Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density

Pai Lu; Kang Du; Per Ohlckers; Einar Halvorsen; Lutz Müller; Steffen Leopold; Martin Hoffmann; Kestutis Grigoras; Jouni Ahopelto; Mika Prunnila; Xuyuan Chen

doi:10.1109/TRANSDUCERS.2017.7994425

Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density

Pai Lu
, Kang Du
, Per Ohlckers
, Einar Halvorsen
, Lutz Müller
, Steffen Leopold
, Martin Hoffmann
, Kestutis Grigoras
, Jouni Ahopelto
, Mika Prunnila
, Xuyuan Chen

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

Nano-structure functional electrodes for high energy density MEMS supercapacitors have been fabricated by combining atomic layer deposition (ALD) and cyclic deep reactive ion etch (C-DRIE) in MEMS technology. The electrodes were structured with C-DRIE organized silicon grass (Si-g) as the scaffold for conformal coating with ALD nano-layer TiN as the current collector, and electrochemical loading pseudo-capacitive active material. As obtained Si-g/TiN/MnO _x on-chip electrode results in 1) large surface gain scaffold with one dimensional ionic diffusion, 2) high conductivity and electrochemical stability current collector, 3) high effective number of redox centers per volume, which enable largely improved energy density.

Original language	English
Title of host publication	2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	1828-1831
ISBN (Electronic)	978-1-5386-2732-7
ISBN (Print)	978-1-5386-2733-4
DOIs	https://doi.org/10.1109/TRANSDUCERS.2017.7994425
Publication status	Published - 26 Jul 2017
MoE publication type	A4 Article in a conference publication
Event	19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China Duration: 18 Jun 2017 → 22 Jun 2017

Conference

Conference	19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
Abbreviated title	TRANSDUCERS 2017
Country/Territory	Taiwan, Province of China
City	Kaohsiung
Period	18/06/17 → 22/06/17

Funding

Financial support from the Research Council of Norway under Grant No. 229716 is acknowledged. Financial support from the Academy of Finland through the Atomic Layer Deposition Centre of Excellence project (Grant No. 251220) is acknowledged.

Keywords

manganese oxide
MEMS supercapacitor
silicon grass
titanium nitride
OtaNano

Access to Document

10.1109/TRANSDUCERS.2017.7994425

Cite this

Lu, P., Du, K., Ohlckers, P., Halvorsen, E., Müller, L., Leopold, S., Hoffmann, M., Grigoras, K., Ahopelto, J., Prunnila, M., & Chen, X. (2017). Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density. In 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (pp. 1828-1831). Article 7994425 IEEE Institute of Electrical and Electronic Engineers. https://doi.org/10.1109/TRANSDUCERS.2017.7994425

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title = "Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density",

abstract = "Nano-structure functional electrodes for high energy density MEMS supercapacitors have been fabricated by combining atomic layer deposition (ALD) and cyclic deep reactive ion etch (C-DRIE) in MEMS technology. The electrodes were structured with C-DRIE organized silicon grass (Si-g) as the scaffold for conformal coating with ALD nano-layer TiN as the current collector, and electrochemical loading pseudo-capacitive active material. As obtained Si-g/TiN/MnO x on-chip electrode results in 1) large surface gain scaffold with one dimensional ionic diffusion, 2) high conductivity and electrochemical stability current collector, 3) high effective number of redox centers per volume, which enable largely improved energy density. ",

keywords = "manganese oxide, MEMS supercapacitor, silicon grass, titanium nitride, OtaNano",

author = "Pai Lu and Kang Du and Per Ohlckers and Einar Halvorsen and Lutz M{\"u}ller and Steffen Leopold and Martin Hoffmann and Kestutis Grigoras and Jouni Ahopelto and Mika Prunnila and Xuyuan Chen",

year = "2017",

month = jul,

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doi = "10.1109/TRANSDUCERS.2017.7994425",

language = "English",

isbn = "978-1-5386-2733-4",

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booktitle = "2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

address = "United States",

note = "19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017, TRANSDUCERS 2017 ; Conference date: 18-06-2017 Through 22-06-2017",

