Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density

Pai Lu, Kang Du, Per Ohlckers, Einar Halvorsen, Lutz Müller, Steffen Leopold, Martin Hoffmann, Kestutis Grigoras, Jouni Ahopelto, Mika Prunnila, Xuyuan Chen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

Nano-structure functional electrodes for high energy density MEMS supercapacitors have been fabricated by combining atomic layer deposition (ALD) and cyclic deep reactive ion etch (C-DRIE) in MEMS technology. The electrodes were structured with C-DRIE organized silicon grass (Si-g) as the scaffold for conformal coating with ALD nano-layer TiN as the current collector, and electrochemical loading pseudo-capacitive active material. As obtained Si-g/TiN/MnO x on-chip electrode results in 1) large surface gain scaffold with one dimensional ionic diffusion, 2) high conductivity and electrochemical stability current collector, 3) high effective number of redox centers per volume, which enable largely improved energy density.

Original languageEnglish
Title of host publication2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
PublisherInstitute of Electrical and Electronic Engineers IEEE
Pages1828-1831
Number of pages4
ISBN (Electronic)978-1-5386-2732-7
ISBN (Print)978-1-5386-2733-4
DOIs
Publication statusPublished - 26 Jul 2017
MoE publication typeA4 Article in a conference publication
Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
Duration: 18 Jun 201722 Jun 2017

Conference

Conference19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
Abbreviated titleTRANSDUCERS 2017
CountryTaiwan, Province of China
CityKaohsiung
Period18/06/1722/06/17

Fingerprint

grasses
electrochemical capacitors
Silicon
microelectromechanical systems
MEMS
Atomic layer deposition
flux density
atomic layer epitaxy
Scaffolds
accumulators
Electrodes
electrodes
silicon
Ions
ionic diffusion
ions
chips
coatings
Coatings
conductivity

Keywords

  • manganese oxide
  • MEMS supercapacitor
  • silicon grass
  • titanium nitride

Cite this

Lu, P., Du, K., Ohlckers, P., Halvorsen, E., Müller, L., Leopold, S., ... Chen, X. (2017). Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density. In 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (pp. 1828-1831). [7994425] Institute of Electrical and Electronic Engineers IEEE. https://doi.org/10.1109/TRANSDUCERS.2017.7994425
Lu, Pai ; Du, Kang ; Ohlckers, Per ; Halvorsen, Einar ; Müller, Lutz ; Leopold, Steffen ; Hoffmann, Martin ; Grigoras, Kestutis ; Ahopelto, Jouni ; Prunnila, Mika ; Chen, Xuyuan. / Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density. 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). Institute of Electrical and Electronic Engineers IEEE, 2017. pp. 1828-1831
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abstract = "Nano-structure functional electrodes for high energy density MEMS supercapacitors have been fabricated by combining atomic layer deposition (ALD) and cyclic deep reactive ion etch (C-DRIE) in MEMS technology. The electrodes were structured with C-DRIE organized silicon grass (Si-g) as the scaffold for conformal coating with ALD nano-layer TiN as the current collector, and electrochemical loading pseudo-capacitive active material. As obtained Si-g/TiN/MnO x on-chip electrode results in 1) large surface gain scaffold with one dimensional ionic diffusion, 2) high conductivity and electrochemical stability current collector, 3) high effective number of redox centers per volume, which enable largely improved energy density.",
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author = "Pai Lu and Kang Du and Per Ohlckers and Einar Halvorsen and Lutz M{\"u}ller and Steffen Leopold and Martin Hoffmann and Kestutis Grigoras and Jouni Ahopelto and Mika Prunnila and Xuyuan Chen",
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Lu, P, Du, K, Ohlckers, P, Halvorsen, E, Müller, L, Leopold, S, Hoffmann, M, Grigoras, K, Ahopelto, J, Prunnila, M & Chen, X 2017, Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density. in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)., 7994425, Institute of Electrical and Electronic Engineers IEEE, pp. 1828-1831, 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017, Kaohsiung, Taiwan, Province of China, 18/06/17. https://doi.org/10.1109/TRANSDUCERS.2017.7994425

Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density. / Lu, Pai; Du, Kang; Ohlckers, Per; Halvorsen, Einar; Müller, Lutz; Leopold, Steffen; Hoffmann, Martin; Grigoras, Kestutis; Ahopelto, Jouni; Prunnila, Mika; Chen, Xuyuan.

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). Institute of Electrical and Electronic Engineers IEEE, 2017. p. 1828-1831 7994425.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density

AU - Lu, Pai

AU - Du, Kang

AU - Ohlckers, Per

AU - Halvorsen, Einar

AU - Müller, Lutz

AU - Leopold, Steffen

AU - Hoffmann, Martin

AU - Grigoras, Kestutis

AU - Ahopelto, Jouni

AU - Prunnila, Mika

AU - Chen, Xuyuan

PY - 2017/7/26

Y1 - 2017/7/26

N2 - Nano-structure functional electrodes for high energy density MEMS supercapacitors have been fabricated by combining atomic layer deposition (ALD) and cyclic deep reactive ion etch (C-DRIE) in MEMS technology. The electrodes were structured with C-DRIE organized silicon grass (Si-g) as the scaffold for conformal coating with ALD nano-layer TiN as the current collector, and electrochemical loading pseudo-capacitive active material. As obtained Si-g/TiN/MnO x on-chip electrode results in 1) large surface gain scaffold with one dimensional ionic diffusion, 2) high conductivity and electrochemical stability current collector, 3) high effective number of redox centers per volume, which enable largely improved energy density.

AB - Nano-structure functional electrodes for high energy density MEMS supercapacitors have been fabricated by combining atomic layer deposition (ALD) and cyclic deep reactive ion etch (C-DRIE) in MEMS technology. The electrodes were structured with C-DRIE organized silicon grass (Si-g) as the scaffold for conformal coating with ALD nano-layer TiN as the current collector, and electrochemical loading pseudo-capacitive active material. As obtained Si-g/TiN/MnO x on-chip electrode results in 1) large surface gain scaffold with one dimensional ionic diffusion, 2) high conductivity and electrochemical stability current collector, 3) high effective number of redox centers per volume, which enable largely improved energy density.

KW - manganese oxide

KW - MEMS supercapacitor

KW - silicon grass

KW - titanium nitride

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U2 - 10.1109/TRANSDUCERS.2017.7994425

DO - 10.1109/TRANSDUCERS.2017.7994425

M3 - Conference article in proceedings

SN - 978-1-5386-2733-4

SP - 1828

EP - 1831

BT - 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

PB - Institute of Electrical and Electronic Engineers IEEE

ER -

Lu P, Du K, Ohlckers P, Halvorsen E, Müller L, Leopold S et al. Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density. In 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). Institute of Electrical and Electronic Engineers IEEE. 2017. p. 1828-1831. 7994425 https://doi.org/10.1109/TRANSDUCERS.2017.7994425