@inproceedings{742148eb9c884047a6b74f322eebef98,
title = "Si-based integrated optical and photonic microstructures",
abstract = "The design, fabrication and properties of various types of optical waveguides on silicon substrates as well as Fabry-Perot devices accomplished mainly at the Microelectronics Center of VTT Electronics are introduced. Different waveguides, directional couplers, multimode interference (MMI) couplers, switches and power splitters have been studied. For waveguide fabrication on silicon substrates principally three materials were used depending on the application: silicon oxynitride (SiOxNy), silicon nitride (Si3N4) and silicon on insulator (SOI). Silicon waveguides with large Si-core and a thermo-optical switch have been fabricated by SOI technology. Silicon Fabry-Perot structures have been fabricated for wavelength scanning applications in instrumentation and to measure chirp properties of lasers used in optical communications.",
author = "Matti Leppihalme and Timo Aalto and Pekka Katila and P{\"a}ivi Heimala and Martti Blomberg and Simo Tammela",
note = "Duplicate (abstract) deleted; Photonics West 2000 : Symposium on Integrated Optoelectronics ; Conference date: 24-01-2000 Through 25-01-2000",
year = "2000",
doi = "10.1117/12.379932",
language = "English",
series = "Proceedings of SPIE",
publisher = "International Society for Optics and Photonics SPIE",
pages = "2--15",
editor = "Righini, {Giancarlo C.} and Seppo Honkanen",
booktitle = "Integrated optics devices IV",
address = "United States",
}