Si-based integrated optical and photonic microstructures

Matti Leppihalme, Timo Aalto, Pekka Katila, Päivi Heimala, Martti Blomberg, Simo Tammela

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    1 Citation (Scopus)

    Abstract

    The design, fabrication and properties of various types of optical waveguides on silicon substrates as well as Fabry-Perot devices accomplished mainly at the Microelectronics Center of VTT Electronics are introduced. Different waveguides, directional couplers, multimode interference (MMI) couplers, switches and power splitters have been studied. For waveguide fabrication on silicon substrates principally three materials were used depending on the application: silicon oxynitride (SiOxNy), silicon nitride (Si3N4) and silicon on insulator (SOI). Silicon waveguides with large Si-core and a thermo-optical switch have been fabricated by SOI technology. Silicon Fabry-Perot structures have been fabricated for wavelength scanning applications in instrumentation and to measure chirp properties of lasers used in optical communications.
    Original languageEnglish
    Title of host publicationIntegrated optics devices IV
    EditorsGiancarlo C. Righini, Seppo Honkanen
    PublisherInternational Society for Optics and Photonics SPIE
    Pages2-15
    DOIs
    Publication statusPublished - 2000
    MoE publication typeA4 Article in a conference publication
    EventSymposium on Integrated Optoelectronics - San Jose, United States
    Duration: 24 Jan 200026 Jan 2000

    Publication series

    SeriesProceedings of SPIE
    Volume3936
    ISSN0277-786X

    Conference

    ConferenceSymposium on Integrated Optoelectronics
    CountryUnited States
    CitySan Jose
    Period24/01/0026/01/00

    Fingerprint

    photonics
    microstructure
    silicon
    waveguides
    switches
    insulators
    fabrication
    oxynitrides
    directional couplers
    chirp
    silicon nitrides
    microelectronics
    optical waveguides
    couplers
    optical communication
    interference
    scanning
    electronics
    wavelengths
    lasers

    Cite this

    Leppihalme, M., Aalto, T., Katila, P., Heimala, P., Blomberg, M., & Tammela, S. (2000). Si-based integrated optical and photonic microstructures. In G. C. Righini, & S. Honkanen (Eds.), Integrated optics devices IV (pp. 2-15). International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 3936 https://doi.org/10.1117/12.379932
    Leppihalme, Matti ; Aalto, Timo ; Katila, Pekka ; Heimala, Päivi ; Blomberg, Martti ; Tammela, Simo. / Si-based integrated optical and photonic microstructures. Integrated optics devices IV. editor / Giancarlo C. Righini ; Seppo Honkanen. International Society for Optics and Photonics SPIE, 2000. pp. 2-15 (Proceedings of SPIE, Vol. 3936).
    @inproceedings{742148eb9c884047a6b74f322eebef98,
    title = "Si-based integrated optical and photonic microstructures",
    abstract = "The design, fabrication and properties of various types of optical waveguides on silicon substrates as well as Fabry-Perot devices accomplished mainly at the Microelectronics Center of VTT Electronics are introduced. Different waveguides, directional couplers, multimode interference (MMI) couplers, switches and power splitters have been studied. For waveguide fabrication on silicon substrates principally three materials were used depending on the application: silicon oxynitride (SiOxNy), silicon nitride (Si3N4) and silicon on insulator (SOI). Silicon waveguides with large Si-core and a thermo-optical switch have been fabricated by SOI technology. Silicon Fabry-Perot structures have been fabricated for wavelength scanning applications in instrumentation and to measure chirp properties of lasers used in optical communications.",
    author = "Matti Leppihalme and Timo Aalto and Pekka Katila and P{\"a}ivi Heimala and Martti Blomberg and Simo Tammela",
    note = "CA2: ele1 CA: ELE",
    year = "2000",
    doi = "10.1117/12.379932",
    language = "English",
    series = "Proceedings of SPIE",
    publisher = "International Society for Optics and Photonics SPIE",
    pages = "2--15",
    editor = "Righini, {Giancarlo C.} and Seppo Honkanen",
    booktitle = "Integrated optics devices IV",
    address = "United States",

    }

    Leppihalme, M, Aalto, T, Katila, P, Heimala, P, Blomberg, M & Tammela, S 2000, Si-based integrated optical and photonic microstructures. in GC Righini & S Honkanen (eds), Integrated optics devices IV. International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 3936, pp. 2-15, Symposium on Integrated Optoelectronics, San Jose, United States, 24/01/00. https://doi.org/10.1117/12.379932

    Si-based integrated optical and photonic microstructures. / Leppihalme, Matti; Aalto, Timo; Katila, Pekka; Heimala, Päivi; Blomberg, Martti; Tammela, Simo.

    Integrated optics devices IV. ed. / Giancarlo C. Righini; Seppo Honkanen. International Society for Optics and Photonics SPIE, 2000. p. 2-15 (Proceedings of SPIE, Vol. 3936).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    TY - GEN

    T1 - Si-based integrated optical and photonic microstructures

    AU - Leppihalme, Matti

    AU - Aalto, Timo

    AU - Katila, Pekka

    AU - Heimala, Päivi

    AU - Blomberg, Martti

    AU - Tammela, Simo

    N1 - CA2: ele1 CA: ELE

    PY - 2000

    Y1 - 2000

    N2 - The design, fabrication and properties of various types of optical waveguides on silicon substrates as well as Fabry-Perot devices accomplished mainly at the Microelectronics Center of VTT Electronics are introduced. Different waveguides, directional couplers, multimode interference (MMI) couplers, switches and power splitters have been studied. For waveguide fabrication on silicon substrates principally three materials were used depending on the application: silicon oxynitride (SiOxNy), silicon nitride (Si3N4) and silicon on insulator (SOI). Silicon waveguides with large Si-core and a thermo-optical switch have been fabricated by SOI technology. Silicon Fabry-Perot structures have been fabricated for wavelength scanning applications in instrumentation and to measure chirp properties of lasers used in optical communications.

    AB - The design, fabrication and properties of various types of optical waveguides on silicon substrates as well as Fabry-Perot devices accomplished mainly at the Microelectronics Center of VTT Electronics are introduced. Different waveguides, directional couplers, multimode interference (MMI) couplers, switches and power splitters have been studied. For waveguide fabrication on silicon substrates principally three materials were used depending on the application: silicon oxynitride (SiOxNy), silicon nitride (Si3N4) and silicon on insulator (SOI). Silicon waveguides with large Si-core and a thermo-optical switch have been fabricated by SOI technology. Silicon Fabry-Perot structures have been fabricated for wavelength scanning applications in instrumentation and to measure chirp properties of lasers used in optical communications.

    U2 - 10.1117/12.379932

    DO - 10.1117/12.379932

    M3 - Conference article in proceedings

    T3 - Proceedings of SPIE

    SP - 2

    EP - 15

    BT - Integrated optics devices IV

    A2 - Righini, Giancarlo C.

    A2 - Honkanen, Seppo

    PB - International Society for Optics and Photonics SPIE

    ER -

    Leppihalme M, Aalto T, Katila P, Heimala P, Blomberg M, Tammela S. Si-based integrated optical and photonic microstructures. In Righini GC, Honkanen S, editors, Integrated optics devices IV. International Society for Optics and Photonics SPIE. 2000. p. 2-15. (Proceedings of SPIE, Vol. 3936). https://doi.org/10.1117/12.379932