Sensors for Thermal Characterization of Solid and Liquid Samples by 3-Omega Method

Kestutis Grigoras (Corresponding Author), Aapo Varpula, Corinna Grosse, Daniel May, Mohamad Abo Ras, Mika Prunnila

    Research output: Contribution to journalArticleScientificpeer-review

    Abstract

    Microchips have been designed and fabricated for the fast thermal characterization of samples by extension of the 3-omega method. Both solid and liquid samples can be measured by applying a small amount of material under investigation on the chip containing a micro heater/sensor. Two types of chips have been fabricated and tested: silicon chips with porous silicon (PS) layer as thermal isolator and glass chips with through glass vias (TGVs) for the back side contacting of the top side heater/sensor.
    Original languageEnglish
    Article number883
    Number of pages5
    JournalProceedings
    Volume2
    Issue number13
    DOIs
    Publication statusPublished - 28 Nov 2018
    MoE publication typeNot Eligible
    EventEurosensors 2018 Conference - Graz, Austria
    Duration: 9 Sep 201812 Dec 2018
    Conference number: 32
    https://eurosensors2018.eu/

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    Glass
    Porous silicon
    Sensors
    Liquids
    Silicon
    Hot Temperature

    Keywords

    • thermal conductivity
    • 3-omega method
    • porous silicon
    • glass
    • microfabrication
    • atomic layer deposition

    Cite this

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    title = "Sensors for Thermal Characterization of Solid and Liquid Samples by 3-Omega Method",
    abstract = "Microchips have been designed and fabricated for the fast thermal characterization of samples by extension of the 3-omega method. Both solid and liquid samples can be measured by applying a small amount of material under investigation on the chip containing a micro heater/sensor. Two types of chips have been fabricated and tested: silicon chips with porous silicon (PS) layer as thermal isolator and glass chips with through glass vias (TGVs) for the back side contacting of the top side heater/sensor.",
    keywords = "thermal conductivity, 3-omega method, porous silicon, glass, microfabrication, atomic layer deposition",
    author = "Kestutis Grigoras and Aapo Varpula and Corinna Grosse and Daniel May and Ras, {Mohamad Abo} and Mika Prunnila",
    year = "2018",
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    doi = "10.3390/proceedings2130883",
    language = "English",
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    Sensors for Thermal Characterization of Solid and Liquid Samples by 3-Omega Method. / Grigoras, Kestutis (Corresponding Author); Varpula, Aapo; Grosse, Corinna; May, Daniel; Ras, Mohamad Abo; Prunnila, Mika.

    In: Proceedings, Vol. 2, No. 13, 883, 28.11.2018.

    Research output: Contribution to journalArticleScientificpeer-review

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    T1 - Sensors for Thermal Characterization of Solid and Liquid Samples by 3-Omega Method

    AU - Grigoras, Kestutis

    AU - Varpula, Aapo

    AU - Grosse, Corinna

    AU - May, Daniel

    AU - Ras, Mohamad Abo

    AU - Prunnila, Mika

    PY - 2018/11/28

    Y1 - 2018/11/28

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    KW - thermal conductivity

    KW - 3-omega method

    KW - porous silicon

    KW - glass

    KW - microfabrication

    KW - atomic layer deposition

    UR - https://www.mdpi.com/2504-3900/2/13/883

    U2 - 10.3390/proceedings2130883

    DO - 10.3390/proceedings2130883

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