Silicon-based lateral high-aspect-ratio (LHAR) test structures for ALD growth conformality and uniformity evaluation

G. Feng, Sanna Arpiainen, S. Gorelick, Riikka Puurunen

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publicationBALD2014 Abstract book
    Publication statusPublished - 2014
    Event12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014 - Helsinki, Finland
    Duration: 12 May 201413 May 2014
    Conference number: 12
    http://www.aldcoe.fi/bald2014/program.pdf (Program)
    http://www.aldcoe.fi/bald2014/posters.pdf (Posters)

    Conference

    Conference12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014
    Abbreviated titleBaltic ALD 2014
    CountryFinland
    CityHelsinki
    Period12/05/1413/05/14
    OtherAbstracts reviewed and published.
    Internet address

    Cite this

    @inbook{d24ccffa19ab4ea1886a778592e0a50a,
    title = "Silicon-based lateral high-aspect-ratio (LHAR) test structures for ALD growth conformality and uniformity evaluation",
    author = "G. Feng and Sanna Arpiainen and S. Gorelick and Riikka Puurunen",
    note = "Project code: 73742",
    year = "2014",
    language = "English",
    booktitle = "BALD2014 Abstract book",

    }

    Feng, G, Arpiainen, S, Gorelick, S & Puurunen, R 2014, Silicon-based lateral high-aspect-ratio (LHAR) test structures for ALD growth conformality and uniformity evaluation. in BALD2014 Abstract book. 12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014, Helsinki, Finland, 12/05/14.

    Silicon-based lateral high-aspect-ratio (LHAR) test structures for ALD growth conformality and uniformity evaluation. / Feng, G.; Arpiainen, Sanna; Gorelick, S.; Puurunen, Riikka.

    BALD2014 Abstract book. 2014.

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    TY - CHAP

    T1 - Silicon-based lateral high-aspect-ratio (LHAR) test structures for ALD growth conformality and uniformity evaluation

    AU - Feng, G.

    AU - Arpiainen, Sanna

    AU - Gorelick, S.

    AU - Puurunen, Riikka

    N1 - Project code: 73742

    PY - 2014

    Y1 - 2014

    M3 - Conference abstract in proceedings

    BT - BALD2014 Abstract book

    ER -