Silicon Based Nano-Thermoelectric Bolometers for Infrared Detection

Aapo Varpula; Kestutis Grigoras; Kirsi Tappura; Andrey Timofeev; Andrey Shchepetov; Juha Hassel; Jouni Ahopelto; Mika Prunnila

doi:10.3390/proceedings2130894

Silicon Based Nano-Thermoelectric Bolometers for Infrared Detection

Aapo Varpula^*
, Kestutis Grigoras
, Kirsi Tappura
, Andrey Timofeev
, Andrey Shchepetov
, Juha Hassel
, Jouni Ahopelto
, Mika Prunnila

^*Corresponding author for this work

Research output: Contribution to journal › Article in a proceedings journal › Scientific › peer-review

Abstract

The state-of-the-art infrared (IR) detection uses quantum photodetectors and bolometers. Quantum IR photodetectors are expensive and require cooling, and exotic and toxic materials. Whereas, bolometers are cost-efficient and uncooled, but they are much slower and less sensitive. Recently we have demonstrated that ultra-thin, highly-doped silicon membranes can be used to build fast and highly-sensitive thermoelectric bolometers. We present the fabrication of these devices, electro-thermal characterization results, and estimate the full potential of this technology.

Original language	English
Number of pages	5
Journal	Proceedings
Volume	2
DOIs	https://doi.org/10.3390/proceedings2130894
Publication status	Published - 6 Dec 2018
MoE publication type	A4 Article in a conference publication
Event	Eurosensors 2018 Conference - Graz, Austria Duration: 9 Sept 2018 → 12 Dec 2018 Conference number: 32 https://eurosensors2018.eu/

Keywords

thermoelectric bolometer
silicon membrane
infrared
OtaNano

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10.3390/proceedings2130894Licence: CC BY

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title = "Silicon Based Nano-Thermoelectric Bolometers for Infrared Detection",

abstract = "The state-of-the-art infrared (IR) detection uses quantum photodetectors and bolometers. Quantum IR photodetectors are expensive and require cooling, and exotic and toxic materials. Whereas, bolometers are cost-efficient and uncooled, but they are much slower and less sensitive. Recently we have demonstrated that ultra-thin, highly-doped silicon membranes can be used to build fast and highly-sensitive thermoelectric bolometers. We present the fabrication of these devices, electro-thermal characterization results, and estimate the full potential of this technology. ",

keywords = "thermoelectric bolometer, silicon membrane, infrared, OtaNano",

author = "Aapo Varpula and Kestutis Grigoras and Kirsi Tappura and Andrey Timofeev and Andrey Shchepetov and Juha Hassel and Jouni Ahopelto and Mika Prunnila",

note = "4-page extended abstracts; Eurosensors 2018 Conference, EUROSENSORS 2018 ; Conference date: 09-09-2018 Through 12-12-2018",

year = "2018",

month = dec,

day = "6",

doi = "10.3390/proceedings2130894",

language = "English",

volume = "2",

journal = "Proceedings",

issn = "2504-3900",

publisher = "MDPI",

url = "https://eurosensors2018.eu/",

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TY - JOUR

T1 - Silicon Based Nano-Thermoelectric Bolometers for Infrared Detection

AU - Varpula, Aapo

AU - Grigoras, Kestutis

AU - Tappura, Kirsi

AU - Timofeev, Andrey

AU - Shchepetov, Andrey

AU - Hassel, Juha

AU - Ahopelto, Jouni

AU - Prunnila, Mika

N1 - Conference code: 32

PY - 2018/12/6

Y1 - 2018/12/6

N2 - The state-of-the-art infrared (IR) detection uses quantum photodetectors and bolometers. Quantum IR photodetectors are expensive and require cooling, and exotic and toxic materials. Whereas, bolometers are cost-efficient and uncooled, but they are much slower and less sensitive. Recently we have demonstrated that ultra-thin, highly-doped silicon membranes can be used to build fast and highly-sensitive thermoelectric bolometers. We present the fabrication of these devices, electro-thermal characterization results, and estimate the full potential of this technology.

AB - The state-of-the-art infrared (IR) detection uses quantum photodetectors and bolometers. Quantum IR photodetectors are expensive and require cooling, and exotic and toxic materials. Whereas, bolometers are cost-efficient and uncooled, but they are much slower and less sensitive. Recently we have demonstrated that ultra-thin, highly-doped silicon membranes can be used to build fast and highly-sensitive thermoelectric bolometers. We present the fabrication of these devices, electro-thermal characterization results, and estimate the full potential of this technology.

KW - thermoelectric bolometer

KW - silicon membrane

KW - infrared

KW - OtaNano

UR - https://www.mdpi.com/2504-3900/2/13/894

U2 - 10.3390/proceedings2130894

DO - 10.3390/proceedings2130894

M3 - Article in a proceedings journal

SN - 2504-3900

VL - 2

JO - Proceedings

JF - Proceedings

T2 - Eurosensors 2018 Conference

Y2 - 9 September 2018 through 12 December 2018

ER -

Silicon Based Nano-Thermoelectric Bolometers for Infrared Detection

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Silicon Based Nano-Thermoelectric Bolometers for Infrared Detection

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