}

Lu, P, Du, K, Ohlckers, P, Halvorsen, E, Müller, L, Leopold, S, Hoffmann, M, Grigoras, K , Ahopelto, J , Prunnila, M & Chen, X 2017, Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density. in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)., 7994425, IEEE Institute of Electrical and Electronic Engineers, pp. 1828-1831, 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017, Kaohsiung, Taiwan, Province of China, 18/06/17. https://doi.org/10.1109/TRANSDUCERS.2017.7994425

Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density. / Lu, Pai; Du, Kang; Ohlckers, Per et al.
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). IEEE Institute of Electrical and Electronic Engineers, 2017. p. 1828-1831 7994425.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density

AU - Lu, Pai

AU - Du, Kang

AU - Ohlckers, Per

AU - Halvorsen, Einar

AU - Müller, Lutz

AU - Leopold, Steffen

AU - Hoffmann, Martin

AU - Grigoras, Kestutis

AU - Ahopelto, Jouni

AU - Prunnila, Mika

AU - Chen, Xuyuan

PY - 2017/7/26

Y1 - 2017/7/26

N2 - Nano-structure functional electrodes for high energy density MEMS supercapacitors have been fabricated by combining atomic layer deposition (ALD) and cyclic deep reactive ion etch (C-DRIE) in MEMS technology. The electrodes were structured with C-DRIE organized silicon grass (Si-g) as the scaffold for conformal coating with ALD nano-layer TiN as the current collector, and electrochemical loading pseudo-capacitive active material. As obtained Si-g/TiN/MnO x on-chip electrode results in 1) large surface gain scaffold with one dimensional ionic diffusion, 2) high conductivity and electrochemical stability current collector, 3) high effective number of redox centers per volume, which enable largely improved energy density.

AB - Nano-structure functional electrodes for high energy density MEMS supercapacitors have been fabricated by combining atomic layer deposition (ALD) and cyclic deep reactive ion etch (C-DRIE) in MEMS technology. The electrodes were structured with C-DRIE organized silicon grass (Si-g) as the scaffold for conformal coating with ALD nano-layer TiN as the current collector, and electrochemical loading pseudo-capacitive active material. As obtained Si-g/TiN/MnO x on-chip electrode results in 1) large surface gain scaffold with one dimensional ionic diffusion, 2) high conductivity and electrochemical stability current collector, 3) high effective number of redox centers per volume, which enable largely improved energy density.

KW - manganese oxide

KW - MEMS supercapacitor

KW - silicon grass

KW - titanium nitride

KW - OtaNano

UR - https://www.scopus.com/pages/publications/85029352800

U2 - 10.1109/TRANSDUCERS.2017.7994425

DO - 10.1109/TRANSDUCERS.2017.7994425

M3 - Conference article in proceedings

SN - 978-1-5386-2733-4

SP - 1828

EP - 1831

BT - 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017

Y2 - 18 June 2017 through 22 June 2017

ER -

Lu P, Du K, Ohlckers P, Halvorsen E, Müller L, Leopold S et al. Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density. In 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). IEEE Institute of Electrical and Electronic Engineers. 2017. p. 1828-1831. 7994425 doi: 10.1109/TRANSDUCERS.2017.7994425

Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density

Abstract

Conference

Funding

Keywords

Access to Document

Other files and links

Fingerprint

ALDCoE: Finnish Centre of Excellence in Atomic Layer Deposition

OtaNano

Cite this

Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density

Abstract

Conference

Funding

Keywords

Access to Document

Other files and links

Fingerprint

Projects

ALDCoE: Finnish Centre of Excellence in Atomic Layer Deposition

Equipment

OtaNano

Cite this