Silicon gradient refractive index lens for millimeter wave radiometers

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

We propose a radiometer receiver array based on a silicon microlens array and MMIC detectors at 200 - 250 GHz. The paper describes the array concept and details microlens development. Planar Gradient Refractive Index (GRIN) lenses have been chosen for the array. Fabrication process based on DRIE etching of silicon has been developed, and lenses designed. The first measurement results of the lens are presented.

Original languageEnglish
Title of host publicationIRMMW-THz 2019
Subtitle of host publication44th International Conference on Infrared, Millimeter, and Terahertz Waves
PublisherIEEE Institute of Electrical and Electronic Engineers
ISBN (Electronic)978-1-5386-8285-2
ISBN (Print)978-1-5386-8286-9
DOIs
Publication statusPublished - Sep 2019
MoE publication typeA4 Article in a conference publication
Event44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019 - Paris, France
Duration: 1 Sep 20196 Sep 2019

Publication series

SeriesInternational Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz
Volume2019-September
ISSN2162-2027

Conference

Conference44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019
CountryFrance
CityParis
Period1/09/196/09/19

Fingerprint

Radiometers
Millimeter waves
Lenses
Refractive index
Silicon
Monolithic microwave integrated circuits
Etching
Detectors
Fabrication

Cite this

Pursula, P., Lamminen, A., Mannila, R., Tappura, K., & Saarilahti, J. (2019). Silicon gradient refractive index lens for millimeter wave radiometers. In IRMMW-THz 2019: 44th International Conference on Infrared, Millimeter, and Terahertz Waves [8874541] IEEE Institute of Electrical and Electronic Engineers . International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz, Vol.. 2019-September https://doi.org/10.1109/IRMMW-THz.2019.8874541
Pursula, Pekka ; Lamminen, Antti ; Mannila, Rami ; Tappura, Kirsi ; Saarilahti, Jaakko. / Silicon gradient refractive index lens for millimeter wave radiometers. IRMMW-THz 2019: 44th International Conference on Infrared, Millimeter, and Terahertz Waves. IEEE Institute of Electrical and Electronic Engineers , 2019. (International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz, Vol. 2019-September).
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title = "Silicon gradient refractive index lens for millimeter wave radiometers",
abstract = "We propose a radiometer receiver array based on a silicon microlens array and MMIC detectors at 200 - 250 GHz. The paper describes the array concept and details microlens development. Planar Gradient Refractive Index (GRIN) lenses have been chosen for the array. Fabrication process based on DRIE etching of silicon has been developed, and lenses designed. The first measurement results of the lens are presented.",
author = "Pekka Pursula and Antti Lamminen and Rami Mannila and Kirsi Tappura and Jaakko Saarilahti",
year = "2019",
month = "9",
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isbn = "978-1-5386-8286-9",
series = "International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz",
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Pursula, P, Lamminen, A, Mannila, R, Tappura, K & Saarilahti, J 2019, Silicon gradient refractive index lens for millimeter wave radiometers. in IRMMW-THz 2019: 44th International Conference on Infrared, Millimeter, and Terahertz Waves., 8874541, IEEE Institute of Electrical and Electronic Engineers , International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz, vol. 2019-September, 44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019, Paris, France, 1/09/19. https://doi.org/10.1109/IRMMW-THz.2019.8874541

Silicon gradient refractive index lens for millimeter wave radiometers. / Pursula, Pekka; Lamminen, Antti; Mannila, Rami; Tappura, Kirsi; Saarilahti, Jaakko.

IRMMW-THz 2019: 44th International Conference on Infrared, Millimeter, and Terahertz Waves. IEEE Institute of Electrical and Electronic Engineers , 2019. 8874541 (International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz, Vol. 2019-September).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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Pursula P, Lamminen A, Mannila R, Tappura K, Saarilahti J. Silicon gradient refractive index lens for millimeter wave radiometers. In IRMMW-THz 2019: 44th International Conference on Infrared, Millimeter, and Terahertz Waves. IEEE Institute of Electrical and Electronic Engineers . 2019. 8874541. (International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz, Vol. 2019-September). https://doi.org/10.1109/IRMMW-THz.2019.8874541