25. (University of Turku: Department of Physical Sciences. Report L; No. 28).