Sensors for Thermal Characterization of Solid and Liquid Samples by 3-Omega Method

Kestutis Grigoras (Corresponding Author), Aapo Varpula, Corinna Grosse, Daniel May, Mohamad Abo Ras, Mika Prunnila

    Research output: Contribution to journalArticle in a proceedings journalScientificpeer-review


    Microchips have been designed and fabricated for the fast thermal characterization of samples by extension of the 3-omega method. Both solid and liquid samples can be measured by applying a small amount of material under investigation on the chip containing a micro heater/sensor. Two types of chips have been fabricated and tested: silicon chips with porous silicon (PS) layer as thermal isolator and glass chips with through glass vias (TGVs) for the back side contacting of the top side heater/sensor.
    Original languageEnglish
    Article number883
    Number of pages5
    Issue number13
    Publication statusPublished - 28 Nov 2018
    MoE publication typeNot Eligible
    EventEurosensors 2018 Conference - Graz, Austria
    Duration: 9 Sept 201812 Dec 2018
    Conference number: 32


    • thermal conductivity
    • 3-omega method
    • porous silicon
    • glass
    • microfabrication
    • atomic layer deposition
    • OtaNano


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