Silicon gradient refractive index lens for millimeter wave radiometers

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    We propose a radiometer receiver array based on a silicon microlens array and MMIC detectors at 200 - 250 GHz. The paper describes the array concept and details microlens development. Planar Gradient Refractive Index (GRIN) lenses have been chosen for the array. Fabrication process based on DRIE etching of silicon has been developed, and lenses designed. The first measurement results of the lens are presented.

    Original languageEnglish
    Title of host publicationIRMMW-THz 2019
    Subtitle of host publication44th International Conference on Infrared, Millimeter, and Terahertz Waves
    PublisherIEEE Institute of Electrical and Electronic Engineers
    ISBN (Electronic)978-1-5386-8285-2
    ISBN (Print)978-1-5386-8286-9
    DOIs
    Publication statusPublished - Sep 2019
    MoE publication typeA4 Article in a conference publication
    Event44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019 - Paris, France
    Duration: 1 Sep 20196 Sep 2019

    Publication series

    SeriesInternational Conference on Infrared, Millimeter, and Terahertz Waves
    Volume2019-September
    ISSN2162-2027

    Conference

    Conference44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019
    CountryFrance
    CityParis
    Period1/09/196/09/19

    Fingerprint

    Radiometers
    Millimeter waves
    Lenses
    Refractive index
    Silicon
    Monolithic microwave integrated circuits
    Etching
    Detectors
    Fabrication

    Cite this

    Pursula, P., Lamminen, A., Mannila, R., Tappura, K., & Saarilahti, J. (2019). Silicon gradient refractive index lens for millimeter wave radiometers. In IRMMW-THz 2019: 44th International Conference on Infrared, Millimeter, and Terahertz Waves [8874541] IEEE Institute of Electrical and Electronic Engineers . International Conference on Infrared, Millimeter, and Terahertz Waves, Vol.. 2019-September https://doi.org/10.1109/IRMMW-THz.2019.8874541
    Pursula, Pekka ; Lamminen, Antti ; Mannila, Rami ; Tappura, Kirsi ; Saarilahti, Jaakko. / Silicon gradient refractive index lens for millimeter wave radiometers. IRMMW-THz 2019: 44th International Conference on Infrared, Millimeter, and Terahertz Waves. IEEE Institute of Electrical and Electronic Engineers , 2019. (International Conference on Infrared, Millimeter, and Terahertz Waves, Vol. 2019-September).
    @inproceedings{61b70f2326284113a01196d92031363b,
    title = "Silicon gradient refractive index lens for millimeter wave radiometers",
    abstract = "We propose a radiometer receiver array based on a silicon microlens array and MMIC detectors at 200 - 250 GHz. The paper describes the array concept and details microlens development. Planar Gradient Refractive Index (GRIN) lenses have been chosen for the array. Fabrication process based on DRIE etching of silicon has been developed, and lenses designed. The first measurement results of the lens are presented.",
    author = "Pekka Pursula and Antti Lamminen and Rami Mannila and Kirsi Tappura and Jaakko Saarilahti",
    year = "2019",
    month = "9",
    doi = "10.1109/IRMMW-THz.2019.8874541",
    language = "English",
    isbn = "978-1-5386-8286-9",
    series = "International Conference on Infrared, Millimeter, and Terahertz Waves",
    publisher = "IEEE Institute of Electrical and Electronic Engineers",
    booktitle = "IRMMW-THz 2019",
    address = "United States",

    }

    Pursula, P, Lamminen, A, Mannila, R, Tappura, K & Saarilahti, J 2019, Silicon gradient refractive index lens for millimeter wave radiometers. in IRMMW-THz 2019: 44th International Conference on Infrared, Millimeter, and Terahertz Waves., 8874541, IEEE Institute of Electrical and Electronic Engineers , International Conference on Infrared, Millimeter, and Terahertz Waves, vol. 2019-September, 44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019, Paris, France, 1/09/19. https://doi.org/10.1109/IRMMW-THz.2019.8874541

    Silicon gradient refractive index lens for millimeter wave radiometers. / Pursula, Pekka; Lamminen, Antti; Mannila, Rami; Tappura, Kirsi; Saarilahti, Jaakko.

    IRMMW-THz 2019: 44th International Conference on Infrared, Millimeter, and Terahertz Waves. IEEE Institute of Electrical and Electronic Engineers , 2019. 8874541 (International Conference on Infrared, Millimeter, and Terahertz Waves, Vol. 2019-September).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    TY - GEN

    T1 - Silicon gradient refractive index lens for millimeter wave radiometers

    AU - Pursula, Pekka

    AU - Lamminen, Antti

    AU - Mannila, Rami

    AU - Tappura, Kirsi

    AU - Saarilahti, Jaakko

    PY - 2019/9

    Y1 - 2019/9

    N2 - We propose a radiometer receiver array based on a silicon microlens array and MMIC detectors at 200 - 250 GHz. The paper describes the array concept and details microlens development. Planar Gradient Refractive Index (GRIN) lenses have been chosen for the array. Fabrication process based on DRIE etching of silicon has been developed, and lenses designed. The first measurement results of the lens are presented.

    AB - We propose a radiometer receiver array based on a silicon microlens array and MMIC detectors at 200 - 250 GHz. The paper describes the array concept and details microlens development. Planar Gradient Refractive Index (GRIN) lenses have been chosen for the array. Fabrication process based on DRIE etching of silicon has been developed, and lenses designed. The first measurement results of the lens are presented.

    UR - http://www.scopus.com/inward/record.url?scp=85074732050&partnerID=8YFLogxK

    U2 - 10.1109/IRMMW-THz.2019.8874541

    DO - 10.1109/IRMMW-THz.2019.8874541

    M3 - Conference article in proceedings

    AN - SCOPUS:85074732050

    SN - 978-1-5386-8286-9

    T3 - International Conference on Infrared, Millimeter, and Terahertz Waves

    BT - IRMMW-THz 2019

    PB - IEEE Institute of Electrical and Electronic Engineers

    ER -

    Pursula P, Lamminen A, Mannila R, Tappura K, Saarilahti J. Silicon gradient refractive index lens for millimeter wave radiometers. In IRMMW-THz 2019: 44th International Conference on Infrared, Millimeter, and Terahertz Waves. IEEE Institute of Electrical and Electronic Engineers . 2019. 8874541. (International Conference on Infrared, Millimeter, and Terahertz Waves, Vol. 2019-September). https://doi.org/10.1109/IRMMW-THz.2019.8874541