Silicon gradient refractive index lens for millimeter wave radiometers

Pekka Pursula; Antti Lamminen; Rami Mannila; Kirsi Tappura; Jaakko Saarilahti

doi:10.1109/IRMMW-THz.2019.8874541

Silicon gradient refractive index lens for millimeter wave radiometers

Pekka Pursula^*, Antti Lamminen, Rami Mannila, Kirsi Tappura, Jaakko Saarilahti

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

5 Citations (Scopus)

Abstract

We propose a radiometer receiver array based on a silicon microlens array and MMIC detectors at 200 - 250 GHz. The paper describes the array concept and details microlens development. Planar Gradient Refractive Index (GRIN) lenses have been chosen for the array. Fabrication process based on DRIE etching of silicon has been developed, and lenses designed. The first measurement results of the lens are presented.

Original language	English
Title of host publication	IRMMW-THz 2019
Subtitle of host publication	44th International Conference on Infrared, Millimeter, and Terahertz Waves
Publisher	IEEE Institute of Electrical and Electronic Engineers
ISBN (Electronic)	978-1-5386-8285-2
ISBN (Print)	978-1-5386-8286-9
DOIs	https://doi.org/10.1109/IRMMW-THz.2019.8874541
Publication status	Published - Sept 2019
MoE publication type	A4 Article in a conference publication
Event	44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019 - Paris, France Duration: 1 Sept 2019 → 6 Sept 2019

Publication series

Series	International Conference on Infrared, Millimeter, and Terahertz Waves
Volume	2019-September
ISSN	2162-2027

Conference

Conference	44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019
Country/Territory	France
City	Paris
Period	1/09/19 → 6/09/19

Funding

ACKNOWLEDGMENTS The authors wish to thank Ismo Huhtinen for carrying out the transmission measurement for the lens samples. This work has been financially supported by the Academy of Finland under grant MilliRAD, number 314541.

Keywords

OtaNano

Access to Document

10.1109/IRMMW-THz.2019.8874541

Cite this

Pursula, Pekka ; Lamminen, Antti ; Mannila, Rami et al. / Silicon gradient refractive index lens for millimeter wave radiometers. IRMMW-THz 2019: 44th International Conference on Infrared, Millimeter, and Terahertz Waves. IEEE Institute of Electrical and Electronic Engineers, 2019. (International Conference on Infrared, Millimeter, and Terahertz Waves, Vol. 2019-September).

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title = "Silicon gradient refractive index lens for millimeter wave radiometers",

abstract = "We propose a radiometer receiver array based on a silicon microlens array and MMIC detectors at 200 - 250 GHz. The paper describes the array concept and details microlens development. Planar Gradient Refractive Index (GRIN) lenses have been chosen for the array. Fabrication process based on DRIE etching of silicon has been developed, and lenses designed. The first measurement results of the lens are presented.",

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author = "Pekka Pursula and Antti Lamminen and Rami Mannila and Kirsi Tappura and Jaakko Saarilahti",

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note = "44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019 ; Conference date: 01-09-2019 Through 06-09-2019",

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Pursula, P , Lamminen, A , Mannila, R , Tappura, K & Saarilahti, J 2019, Silicon gradient refractive index lens for millimeter wave radiometers. in IRMMW-THz 2019: 44th International Conference on Infrared, Millimeter, and Terahertz Waves., 8874541, IEEE Institute of Electrical and Electronic Engineers, International Conference on Infrared, Millimeter, and Terahertz Waves, vol. 2019-September, 44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019, Paris, France, 1/09/19. https://doi.org/10.1109/IRMMW-THz.2019.8874541

Silicon gradient refractive index lens for millimeter wave radiometers. / Pursula, Pekka ; Lamminen, Antti ; Mannila, Rami et al.
IRMMW-THz 2019: 44th International Conference on Infrared, Millimeter, and Terahertz Waves. IEEE Institute of Electrical and Electronic Engineers, 2019. 8874541 (International Conference on Infrared, Millimeter, and Terahertz Waves, Vol. 2019-September).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

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T1 - Silicon gradient refractive index lens for millimeter wave radiometers

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AU - Lamminen, Antti

AU - Mannila, Rami

AU - Tappura, Kirsi

AU - Saarilahti, Jaakko

PY - 2019/9

Y1 - 2019/9

N2 - We propose a radiometer receiver array based on a silicon microlens array and MMIC detectors at 200 - 250 GHz. The paper describes the array concept and details microlens development. Planar Gradient Refractive Index (GRIN) lenses have been chosen for the array. Fabrication process based on DRIE etching of silicon has been developed, and lenses designed. The first measurement results of the lens are presented.

AB - We propose a radiometer receiver array based on a silicon microlens array and MMIC detectors at 200 - 250 GHz. The paper describes the array concept and details microlens development. Planar Gradient Refractive Index (GRIN) lenses have been chosen for the array. Fabrication process based on DRIE etching of silicon has been developed, and lenses designed. The first measurement results of the lens are presented.

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SN - 978-1-5386-8286-9

T3 - International Conference on Infrared, Millimeter, and Terahertz Waves

BT - IRMMW-THz 2019

PB - IEEE Institute of Electrical and Electronic Engineers

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Pursula P , Lamminen A , Mannila R , Tappura K, Saarilahti J. Silicon gradient refractive index lens for millimeter wave radiometers. In IRMMW-THz 2019: 44th International Conference on Infrared, Millimeter, and Terahertz Waves. IEEE Institute of Electrical and Electronic Engineers. 2019. 8874541. (International Conference on Infrared, Millimeter, and Terahertz Waves, Vol. 2019-September). doi: 10.1109/IRMMW-THz.2019.8874541

Silicon gradient refractive index lens for millimeter wave radiometers

Abstract

Publication series

Conference

Funding

Keywords

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Fingerprint

OtaNano

Cite this

Silicon gradient refractive index lens for millimeter wave radiometers

Abstract

Publication series

Conference

Funding

Keywords

Access to Document

Other files and links

Fingerprint

Equipment

OtaNano

Cite this