Silicon Membranes for Nanophononics

A. Varpula, A. Shchepetov, K. Grigoras, J. Hassel, M. Prunnila, J. Ahopelto (Corresponding author)

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

The highly reduced thermal conductivity arising from confinement of acoustic phonons and enhanced phonon scattering in ultra-thin freestanding silicon membranes enables fabrication of sensitive thermal thermoelectric detectors. The devices show very low noise equivalent power of 13 pW/ Hz 1/2 and relatively fast operation. By optimizing the structure and electrical properties of the detector, the operation can approach the temperature fluctuation limit.

Original languageEnglish
Title of host publication18th International Conference on Nanotechnology, NANO 2018
PublisherIEEE Institute of Electrical and Electronic Engineers
Number of pages2
ISBN (Electronic)978-1-5386-5336-4
ISBN (Print)978-1-5386-5337-1
DOIs
Publication statusPublished - 24 Jan 2019
MoE publication typeA4 Article in a conference publication
Event18th International Conference on Nanotechnology, NANO 2018 - Cork, Ireland
Duration: 23 Jul 201826 Jul 2018
Conference number: 18

Publication series

SeriesProceedings of the IEEE Conference on Nanotechnology
ISSN1944-9399

Conference

Conference18th International Conference on Nanotechnology, NANO 2018
Abbreviated titleNANO 2018
CountryIreland
CityCork
Period23/07/1826/07/18

Fingerprint

Silicon
membranes
Detectors
Membranes
Phonon scattering
detectors
silicon
Phonons
low noise
Thermal conductivity
Electric properties
phonons
thermal conductivity
Acoustics
electrical properties
Fabrication
fabrication
acoustics
scattering
Temperature

Keywords

  • silicon
  • biomembranes
  • phonons
  • detectors
  • thermal conductivity
  • conductivity
  • nanoscale devices

Cite this

Varpula, A., Shchepetov, A., Grigoras, K., Hassel, J., Prunnila, M., & Ahopelto, J. (2019). Silicon Membranes for Nanophononics. In 18th International Conference on Nanotechnology, NANO 2018 [8626348] IEEE Institute of Electrical and Electronic Engineers . Proceedings of the IEEE Conference on Nanotechnology https://doi.org/10.1109/NANO.2018.8626348
Varpula, A. ; Shchepetov, A. ; Grigoras, K. ; Hassel, J. ; Prunnila, M. ; Ahopelto, J. / Silicon Membranes for Nanophononics. 18th International Conference on Nanotechnology, NANO 2018. IEEE Institute of Electrical and Electronic Engineers , 2019. (Proceedings of the IEEE Conference on Nanotechnology).
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Varpula, A, Shchepetov, A, Grigoras, K, Hassel, J, Prunnila, M & Ahopelto, J 2019, Silicon Membranes for Nanophononics. in 18th International Conference on Nanotechnology, NANO 2018., 8626348, IEEE Institute of Electrical and Electronic Engineers , Proceedings of the IEEE Conference on Nanotechnology, 18th International Conference on Nanotechnology, NANO 2018, Cork, Ireland, 23/07/18. https://doi.org/10.1109/NANO.2018.8626348

Silicon Membranes for Nanophononics. / Varpula, A.; Shchepetov, A.; Grigoras, K.; Hassel, J.; Prunnila, M.; Ahopelto, J. (Corresponding author).

18th International Conference on Nanotechnology, NANO 2018. IEEE Institute of Electrical and Electronic Engineers , 2019. 8626348 (Proceedings of the IEEE Conference on Nanotechnology).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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Varpula A, Shchepetov A, Grigoras K, Hassel J, Prunnila M, Ahopelto J. Silicon Membranes for Nanophononics. In 18th International Conference on Nanotechnology, NANO 2018. IEEE Institute of Electrical and Electronic Engineers . 2019. 8626348. (Proceedings of the IEEE Conference on Nanotechnology). https://doi.org/10.1109/NANO.2018.8626348