Silicon-based lateral-gap test structures to mimic macro- and mesoporous catalyst supports

Riikka L. Puurunen, Oili Ylivaara, Kestutis Grigoras, Markku Ylilammi

Research output: Contribution to conference › Conference article › Scientific › peer-review

Original language	English
Publication status	Published - 2017
Event	13th European Congress on Catalysis, EUROPACAT 2017 - Florence, Italy Duration: 27 Aug 2017 → 31 Aug 2017

Conference	13th European Congress on Catalysis, EUROPACAT 2017
Abbreviated title	EUROPACAT 2017
Country/Territory	Italy
City	Florence
Period	27/08/17 → 31/08/17

Keywords

ALDCoE: Finnish Centre of Excellence in Atomic Layer Deposition
Ylivaara, O. M. E. (PI), Ahopelto, J. (Participant), Puurunen, R. L. (Participant) & Grigoras, K. (Participant)
1/01/12 → 31/12/17
Project: Academy of Finland project

@conference{53e75398818349ea9e5f8542f3b87f6b,

title = "Silicon-based lateral-gap test structures to mimic macro- and mesoporous catalyst supports",

keywords = "lateral-gap test structures, ALD, atomic layer deposition",

author = "Puurunen, {Riikka L.} and Oili Ylivaara and Kestutis Grigoras and Markku Ylilammi",

note = "Project 102086 ALDCoE; 13th European Congress on Catalysis, EUROPACAT 2017, EUROPACAT 2017 ; Conference date: 27-08-2017 Through 31-08-2017",

year = "2017",

language = "English",

}

TY - CONF

T1 - Silicon-based lateral-gap test structures to mimic macro- and mesoporous catalyst supports

AU - Puurunen, Riikka L.

AU - Ylivaara, Oili

AU - Grigoras, Kestutis

AU - Ylilammi, Markku

N1 - Project 102086 ALDCoE

PY - 2017

Y1 - 2017

KW - lateral-gap test structures

KW - ALD

KW - atomic layer deposition

M3 - Conference article

T2 - 13th European Congress on Catalysis, EUROPACAT 2017

Y2 - 27 August 2017 through 31 August 2017

ER -