Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density

Pai Lu, Kang Du, Per Ohlckers, Einar Halvorsen, Lutz Müller, Steffen Leopold, Martin Hoffmann, Kestutis Grigoras, Jouni Ahopelto, Mika Prunnila, Xuyuan Chen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    Nano-structure functional electrodes for high energy density MEMS supercapacitors have been fabricated by combining atomic layer deposition (ALD) and cyclic deep reactive ion etch (C-DRIE) in MEMS technology. The electrodes were structured with C-DRIE organized silicon grass (Si-g) as the scaffold for conformal coating with ALD nano-layer TiN as the current collector, and electrochemical loading pseudo-capacitive active material. As obtained Si-g/TiN/MnO x on-chip electrode results in 1) large surface gain scaffold with one dimensional ionic diffusion, 2) high conductivity and electrochemical stability current collector, 3) high effective number of redox centers per volume, which enable largely improved energy density.

    Original languageEnglish
    Title of host publication2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages1828-1831
    Number of pages4
    ISBN (Electronic)978-1-5386-2732-7
    ISBN (Print)978-1-5386-2733-4
    DOIs
    Publication statusPublished - 26 Jul 2017
    MoE publication typeA4 Article in a conference publication
    Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
    Duration: 18 Jun 201722 Jun 2017

    Conference

    Conference19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
    Abbreviated titleTRANSDUCERS 2017
    CountryTaiwan, Province of China
    CityKaohsiung
    Period18/06/1722/06/17

    Fingerprint

    grasses
    electrochemical capacitors
    Silicon
    microelectromechanical systems
    MEMS
    Atomic layer deposition
    flux density
    atomic layer epitaxy
    Scaffolds
    accumulators
    Electrodes
    electrodes
    silicon
    Ions
    ionic diffusion
    ions
    chips
    coatings
    Coatings
    conductivity

    Keywords

    • manganese oxide
    • MEMS supercapacitor
    • silicon grass
    • titanium nitride

    Cite this

    Lu, P., Du, K., Ohlckers, P., Halvorsen, E., Müller, L., Leopold, S., ... Chen, X. (2017). Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density. In 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (pp. 1828-1831). [7994425] IEEE Institute of Electrical and Electronic Engineers . https://doi.org/10.1109/TRANSDUCERS.2017.7994425
    Lu, Pai ; Du, Kang ; Ohlckers, Per ; Halvorsen, Einar ; Müller, Lutz ; Leopold, Steffen ; Hoffmann, Martin ; Grigoras, Kestutis ; Ahopelto, Jouni ; Prunnila, Mika ; Chen, Xuyuan. / Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density. 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). IEEE Institute of Electrical and Electronic Engineers , 2017. pp. 1828-1831
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    title = "Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density",
    abstract = "Nano-structure functional electrodes for high energy density MEMS supercapacitors have been fabricated by combining atomic layer deposition (ALD) and cyclic deep reactive ion etch (C-DRIE) in MEMS technology. The electrodes were structured with C-DRIE organized silicon grass (Si-g) as the scaffold for conformal coating with ALD nano-layer TiN as the current collector, and electrochemical loading pseudo-capacitive active material. As obtained Si-g/TiN/MnO x on-chip electrode results in 1) large surface gain scaffold with one dimensional ionic diffusion, 2) high conductivity and electrochemical stability current collector, 3) high effective number of redox centers per volume, which enable largely improved energy density.",
    keywords = "manganese oxide, MEMS supercapacitor, silicon grass, titanium nitride",
    author = "Pai Lu and Kang Du and Per Ohlckers and Einar Halvorsen and Lutz M{\"u}ller and Steffen Leopold and Martin Hoffmann and Kestutis Grigoras and Jouni Ahopelto and Mika Prunnila and Xuyuan Chen",
    year = "2017",
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    language = "English",
    isbn = "978-1-5386-2733-4",
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    Lu, P, Du, K, Ohlckers, P, Halvorsen, E, Müller, L, Leopold, S, Hoffmann, M, Grigoras, K, Ahopelto, J, Prunnila, M & Chen, X 2017, Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density. in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)., 7994425, IEEE Institute of Electrical and Electronic Engineers , pp. 1828-1831, 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017, Kaohsiung, Taiwan, Province of China, 18/06/17. https://doi.org/10.1109/TRANSDUCERS.2017.7994425

    Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density. / Lu, Pai; Du, Kang; Ohlckers, Per; Halvorsen, Einar; Müller, Lutz; Leopold, Steffen; Hoffmann, Martin; Grigoras, Kestutis; Ahopelto, Jouni; Prunnila, Mika; Chen, Xuyuan.

    2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). IEEE Institute of Electrical and Electronic Engineers , 2017. p. 1828-1831 7994425.

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    TY - GEN

    T1 - Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density

    AU - Lu, Pai

    AU - Du, Kang

    AU - Ohlckers, Per

    AU - Halvorsen, Einar

    AU - Müller, Lutz

    AU - Leopold, Steffen

    AU - Hoffmann, Martin

    AU - Grigoras, Kestutis

    AU - Ahopelto, Jouni

    AU - Prunnila, Mika

    AU - Chen, Xuyuan

    PY - 2017/7/26

    Y1 - 2017/7/26

    N2 - Nano-structure functional electrodes for high energy density MEMS supercapacitors have been fabricated by combining atomic layer deposition (ALD) and cyclic deep reactive ion etch (C-DRIE) in MEMS technology. The electrodes were structured with C-DRIE organized silicon grass (Si-g) as the scaffold for conformal coating with ALD nano-layer TiN as the current collector, and electrochemical loading pseudo-capacitive active material. As obtained Si-g/TiN/MnO x on-chip electrode results in 1) large surface gain scaffold with one dimensional ionic diffusion, 2) high conductivity and electrochemical stability current collector, 3) high effective number of redox centers per volume, which enable largely improved energy density.

    AB - Nano-structure functional electrodes for high energy density MEMS supercapacitors have been fabricated by combining atomic layer deposition (ALD) and cyclic deep reactive ion etch (C-DRIE) in MEMS technology. The electrodes were structured with C-DRIE organized silicon grass (Si-g) as the scaffold for conformal coating with ALD nano-layer TiN as the current collector, and electrochemical loading pseudo-capacitive active material. As obtained Si-g/TiN/MnO x on-chip electrode results in 1) large surface gain scaffold with one dimensional ionic diffusion, 2) high conductivity and electrochemical stability current collector, 3) high effective number of redox centers per volume, which enable largely improved energy density.

    KW - manganese oxide

    KW - MEMS supercapacitor

    KW - silicon grass

    KW - titanium nitride

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    M3 - Conference article in proceedings

    SN - 978-1-5386-2733-4

    SP - 1828

    EP - 1831

    BT - 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

    PB - IEEE Institute of Electrical and Electronic Engineers

    ER -

    Lu P, Du K, Ohlckers P, Halvorsen E, Müller L, Leopold S et al. Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density. In 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). IEEE Institute of Electrical and Electronic Engineers . 2017. p. 1828-1831. 7994425 https://doi.org/10.1109/TRANSDUCERS.2017.7994425