Abstract
We propose a radiometer receiver array based on a silicon microlens array and MMIC detectors at 200 - 250 GHz. The paper describes the array concept and details microlens development. Planar Gradient Refractive Index (GRIN) lenses have been chosen for the array. Fabrication process based on DRIE etching of silicon has been developed, and lenses designed. The first measurement results of the lens are presented.
| Original language | English |
|---|---|
| Title of host publication | IRMMW-THz 2019 |
| Subtitle of host publication | 44th International Conference on Infrared, Millimeter, and Terahertz Waves |
| Publisher | IEEE Institute of Electrical and Electronic Engineers |
| ISBN (Electronic) | 978-1-5386-8285-2 |
| ISBN (Print) | 978-1-5386-8286-9 |
| DOIs | |
| Publication status | Published - Sep 2019 |
| MoE publication type | A4 Article in a conference publication |
| Event | 44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019 - Paris, France Duration: 1 Sep 2019 → 6 Sep 2019 |
Publication series
| Series | International Conference on Infrared, Millimeter, and Terahertz Waves |
|---|---|
| Volume | 2019-September |
| ISSN | 2162-2027 |
Conference
| Conference | 44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019 |
|---|---|
| Country | France |
| City | Paris |
| Period | 1/09/19 → 6/09/19 |
Fingerprint
Cite this
}
Silicon gradient refractive index lens for millimeter wave radiometers. / Pursula, Pekka; Lamminen, Antti; Mannila, Rami; Tappura, Kirsi; Saarilahti, Jaakko.
IRMMW-THz 2019: 44th International Conference on Infrared, Millimeter, and Terahertz Waves. IEEE Institute of Electrical and Electronic Engineers , 2019. 8874541 (International Conference on Infrared, Millimeter, and Terahertz Waves, Vol. 2019-September).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
TY - GEN
T1 - Silicon gradient refractive index lens for millimeter wave radiometers
AU - Pursula, Pekka
AU - Lamminen, Antti
AU - Mannila, Rami
AU - Tappura, Kirsi
AU - Saarilahti, Jaakko
PY - 2019/9
Y1 - 2019/9
N2 - We propose a radiometer receiver array based on a silicon microlens array and MMIC detectors at 200 - 250 GHz. The paper describes the array concept and details microlens development. Planar Gradient Refractive Index (GRIN) lenses have been chosen for the array. Fabrication process based on DRIE etching of silicon has been developed, and lenses designed. The first measurement results of the lens are presented.
AB - We propose a radiometer receiver array based on a silicon microlens array and MMIC detectors at 200 - 250 GHz. The paper describes the array concept and details microlens development. Planar Gradient Refractive Index (GRIN) lenses have been chosen for the array. Fabrication process based on DRIE etching of silicon has been developed, and lenses designed. The first measurement results of the lens are presented.
UR - http://www.scopus.com/inward/record.url?scp=85074732050&partnerID=8YFLogxK
U2 - 10.1109/IRMMW-THz.2019.8874541
DO - 10.1109/IRMMW-THz.2019.8874541
M3 - Conference article in proceedings
AN - SCOPUS:85074732050
SN - 978-1-5386-8286-9
T3 - International Conference on Infrared, Millimeter, and Terahertz Waves
BT - IRMMW-THz 2019
PB - IEEE Institute of Electrical and Electronic Engineers
ER -