Si-based integrated optical and photonic microstructures

Matti Leppihalme; Timo Aalto; Pekka Katila; Päivi Heimala; Martti Blomberg; Simo Tammela

doi:10.1117/12.379932

Si-based integrated optical and photonic microstructures

Matti Leppihalme, Timo Aalto, Pekka Katila, Päivi Heimala, Martti Blomberg, Simo Tammela

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

1 Citation (Scopus)

Abstract

The design, fabrication and properties of various types of optical waveguides on silicon substrates as well as Fabry-Perot devices accomplished mainly at the Microelectronics Center of VTT Electronics are introduced. Different waveguides, directional couplers, multimode interference (MMI) couplers, switches and power splitters have been studied. For waveguide fabrication on silicon substrates principally three materials were used depending on the application: silicon oxynitride (SiOxNy), silicon nitride (Si3N4) and silicon on insulator (SOI). Silicon waveguides with large Si-core and a thermo-optical switch have been fabricated by SOI technology. Silicon Fabry-Perot structures have been fabricated for wavelength scanning applications in instrumentation and to measure chirp properties of lasers used in optical communications.

Original language	English
Title of host publication	Integrated optics devices IV
Editors	Giancarlo C. Righini, Seppo Honkanen
Publisher	International Society for Optics and Photonics SPIE
Pages	2-15
DOIs	https://doi.org/10.1117/12.379932
Publication status	Published - 2000
MoE publication type	A4 Article in a conference publication
Event	Symposium on Integrated Optoelectronics - San Jose, United States Duration: 24 Jan 2000 → 26 Jan 2000

Publication series

Series	Proceedings of SPIE
Volume	3936
ISSN	0277-786X

Conference

Conference	Symposium on Integrated Optoelectronics
Country	United States
City	San Jose
Period	24/01/00 → 26/01/00

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10.1117/12.379932

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Leppihalme, M., Aalto, T., Katila, P., Heimala, P., Blomberg, M., & Tammela, S. (2000). Si-based integrated optical and photonic microstructures. In G. C. Righini, & S. Honkanen (Eds.), Integrated optics devices IV (pp. 2-15). International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 3936 https://doi.org/10.1117/12.379932

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title = "Si-based integrated optical and photonic microstructures",

abstract = "The design, fabrication and properties of various types of optical waveguides on silicon substrates as well as Fabry-Perot devices accomplished mainly at the Microelectronics Center of VTT Electronics are introduced. Different waveguides, directional couplers, multimode interference (MMI) couplers, switches and power splitters have been studied. For waveguide fabrication on silicon substrates principally three materials were used depending on the application: silicon oxynitride (SiOxNy), silicon nitride (Si3N4) and silicon on insulator (SOI). Silicon waveguides with large Si-core and a thermo-optical switch have been fabricated by SOI technology. Silicon Fabry-Perot structures have been fabricated for wavelength scanning applications in instrumentation and to measure chirp properties of lasers used in optical communications.",

author = "Matti Leppihalme and Timo Aalto and Pekka Katila and P{\"a}ivi Heimala and Martti Blomberg and Simo Tammela",

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doi = "10.1117/12.379932",

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Leppihalme, M, Aalto, T, Katila, P, Heimala, P , Blomberg, M & Tammela, S 2000, Si-based integrated optical and photonic microstructures. in GC Righini & S Honkanen (eds), Integrated optics devices IV. International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 3936, pp. 2-15, Symposium on Integrated Optoelectronics, San Jose, United States, 24/01/00. https://doi.org/10.1117/12.379932

Si-based integrated optical and photonic microstructures. / Leppihalme, Matti; Aalto, Timo; Katila, Pekka; Heimala, Päivi ; Blomberg, Martti; Tammela, Simo.

Integrated optics devices IV. ed. / Giancarlo C. Righini; Seppo Honkanen. International Society for Optics and Photonics SPIE, 2000. p. 2-15 (Proceedings of SPIE, Vol. 3936).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

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