Silicon-based lateral high-aspect-ratio (LHAR) test structures for ALD growth conformality and uniformity evaluation

G. Feng; Sanna Arpiainen; S. Gorelick; Riikka Puurunen

Silicon-based lateral high-aspect-ratio (LHAR) test structures for ALD growth conformality and uniformity evaluation

G. Feng
, Sanna Arpiainen
, S. Gorelick
, Riikka Puurunen

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Original language	English
Title of host publication	BALD2014 Abstract book
Publication status	Published - 2014
Event	12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014 - Helsinki, Finland Duration: 12 May 2014 → 13 May 2014 Conference number: 12 http://www.aldcoe.fi/bald2014/program.pdf (Program) http://www.aldcoe.fi/bald2014/posters.pdf (Posters)

Conference

Conference	12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014
Abbreviated title	Baltic ALD 2014
Country/Territory	Finland
City	Helsinki
Period	12/05/14 → 13/05/14
Other	Abstracts reviewed and published.
Internet address	http://www.aldcoe.fi/bald2014/program.pdf (Program) http://www.aldcoe.fi/bald2014/posters.pdf (Posters)

Cite this

@inbook{d24ccffa19ab4ea1886a778592e0a50a,

title = "Silicon-based lateral high-aspect-ratio (LHAR) test structures for ALD growth conformality and uniformity evaluation",

author = "G. Feng and Sanna Arpiainen and S. Gorelick and Riikka Puurunen",

note = "Project code: 73742; 12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014, Baltic ALD 2014 ; Conference date: 12-05-2014 Through 13-05-2014",

year = "2014",

language = "English",

booktitle = "BALD2014 Abstract book",

url = "http://www.aldcoe.fi/bald2014/program.pdf, http://www.aldcoe.fi/bald2014/posters.pdf",

}

TY - CHAP

T1 - Silicon-based lateral high-aspect-ratio (LHAR) test structures for ALD growth conformality and uniformity evaluation

AU - Feng, G.

AU - Arpiainen, Sanna

AU - Gorelick, S.

AU - Puurunen, Riikka

N1 - Conference code: 12

PY - 2014

Y1 - 2014

M3 - Conference abstract in proceedings

BT - BALD2014 Abstract book

T2 - 12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014

Y2 - 12 May 2014 through 13 May 2014

ER -