Si-based integrated optical and photonic microstructures

Matti Leppihalme, Timo Aalto, Pekka Katila, Päivi Heimala, Martti Blomberg, Simo Tammela

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    1 Citation (Scopus)


    The design, fabrication and properties of various types of optical waveguides on silicon substrates as well as Fabry-Perot devices accomplished mainly at the Microelectronics Center of VTT Electronics are introduced. Different waveguides, directional couplers, multimode interference (MMI) couplers, switches and power splitters have been studied. For waveguide fabrication on silicon substrates principally three materials were used depending on the application: silicon oxynitride (SiOxNy), silicon nitride (Si3N4) and silicon on insulator (SOI). Silicon waveguides with large Si-core and a thermo-optical switch have been fabricated by SOI technology. Silicon Fabry-Perot structures have been fabricated for wavelength scanning applications in instrumentation and to measure chirp properties of lasers used in optical communications.
    Original languageEnglish
    Title of host publicationIntegrated optics devices IV
    EditorsGiancarlo C. Righini, Seppo Honkanen
    PublisherInternational Society for Optics and Photonics SPIE
    Publication statusPublished - 2000
    MoE publication typeA4 Article in a conference publication
    EventPhotonics West 2000: Symposium on Integrated Optoelectronics - San Jose, United States
    Duration: 24 Jan 200025 Jan 2000

    Publication series

    SeriesProceedings of SPIE


    ConferencePhotonics West 2000
    Country/TerritoryUnited States
    CitySan Jose


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