Silicon-based lateral-gap test structures to mimic macro- and mesoporous catalyst supports

Riikka L. Puurunen
, Oili Ylivaara
, Kestutis Grigoras
, Markku Ylilammi

Aalto University

Research output: Contribution to conference › Conference article › Scientific › peer-review

1 results

Filter

Finished

ALDCoE: Finnish Centre of Excellence in Atomic Layer Deposition
Ylivaara, O. M. E. (PI), Ahopelto, J. (Participant), Puurunen, R. L. (Participant) & Grigoras, K. (Participant)
1/01/12 → 31/12/17
Project: Research Council of Finland