Silicon-based lateral high-aspect-ratio (LHAR) test structures for ALD growth conformality and uniformity evaluation

G. Feng, Sanna Arpiainen, S. Gorelick, Riikka Puurunen

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Original languageEnglish
Title of host publicationBALD2014 Abstract book
Publication statusPublished - 2014
Event12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014 - Helsinki, Finland
Duration: 12 May 201413 May 2014
Conference number: 12
http://www.aldcoe.fi/bald2014/program.pdf (Program)
http://www.aldcoe.fi/bald2014/posters.pdf (Posters)

Conference

Conference12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014
Abbreviated titleBaltic ALD 2014
CountryFinland
CityHelsinki
Period12/05/1413/05/14
OtherAbstracts reviewed and published.
Internet address

Cite this

@inbook{d24ccffa19ab4ea1886a778592e0a50a,
title = "Silicon-based lateral high-aspect-ratio (LHAR) test structures for ALD growth conformality and uniformity evaluation",
author = "G. Feng and Sanna Arpiainen and S. Gorelick and Riikka Puurunen",
note = "Project code: 73742",
year = "2014",
language = "English",
booktitle = "BALD2014 Abstract book",

}

Feng, G, Arpiainen, S, Gorelick, S & Puurunen, R 2014, Silicon-based lateral high-aspect-ratio (LHAR) test structures for ALD growth conformality and uniformity evaluation. in BALD2014 Abstract book. 12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014, Helsinki, Finland, 12/05/14.

Silicon-based lateral high-aspect-ratio (LHAR) test structures for ALD growth conformality and uniformity evaluation. / Feng, G.; Arpiainen, Sanna; Gorelick, S.; Puurunen, Riikka.

BALD2014 Abstract book. 2014.

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

TY - CHAP

T1 - Silicon-based lateral high-aspect-ratio (LHAR) test structures for ALD growth conformality and uniformity evaluation

AU - Feng, G.

AU - Arpiainen, Sanna

AU - Gorelick, S.

AU - Puurunen, Riikka

N1 - Project code: 73742

PY - 2014

Y1 - 2014

M3 - Conference abstract in proceedings

BT - BALD2014 Abstract book

ER -