Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density

Pai Lu, Kang Du, Per Ohlckers, Einar Halvorsen, Lutz Müller, Steffen Leopold, Martin Hoffmann, Kestutis Grigoras, Jouni Ahopelto, Mika Prunnila, Xuyuan Chen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    Nano-structure functional electrodes for high energy density MEMS supercapacitors have been fabricated by combining atomic layer deposition (ALD) and cyclic deep reactive ion etch (C-DRIE) in MEMS technology. The electrodes were structured with C-DRIE organized silicon grass (Si-g) as the scaffold for conformal coating with ALD nano-layer TiN as the current collector, and electrochemical loading pseudo-capacitive active material. As obtained Si-g/TiN/MnO x on-chip electrode results in 1) large surface gain scaffold with one dimensional ionic diffusion, 2) high conductivity and electrochemical stability current collector, 3) high effective number of redox centers per volume, which enable largely improved energy density.

    Original languageEnglish
    Title of host publication2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages1828-1831
    Number of pages4
    ISBN (Electronic)978-1-5386-2732-7
    ISBN (Print)978-1-5386-2733-4
    DOIs
    Publication statusPublished - 26 Jul 2017
    MoE publication typeA4 Article in a conference publication
    Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
    Duration: 18 Jun 201722 Jun 2017

    Conference

    Conference19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
    Abbreviated titleTRANSDUCERS 2017
    CountryTaiwan, Province of China
    CityKaohsiung
    Period18/06/1722/06/17

    Keywords

    • manganese oxide
    • MEMS supercapacitor
    • silicon grass
    • titanium nitride
    • OtaNano

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