Silicon Based Nano-Thermoelectric Bolometers for Infrared Detection

Aapo Varpula (Corresponding Author), Kestutis Grigoras, Kirsi Tappura, Andrey Timofeev, Andrey Shchepetov, Juha Hassel, Jouni Ahopelto, Mika Prunnila

    Research output: Contribution to journalArticleScientificpeer-review

    Abstract

    The state-of-the-art infrared (IR) detection uses quantum photodetectors and bolometers. Quantum IR photodetectors are expensive and require cooling, and exotic and toxic materials. Whereas, bolometers are cost-efficient and uncooled, but they are much slower and less sensitive. Recently we have demonstrated that ultra-thin, highly-doped silicon membranes can be used to build fast and highly-sensitive thermoelectric bolometers. We present the fabrication of these devices, electro-thermal characterization results, and estimate the full potential of this technology.
    Original languageEnglish
    Number of pages5
    JournalProceedings
    Volume2
    DOIs
    Publication statusPublished - 6 Dec 2018
    MoE publication typeNot Eligible
    EventEurosensors 2018 Conference - Graz, Austria
    Duration: 9 Sep 201812 Dec 2018
    Conference number: 32
    https://eurosensors2018.eu/

    Fingerprint

    bolometers
    photometers
    silicon
    membranes
    costs
    cooling
    fabrication
    estimates

    Keywords

    • thermoelectric bolometer
    • silicon membrane
    • infrared

    Cite this

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    title = "Silicon Based Nano-Thermoelectric Bolometers for Infrared Detection",
    abstract = "The state-of-the-art infrared (IR) detection uses quantum photodetectors and bolometers. Quantum IR photodetectors are expensive and require cooling, and exotic and toxic materials. Whereas, bolometers are cost-efficient and uncooled, but they are much slower and less sensitive. Recently we have demonstrated that ultra-thin, highly-doped silicon membranes can be used to build fast and highly-sensitive thermoelectric bolometers. We present the fabrication of these devices, electro-thermal characterization results, and estimate the full potential of this technology.",
    keywords = "thermoelectric bolometer, silicon membrane, infrared",
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    Silicon Based Nano-Thermoelectric Bolometers for Infrared Detection. / Varpula, Aapo (Corresponding Author); Grigoras, Kestutis; Tappura, Kirsi; Timofeev, Andrey; Shchepetov, Andrey; Hassel, Juha; Ahopelto, Jouni; Prunnila, Mika.

    In: Proceedings, Vol. 2, 06.12.2018.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - Silicon Based Nano-Thermoelectric Bolometers for Infrared Detection

    AU - Varpula, Aapo

    AU - Grigoras, Kestutis

    AU - Tappura, Kirsi

    AU - Timofeev, Andrey

    AU - Shchepetov, Andrey

    AU - Hassel, Juha

    AU - Ahopelto, Jouni

    AU - Prunnila, Mika

    N1 - 4-page extended abstracts

    PY - 2018/12/6

    Y1 - 2018/12/6

    N2 - The state-of-the-art infrared (IR) detection uses quantum photodetectors and bolometers. Quantum IR photodetectors are expensive and require cooling, and exotic and toxic materials. Whereas, bolometers are cost-efficient and uncooled, but they are much slower and less sensitive. Recently we have demonstrated that ultra-thin, highly-doped silicon membranes can be used to build fast and highly-sensitive thermoelectric bolometers. We present the fabrication of these devices, electro-thermal characterization results, and estimate the full potential of this technology.

    AB - The state-of-the-art infrared (IR) detection uses quantum photodetectors and bolometers. Quantum IR photodetectors are expensive and require cooling, and exotic and toxic materials. Whereas, bolometers are cost-efficient and uncooled, but they are much slower and less sensitive. Recently we have demonstrated that ultra-thin, highly-doped silicon membranes can be used to build fast and highly-sensitive thermoelectric bolometers. We present the fabrication of these devices, electro-thermal characterization results, and estimate the full potential of this technology.

    KW - thermoelectric bolometer

    KW - silicon membrane

    KW - infrared

    UR - https://www.mdpi.com/2504-3900/2/13/894

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