Silicon Based Nano-Thermoelectric Bolometers for Infrared Detection

Aapo Varpula (Corresponding Author), Kestutis Grigoras, Kirsi Tappura, Andrey Timofeev, Andrey Shchepetov, Juha Hassel, Jouni Ahopelto, Mika Prunnila

    Research output: Contribution to journalArticle in a proceedings journalScientificpeer-review


    The state-of-the-art infrared (IR) detection uses quantum photodetectors and bolometers. Quantum IR photodetectors are expensive and require cooling, and exotic and toxic materials. Whereas, bolometers are cost-efficient and uncooled, but they are much slower and less sensitive. Recently we have demonstrated that ultra-thin, highly-doped silicon membranes can be used to build fast and highly-sensitive thermoelectric bolometers. We present the fabrication of these devices, electro-thermal characterization results, and estimate the full potential of this technology.
    Original languageEnglish
    Number of pages5
    Publication statusPublished - 6 Dec 2018
    MoE publication typeNot Eligible
    EventEurosensors 2018 Conference - Graz, Austria
    Duration: 9 Sept 201812 Dec 2018
    Conference number: 32


    • thermoelectric bolometer
    • silicon membrane
    • infrared
    • OtaNano


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