Silicon-based lateral-gap test structures to mimic macro- and mesoporous catalyst supports

Riikka L. Puurunen, Oili Ylivaara, Kestutis Grigoras, Markku Ylilammi

    Research output: Contribution to conferenceConference articleScientificpeer-review

    Original languageEnglish
    Publication statusPublished - 2017
    Event13th European Congress on Catalysis, EUROPACAT 2017 - Florence, Italy
    Duration: 27 Aug 201731 Aug 2017

    Conference

    Conference13th European Congress on Catalysis, EUROPACAT 2017
    Abbreviated titleEUROPACAT 2017
    CountryItaly
    CityFlorence
    Period27/08/1731/08/17

    Keywords

    • lateral-gap test structures
    • ALD
    • atomic layer deposition

    Cite this