Silicon Based Nano-Thermoelectric Bolometers for Infrared Detection

Aapo Varpula (Corresponding Author), Kestutis Grigoras, Kirsi Tappura, Andrey Timofeev, Andrey Shchepetov, Juha Hassel, Jouni Ahopelto, Mika Prunnila

Research output: Contribution to journalArticleScientificpeer-review

Abstract

The state-of-the-art infrared (IR) detection uses quantum photodetectors and bolometers. Quantum IR photodetectors are expensive and require cooling, and exotic and toxic materials. Whereas, bolometers are cost-efficient and uncooled, but they are much slower and less sensitive. Recently we have demonstrated that ultra-thin, highly-doped silicon membranes can be used to build fast and highly-sensitive thermoelectric bolometers. We present the fabrication of these devices, electro-thermal characterization results, and estimate the full potential of this technology.
Original languageEnglish
Number of pages5
JournalProceedings
Volume2
DOIs
Publication statusPublished - 6 Dec 2018
MoE publication typeNot Eligible
EventEurosensors 2018 Conference - Graz, Austria
Duration: 9 Sep 201812 Dec 2018
Conference number: 32
https://eurosensors2018.eu/

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bolometers
photometers
silicon
membranes
costs
cooling
fabrication
estimates

Keywords

  • thermoelectric bolometer
  • silicon membrane
  • infrared

Cite this

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title = "Silicon Based Nano-Thermoelectric Bolometers for Infrared Detection",
abstract = "The state-of-the-art infrared (IR) detection uses quantum photodetectors and bolometers. Quantum IR photodetectors are expensive and require cooling, and exotic and toxic materials. Whereas, bolometers are cost-efficient and uncooled, but they are much slower and less sensitive. Recently we have demonstrated that ultra-thin, highly-doped silicon membranes can be used to build fast and highly-sensitive thermoelectric bolometers. We present the fabrication of these devices, electro-thermal characterization results, and estimate the full potential of this technology.",
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Silicon Based Nano-Thermoelectric Bolometers for Infrared Detection. / Varpula, Aapo (Corresponding Author); Grigoras, Kestutis; Tappura, Kirsi; Timofeev, Andrey; Shchepetov, Andrey; Hassel, Juha; Ahopelto, Jouni; Prunnila, Mika.

In: Proceedings, Vol. 2, 06.12.2018.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Silicon Based Nano-Thermoelectric Bolometers for Infrared Detection

AU - Varpula, Aapo

AU - Grigoras, Kestutis

AU - Tappura, Kirsi

AU - Timofeev, Andrey

AU - Shchepetov, Andrey

AU - Hassel, Juha

AU - Ahopelto, Jouni

AU - Prunnila, Mika

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Y1 - 2018/12/6

N2 - The state-of-the-art infrared (IR) detection uses quantum photodetectors and bolometers. Quantum IR photodetectors are expensive and require cooling, and exotic and toxic materials. Whereas, bolometers are cost-efficient and uncooled, but they are much slower and less sensitive. Recently we have demonstrated that ultra-thin, highly-doped silicon membranes can be used to build fast and highly-sensitive thermoelectric bolometers. We present the fabrication of these devices, electro-thermal characterization results, and estimate the full potential of this technology.

AB - The state-of-the-art infrared (IR) detection uses quantum photodetectors and bolometers. Quantum IR photodetectors are expensive and require cooling, and exotic and toxic materials. Whereas, bolometers are cost-efficient and uncooled, but they are much slower and less sensitive. Recently we have demonstrated that ultra-thin, highly-doped silicon membranes can be used to build fast and highly-sensitive thermoelectric bolometers. We present the fabrication of these devices, electro-thermal characterization results, and estimate the full potential of this technology.

KW - thermoelectric bolometer

KW - silicon membrane

KW - infrared

UR - https://www.mdpi.com/2504-3900/2/13/894

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