Silicon-based lateral-gap test structures to mimic macro- and mesoporous catalyst supports

Riikka L. Puurunen, Oili Ylivaara, Kestutis Grigoras, Markku Ylilammi

Research output: Contribution to conferenceConference articleScientificpeer-review

Original languageEnglish
Publication statusPublished - 2017
Event13th European Congress on Catalysis, EUROPACAT 2017 - Florence, Italy
Duration: 27 Aug 201731 Aug 2017

Conference

Conference13th European Congress on Catalysis, EUROPACAT 2017
Abbreviated titleEUROPACAT 2017
CountryItaly
CityFlorence
Period27/08/1731/08/17

Keywords

  • lateral-gap test structures
  • ALD
  • atomic layer deposition

Cite this

Puurunen, R. L., Ylivaara, O., Grigoras, K., & Ylilammi, M. (2017). Silicon-based lateral-gap test structures to mimic macro- and mesoporous catalyst supports. Paper presented at 13th European Congress on Catalysis, EUROPACAT 2017, Florence, Italy.
Puurunen, Riikka L. ; Ylivaara, Oili ; Grigoras, Kestutis ; Ylilammi, Markku. / Silicon-based lateral-gap test structures to mimic macro- and mesoporous catalyst supports. Paper presented at 13th European Congress on Catalysis, EUROPACAT 2017, Florence, Italy.
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title = "Silicon-based lateral-gap test structures to mimic macro- and mesoporous catalyst supports",
keywords = "lateral-gap test structures, ALD, atomic layer deposition",
author = "Puurunen, {Riikka L.} and Oili Ylivaara and Kestutis Grigoras and Markku Ylilammi",
note = "Project 102086 ALDCoE; 13th European Congress on Catalysis, EUROPACAT 2017, EUROPACAT 2017 ; Conference date: 27-08-2017 Through 31-08-2017",
year = "2017",
language = "English",

}

Puurunen, RL, Ylivaara, O, Grigoras, K & Ylilammi, M 2017, 'Silicon-based lateral-gap test structures to mimic macro- and mesoporous catalyst supports' Paper presented at 13th European Congress on Catalysis, EUROPACAT 2017, Florence, Italy, 27/08/17 - 31/08/17, .

Silicon-based lateral-gap test structures to mimic macro- and mesoporous catalyst supports. / Puurunen, Riikka L.; Ylivaara, Oili; Grigoras, Kestutis; Ylilammi, Markku.

2017. Paper presented at 13th European Congress on Catalysis, EUROPACAT 2017, Florence, Italy.

Research output: Contribution to conferenceConference articleScientificpeer-review

TY - CONF

T1 - Silicon-based lateral-gap test structures to mimic macro- and mesoporous catalyst supports

AU - Puurunen, Riikka L.

AU - Ylivaara, Oili

AU - Grigoras, Kestutis

AU - Ylilammi, Markku

N1 - Project 102086 ALDCoE

PY - 2017

Y1 - 2017

KW - lateral-gap test structures

KW - ALD

KW - atomic layer deposition

M3 - Conference article

ER -

Puurunen RL, Ylivaara O, Grigoras K, Ylilammi M. Silicon-based lateral-gap test structures to mimic macro- and mesoporous catalyst supports. 2017. Paper presented at 13th European Congress on Catalysis, EUROPACAT 2017, Florence, Italy.