Abstract
| Original language | English |
|---|---|
| Title of host publication | Integrated optics devices IV |
| Editors | Giancarlo C. Righini, Seppo Honkanen |
| Publisher | International Society for Optics and Photonics SPIE |
| Pages | 2-15 |
| DOIs | |
| Publication status | Published - 2000 |
| MoE publication type | A4 Article in a conference publication |
| Event | Symposium on Integrated Optoelectronics - San Jose, United States Duration: 24 Jan 2000 → 26 Jan 2000 |
Publication series
| Series | Proceedings of SPIE |
|---|---|
| Volume | 3936 |
| ISSN | 0277-786X |
Conference
| Conference | Symposium on Integrated Optoelectronics |
|---|---|
| Country | United States |
| City | San Jose |
| Period | 24/01/00 → 26/01/00 |
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Si-based integrated optical and photonic microstructures. / Leppihalme, Matti; Aalto, Timo; Katila, Pekka; Heimala, Päivi; Blomberg, Martti; Tammela, Simo.
Integrated optics devices IV. ed. / Giancarlo C. Righini; Seppo Honkanen. International Society for Optics and Photonics SPIE, 2000. p. 2-15 (Proceedings of SPIE, Vol. 3936).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
TY - GEN
T1 - Si-based integrated optical and photonic microstructures
AU - Leppihalme, Matti
AU - Aalto, Timo
AU - Katila, Pekka
AU - Heimala, Päivi
AU - Blomberg, Martti
AU - Tammela, Simo
N1 - CA2: ele1 CA: ELE
PY - 2000
Y1 - 2000
N2 - The design, fabrication and properties of various types of optical waveguides on silicon substrates as well as Fabry-Perot devices accomplished mainly at the Microelectronics Center of VTT Electronics are introduced. Different waveguides, directional couplers, multimode interference (MMI) couplers, switches and power splitters have been studied. For waveguide fabrication on silicon substrates principally three materials were used depending on the application: silicon oxynitride (SiOxNy), silicon nitride (Si3N4) and silicon on insulator (SOI). Silicon waveguides with large Si-core and a thermo-optical switch have been fabricated by SOI technology. Silicon Fabry-Perot structures have been fabricated for wavelength scanning applications in instrumentation and to measure chirp properties of lasers used in optical communications.
AB - The design, fabrication and properties of various types of optical waveguides on silicon substrates as well as Fabry-Perot devices accomplished mainly at the Microelectronics Center of VTT Electronics are introduced. Different waveguides, directional couplers, multimode interference (MMI) couplers, switches and power splitters have been studied. For waveguide fabrication on silicon substrates principally three materials were used depending on the application: silicon oxynitride (SiOxNy), silicon nitride (Si3N4) and silicon on insulator (SOI). Silicon waveguides with large Si-core and a thermo-optical switch have been fabricated by SOI technology. Silicon Fabry-Perot structures have been fabricated for wavelength scanning applications in instrumentation and to measure chirp properties of lasers used in optical communications.
U2 - 10.1117/12.379932
DO - 10.1117/12.379932
M3 - Conference article in proceedings
T3 - Proceedings of SPIE
SP - 2
EP - 15
BT - Integrated optics devices IV
A2 - Righini, Giancarlo C.
A2 - Honkanen, Seppo
PB - International Society for Optics and Photonics SPIE
ER -