Shear mode FBARs as highly sensitive liquid biosensors

Jan Weber (Corresponding Author), Martin Albers, Jussipekka Tuppurainen, Mathias Link, Reinhard Gabl, Wolfram Wersing, Matthias Schreiter

Research output: Contribution to journalArticleScientificpeer-review

150 Citations (Scopus)

Abstract

Thin film bulk acoustic resonators (FBARs) operating in shear mode have been investigated for biosensing applications. Dynamic measurements in liquid were carried out and the adsorption of an antibody–antigen system was observed. Although this is the very first FBAR biosensor system operating in liquid environment it was found that the sensor performance ruled by the smallest detectable mass attachment, is already better (2.3 ng/cm2) than that of QCMs. The ability of easy integration onto wafers together with readout-circuitry as well as the possibility of making up large arrays comprising pixels with different functionalities make these devices interesting for future acoustic biosensors.
Original languageEnglish
Pages (from-to)84-88
JournalSensors and Actuators A: Physical
Volume128
Issue number1
DOIs
Publication statusPublished - 2006
MoE publication typeA1 Journal article-refereed

Keywords

  • biomedical transducers
  • FBAR
  • shear mode
  • QCM
  • resonators
  • biosensors

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    Weber, J., Albers, M., Tuppurainen, J., Link, M., Gabl, R., Wersing, W., & Schreiter, M. (2006). Shear mode FBARs as highly sensitive liquid biosensors. Sensors and Actuators A: Physical, 128(1), 84-88. https://doi.org/10.1016/j.sna.2006.01.005