Sensors for Thermal Characterization of Solid and Liquid Samples by 3-Omega Method

Kestutis Grigoras (Corresponding Author), Aapo Varpula, Corinna Grosse, Daniel May, Mohamad Abo Ras, Mika Prunnila

Research output: Contribution to journalArticleScientificpeer-review

Abstract

Microchips have been designed and fabricated for the fast thermal characterization of samples by extension of the 3-omega method. Both solid and liquid samples can be measured by applying a small amount of material under investigation on the chip containing a micro heater/sensor. Two types of chips have been fabricated and tested: silicon chips with porous silicon (PS) layer as thermal isolator and glass chips with through glass vias (TGVs) for the back side contacting of the top side heater/sensor.
Original languageEnglish
Article number883
Number of pages5
JournalProceedings
Volume2
Issue number13
DOIs
Publication statusPublished - 28 Nov 2018
MoE publication typeNot Eligible
EventEurosensors 2018 Conference - Graz, Austria
Duration: 9 Sep 201812 Dec 2018
Conference number: 32
https://eurosensors2018.eu/

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Glass
Porous silicon
Sensors
Liquids
Silicon
Hot Temperature

Keywords

  • thermal conductivity
  • 3-omega method
  • porous silicon
  • glass
  • microfabrication
  • atomic layer deposition

Cite this

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abstract = "Microchips have been designed and fabricated for the fast thermal characterization of samples by extension of the 3-omega method. Both solid and liquid samples can be measured by applying a small amount of material under investigation on the chip containing a micro heater/sensor. Two types of chips have been fabricated and tested: silicon chips with porous silicon (PS) layer as thermal isolator and glass chips with through glass vias (TGVs) for the back side contacting of the top side heater/sensor.",
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Sensors for Thermal Characterization of Solid and Liquid Samples by 3-Omega Method. / Grigoras, Kestutis (Corresponding Author); Varpula, Aapo; Grosse, Corinna; May, Daniel; Ras, Mohamad Abo; Prunnila, Mika.

In: Proceedings, Vol. 2, No. 13, 883, 28.11.2018.

Research output: Contribution to journalArticleScientificpeer-review

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AU - Prunnila, Mika

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KW - glass

KW - microfabrication

KW - atomic layer deposition

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