Silicon gradient refractive index lens for millimeter wave radiometers

Pekka Pursula; Antti Lamminen; Rami Mannila; Kirsi Tappura; Jaakko Saarilahti

doi:10.1109/IRMMW-THz.2019.8874541

Silicon gradient refractive index lens for millimeter wave radiometers

Pekka Pursula, Antti Lamminen, Rami Mannila, Kirsi Tappura, Jaakko Saarilahti

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

We propose a radiometer receiver array based on a silicon microlens array and MMIC detectors at 200 - 250 GHz. The paper describes the array concept and details microlens development. Planar Gradient Refractive Index (GRIN) lenses have been chosen for the array. Fabrication process based on DRIE etching of silicon has been developed, and lenses designed. The first measurement results of the lens are presented.

Original language	English
Title of host publication	IRMMW-THz 2019
Subtitle of host publication	44th International Conference on Infrared, Millimeter, and Terahertz Waves
Publisher	IEEE Institute of Electrical and Electronic Engineers
ISBN (Electronic)	978-1-5386-8285-2
ISBN (Print)	978-1-5386-8286-9
DOIs	https://doi.org/10.1109/IRMMW-THz.2019.8874541
Publication status	Published - Sep 2019
MoE publication type	A4 Article in a conference publication
Event	44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019 - Paris, France Duration: 1 Sep 2019 → 6 Sep 2019

Publication series

Series	International Conference on Infrared, Millimeter, and Terahertz Waves
Volume	2019-September
ISSN	2162-2027

Conference

Conference	44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019
Country	France
City	Paris
Period	1/09/19 → 6/09/19

Keywords

OtaNano

Access to Document

10.1109/IRMMW-THz.2019.8874541

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Cite this

Pursula, P., Lamminen, A., Mannila, R., Tappura, K., & Saarilahti, J. (2019). Silicon gradient refractive index lens for millimeter wave radiometers. In IRMMW-THz 2019: 44th International Conference on Infrared, Millimeter, and Terahertz Waves [8874541] IEEE Institute of Electrical and Electronic Engineers. International Conference on Infrared, Millimeter, and Terahertz Waves Vol. 2019-September https://doi.org/10.1109/IRMMW-THz.2019.8874541

Pursula, Pekka ; Lamminen, Antti ; Mannila, Rami ; Tappura, Kirsi ; Saarilahti, Jaakko. / Silicon gradient refractive index lens for millimeter wave radiometers. IRMMW-THz 2019: 44th International Conference on Infrared, Millimeter, and Terahertz Waves. IEEE Institute of Electrical and Electronic Engineers, 2019. (International Conference on Infrared, Millimeter, and Terahertz Waves, Vol. 2019-September).

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title = "Silicon gradient refractive index lens for millimeter wave radiometers",

abstract = "We propose a radiometer receiver array based on a silicon microlens array and MMIC detectors at 200 - 250 GHz. The paper describes the array concept and details microlens development. Planar Gradient Refractive Index (GRIN) lenses have been chosen for the array. Fabrication process based on DRIE etching of silicon has been developed, and lenses designed. The first measurement results of the lens are presented.",

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author = "Pekka Pursula and Antti Lamminen and Rami Mannila and Kirsi Tappura and Jaakko Saarilahti",

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Pursula, P , Lamminen, A , Mannila, R , Tappura, K & Saarilahti, J 2019, Silicon gradient refractive index lens for millimeter wave radiometers. in IRMMW-THz 2019: 44th International Conference on Infrared, Millimeter, and Terahertz Waves., 8874541, IEEE Institute of Electrical and Electronic Engineers, International Conference on Infrared, Millimeter, and Terahertz Waves, vol. 2019-September, 44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019, Paris, France, 1/09/19. https://doi.org/10.1109/IRMMW-THz.2019.8874541

Silicon gradient refractive index lens for millimeter wave radiometers. / Pursula, Pekka ; Lamminen, Antti ; Mannila, Rami ; Tappura, Kirsi ; Saarilahti, Jaakko.

IRMMW-THz 2019: 44th International Conference on Infrared, Millimeter, and Terahertz Waves. IEEE Institute of Electrical and Electronic Engineers, 2019. 8874541 (International Conference on Infrared, Millimeter, and Terahertz Waves, Vol. 2019-September).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

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AB - We propose a radiometer receiver array based on a silicon microlens array and MMIC detectors at 200 - 250 GHz. The paper describes the array concept and details microlens development. Planar Gradient Refractive Index (GRIN) lenses have been chosen for the array. Fabrication process based on DRIE etching of silicon has been developed, and lenses designed. The first measurement results of the lens are presented.

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Pursula P , Lamminen A , Mannila R , Tappura K , Saarilahti J. Silicon gradient refractive index lens for millimeter wave radiometers. In IRMMW-THz 2019: 44th International Conference on Infrared, Millimeter, and Terahertz Waves. IEEE Institute of Electrical and Electronic Engineers. 2019. 8874541. (International Conference on Infrared, Millimeter, and Terahertz Waves, Vol. 2019-September). https://doi.org/10.1109/IRMMW-THz.2019.8874541