Silicon layer transfer using plasma hydrogenation
- Peng Chen*
- , S.S. Lau
- , Paul K. Chu
- , Kimmo Henttinen
- , Tommi Suni
- , Ilkka Suni
- , N. David Theodore
- , T.L. Alford
- , J.W. Mayer
- , Lin Shao
- , M. Nastasi
*Corresponding author for this work
- University of California, San Diego
- City University of Hong Kong
- Freescale Semiconductor Inc.
- Arizona State University
- Los Alamos National Laboratory
Research output: Contribution to journal › Article › Scientific › peer-review
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