Si-based integrated optical and photonic microstructures

Matti Leppihalme, Timo Aalto, Pekka Katila, Päivi Heimala, Martti Blomberg, Simo Tammela

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)

Abstract

The design, fabrication and properties of various types of optical waveguides on silicon substrates as well as Fabry-Perot devices accomplished mainly at the Microelectronics Center of VTT Electronics are introduced. Different waveguides, directional couplers, multimode interference (MMI) couplers, switches and power splitters have been studied. For waveguide fabrication on silicon substrates principally three materials were used depending on the application: silicon oxynitride (SiOxNy), silicon nitride (Si3N4) and silicon on insulator (SOI). Silicon waveguides with large Si-core and a thermo-optical switch have been fabricated by SOI technology. Silicon Fabry-Perot structures have been fabricated for wavelength scanning applications in instrumentation and to measure chirp properties of lasers used in optical communications.
Original languageEnglish
Title of host publicationIntegrated optics devices IV
EditorsGiancarlo C. Righini, Seppo Honkanen
PublisherInternational Society for Optics and Photonics SPIE
Pages2-15
DOIs
Publication statusPublished - 2000
MoE publication typeA4 Article in a conference publication
EventSymposium on Integrated Optoelectronics - San Jose, United States
Duration: 24 Jan 200026 Jan 2000

Publication series

SeriesProceedings of SPIE
Volume3936
ISSN0277-786X

Conference

ConferenceSymposium on Integrated Optoelectronics
CountryUnited States
CitySan Jose
Period24/01/0026/01/00

Fingerprint

photonics
microstructure
silicon
waveguides
switches
insulators
fabrication
oxynitrides
directional couplers
chirp
silicon nitrides
microelectronics
optical waveguides
couplers
optical communication
interference
scanning
electronics
wavelengths
lasers

Cite this

Leppihalme, M., Aalto, T., Katila, P., Heimala, P., Blomberg, M., & Tammela, S. (2000). Si-based integrated optical and photonic microstructures. In G. C. Righini, & S. Honkanen (Eds.), Integrated optics devices IV (pp. 2-15). International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 3936 https://doi.org/10.1117/12.379932
Leppihalme, Matti ; Aalto, Timo ; Katila, Pekka ; Heimala, Päivi ; Blomberg, Martti ; Tammela, Simo. / Si-based integrated optical and photonic microstructures. Integrated optics devices IV. editor / Giancarlo C. Righini ; Seppo Honkanen. International Society for Optics and Photonics SPIE, 2000. pp. 2-15 (Proceedings of SPIE, Vol. 3936).
@inproceedings{742148eb9c884047a6b74f322eebef98,
title = "Si-based integrated optical and photonic microstructures",
abstract = "The design, fabrication and properties of various types of optical waveguides on silicon substrates as well as Fabry-Perot devices accomplished mainly at the Microelectronics Center of VTT Electronics are introduced. Different waveguides, directional couplers, multimode interference (MMI) couplers, switches and power splitters have been studied. For waveguide fabrication on silicon substrates principally three materials were used depending on the application: silicon oxynitride (SiOxNy), silicon nitride (Si3N4) and silicon on insulator (SOI). Silicon waveguides with large Si-core and a thermo-optical switch have been fabricated by SOI technology. Silicon Fabry-Perot structures have been fabricated for wavelength scanning applications in instrumentation and to measure chirp properties of lasers used in optical communications.",
author = "Matti Leppihalme and Timo Aalto and Pekka Katila and P{\"a}ivi Heimala and Martti Blomberg and Simo Tammela",
note = "CA2: ele1 CA: ELE",
year = "2000",
doi = "10.1117/12.379932",
language = "English",
series = "Proceedings of SPIE",
publisher = "International Society for Optics and Photonics SPIE",
pages = "2--15",
editor = "Righini, {Giancarlo C.} and Seppo Honkanen",
booktitle = "Integrated optics devices IV",
address = "United States",

}

Leppihalme, M, Aalto, T, Katila, P, Heimala, P, Blomberg, M & Tammela, S 2000, Si-based integrated optical and photonic microstructures. in GC Righini & S Honkanen (eds), Integrated optics devices IV. International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 3936, pp. 2-15, Symposium on Integrated Optoelectronics, San Jose, United States, 24/01/00. https://doi.org/10.1117/12.379932

Si-based integrated optical and photonic microstructures. / Leppihalme, Matti; Aalto, Timo; Katila, Pekka; Heimala, Päivi; Blomberg, Martti; Tammela, Simo.

Integrated optics devices IV. ed. / Giancarlo C. Righini; Seppo Honkanen. International Society for Optics and Photonics SPIE, 2000. p. 2-15 (Proceedings of SPIE, Vol. 3936).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Si-based integrated optical and photonic microstructures

AU - Leppihalme, Matti

AU - Aalto, Timo

AU - Katila, Pekka

AU - Heimala, Päivi

AU - Blomberg, Martti

AU - Tammela, Simo

N1 - CA2: ele1 CA: ELE

PY - 2000

Y1 - 2000

N2 - The design, fabrication and properties of various types of optical waveguides on silicon substrates as well as Fabry-Perot devices accomplished mainly at the Microelectronics Center of VTT Electronics are introduced. Different waveguides, directional couplers, multimode interference (MMI) couplers, switches and power splitters have been studied. For waveguide fabrication on silicon substrates principally three materials were used depending on the application: silicon oxynitride (SiOxNy), silicon nitride (Si3N4) and silicon on insulator (SOI). Silicon waveguides with large Si-core and a thermo-optical switch have been fabricated by SOI technology. Silicon Fabry-Perot structures have been fabricated for wavelength scanning applications in instrumentation and to measure chirp properties of lasers used in optical communications.

AB - The design, fabrication and properties of various types of optical waveguides on silicon substrates as well as Fabry-Perot devices accomplished mainly at the Microelectronics Center of VTT Electronics are introduced. Different waveguides, directional couplers, multimode interference (MMI) couplers, switches and power splitters have been studied. For waveguide fabrication on silicon substrates principally three materials were used depending on the application: silicon oxynitride (SiOxNy), silicon nitride (Si3N4) and silicon on insulator (SOI). Silicon waveguides with large Si-core and a thermo-optical switch have been fabricated by SOI technology. Silicon Fabry-Perot structures have been fabricated for wavelength scanning applications in instrumentation and to measure chirp properties of lasers used in optical communications.

U2 - 10.1117/12.379932

DO - 10.1117/12.379932

M3 - Conference article in proceedings

T3 - Proceedings of SPIE

SP - 2

EP - 15

BT - Integrated optics devices IV

A2 - Righini, Giancarlo C.

A2 - Honkanen, Seppo

PB - International Society for Optics and Photonics SPIE

ER -

Leppihalme M, Aalto T, Katila P, Heimala P, Blomberg M, Tammela S. Si-based integrated optical and photonic microstructures. In Righini GC, Honkanen S, editors, Integrated optics devices IV. International Society for Optics and Photonics SPIE. 2000. p. 2-15. (Proceedings of SPIE, Vol. 3936). https://doi.org/10.1117/12.379932