Silicon gradient refractive index lens for millimeter wave radiometers

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    We propose a radiometer receiver array based on a silicon microlens array and MMIC detectors at 200 - 250 GHz. The paper describes the array concept and details microlens development. Planar Gradient Refractive Index (GRIN) lenses have been chosen for the array. Fabrication process based on DRIE etching of silicon has been developed, and lenses designed. The first measurement results of the lens are presented.

    Original languageEnglish
    Title of host publicationIRMMW-THz 2019
    Subtitle of host publication44th International Conference on Infrared, Millimeter, and Terahertz Waves
    PublisherIEEE Institute of Electrical and Electronic Engineers
    ISBN (Electronic)978-1-5386-8285-2
    ISBN (Print)978-1-5386-8286-9
    DOIs
    Publication statusPublished - Sep 2019
    MoE publication typeA4 Article in a conference publication
    Event44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019 - Paris, France
    Duration: 1 Sep 20196 Sep 2019

    Publication series

    SeriesInternational Conference on Infrared, Millimeter, and Terahertz Waves
    Volume2019-September
    ISSN2162-2027

    Conference

    Conference44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019
    CountryFrance
    CityParis
    Period1/09/196/09/19

    Keywords

    • OtaNano

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