Shear mode FBARs as highly sensitive liquid biosensors

Jan Weber; Martin Albers; Jussipekka Tuppurainen; Mathias Link; Reinhard Gabl; Wolfram Wersing; Matthias Schreiter

doi:10.1016/j.sna.2006.01.005

Shear mode FBARs as highly sensitive liquid biosensors

Jan Weber (Corresponding Author), Martin Albers, Jussipekka Tuppurainen, Mathias Link, Reinhard Gabl, Wolfram Wersing, Matthias Schreiter

VTT Technical Research Centre of Finland

Siemens AG

Research output: Contribution to journal › Article › Scientific › peer-review

173 Citations (Scopus)

Abstract

Thin film bulk acoustic resonators (FBARs) operating in shear mode have been investigated for biosensing applications. Dynamic measurements in liquid were carried out and the adsorption of an antibody–antigen system was observed. Although this is the very first FBAR biosensor system operating in liquid environment it was found that the sensor performance ruled by the smallest detectable mass attachment, is already better (2.3 ng/cm²) than that of QCMs. The ability of easy integration onto wafers together with readout-circuitry as well as the possibility of making up large arrays comprising pixels with different functionalities make these devices interesting for future acoustic biosensors.

Original language	English
Pages (from-to)	84-88
Journal	Sensors and Actuators A: Physical
Volume	128
Issue number	1
DOIs	https://doi.org/10.1016/j.sna.2006.01.005
Publication status	Published - 2006
MoE publication type	A1 Journal article-refereed

Keywords

biomedical transducers
FBAR
shear mode
QCM
resonators
biosensors

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abstract = "Thin film bulk acoustic resonators (FBARs) operating in shear mode have been investigated for biosensing applications. Dynamic measurements in liquid were carried out and the adsorption of an antibody–antigen system was observed. Although this is the very first FBAR biosensor system operating in liquid environment it was found that the sensor performance ruled by the smallest detectable mass attachment, is already better (2.3 ng/cm2) than that of QCMs. The ability of easy integration onto wafers together with readout-circuitry as well as the possibility of making up large arrays comprising pixels with different functionalities make these devices interesting for future acoustic biosensors.",

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AU - Weber, Jan

AU - Albers, Martin

AU - Tuppurainen, Jussipekka

AU - Link, Mathias

AU - Gabl, Reinhard

AU - Wersing, Wolfram

AU - Schreiter, Matthias

PY - 2006

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KW - biomedical transducers

KW - FBAR

KW - shear mode

KW - QCM

KW - resonators

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JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

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ER -

Shear mode FBARs as highly sensitive liquid biosensors

Abstract

Keywords

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