Silicon Membranes for Nanophononics

Aapo Varpula; Andrey Shchepetov; Kestutis Grigoras; Juha Hassel; Mika Prunnila; Jouni Ahopelto

doi:10.1109/NANO.2018.8626348

Silicon Membranes for Nanophononics

Aapo Varpula, Andrey Shchepetov, Kestutis Grigoras, Juha Hassel, Mika Prunnila, Jouni Ahopelto^*

^*Corresponding author for this work

QTF - Quantum Technology Finland - The National Centre of Excellence

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

The highly reduced thermal conductivity arising from confinement of acoustic phonons and enhanced phonon scattering in ultra-thin freestanding silicon membranes enables fabrication of sensitive thermal thermoelectric detectors. The devices show very low noise equivalent power of 13 pW/ Hz ^1/2 and relatively fast operation. By optimizing the structure and electrical properties of the detector, the operation can approach the temperature fluctuation limit.

Original language	English
Title of host publication	18th International Conference on Nanotechnology, NANO 2018
Publisher	IEEE Institute of Electrical and Electronic Engineers
Number of pages	2
ISBN (Electronic)	978-1-5386-5336-4
ISBN (Print)	978-1-5386-5337-1
DOIs	https://doi.org/10.1109/NANO.2018.8626348
Publication status	Published - 2 Jul 2018
MoE publication type	A4 Article in a conference publication
Event	18th International Conference on Nanotechnology, NANO 2018 - Cork, Ireland Duration: 23 Jul 2018 → 26 Jul 2018 Conference number: 18

Publication series

Series	Proceedings of the IEEE Conference on Nanotechnology
Volume	18
ISSN	1944-9399

Conference

Conference	18th International Conference on Nanotechnology, NANO 2018
Abbreviated title	NANO 2018
Country/Territory	Ireland
City	Cork
Period	23/07/18 → 26/07/18

Funding

The work has been partially supported This work has been financially supported by the European Union Seventh Framework Programme (Grant Agreement No. 309150, project MERGING, Grant Agreement No. 713450, project PHENOMEN and Grant Agreement No. 604668, project QUANTIHEAT) and by the Academy of Finland (Grant Nos. 295329 and 252598 and the Finnish Centre of Excellence in Atomic Layer Deposition).

Keywords

silicon
biomembranes
phonons
detectors
thermal conductivity
conductivity
nanoscale devices
OtaNano

Access to Document

10.1109/NANO.2018.8626348

Cite this

@inproceedings{3c3a08e5e91a48faa3a9ef7c8bcc158b,

title = "Silicon Membranes for Nanophononics",

abstract = " The highly reduced thermal conductivity arising from confinement of acoustic phonons and enhanced phonon scattering in ultra-thin freestanding silicon membranes enables fabrication of sensitive thermal thermoelectric detectors. The devices show very low noise equivalent power of 13 pW/ Hz 1/2 and relatively fast operation. By optimizing the structure and electrical properties of the detector, the operation can approach the temperature fluctuation limit. ",

keywords = "silicon, biomembranes, phonons, detectors, thermal conductivity, conductivity, nanoscale devices, OtaNano",

author = "Aapo Varpula and Andrey Shchepetov and Kestutis Grigoras and Juha Hassel and Mika Prunnila and Jouni Ahopelto",

year = "2018",

month = jul,

day = "2",

doi = "10.1109/NANO.2018.8626348",

language = "English",

isbn = "978-1-5386-5337-1",

series = "Proceedings of the IEEE Conference on Nanotechnology",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

booktitle = "18th International Conference on Nanotechnology, NANO 2018",

address = "United States",

note = "18th International Conference on Nanotechnology, NANO 2018, NANO 2018 ; Conference date: 23-07-2018 Through 26-07-2018",

}

Varpula, A, Shchepetov, A, Grigoras, K, Hassel, J, Prunnila, M & Ahopelto, J 2018, Silicon Membranes for Nanophononics. in 18th International Conference on Nanotechnology, NANO 2018., 8626348, IEEE Institute of Electrical and Electronic Engineers, Proceedings of the IEEE Conference on Nanotechnology, vol. 18, 18th International Conference on Nanotechnology, NANO 2018, Cork, Ireland, 23/07/18. https://doi.org/10.1109/NANO.2018.8626348

Silicon Membranes for Nanophononics. / Varpula, Aapo; Shchepetov, Andrey; Grigoras, Kestutis et al.
18th International Conference on Nanotechnology, NANO 2018. IEEE Institute of Electrical and Electronic Engineers, 2018. 8626348 (Proceedings of the IEEE Conference on Nanotechnology, Vol. 18).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Silicon Membranes for Nanophononics

AU - Varpula, Aapo

AU - Shchepetov, Andrey

AU - Grigoras, Kestutis

AU - Hassel, Juha

AU - Prunnila, Mika

AU - Ahopelto, Jouni

N1 - Conference code: 18

PY - 2018/7/2

Y1 - 2018/7/2

N2 - The highly reduced thermal conductivity arising from confinement of acoustic phonons and enhanced phonon scattering in ultra-thin freestanding silicon membranes enables fabrication of sensitive thermal thermoelectric detectors. The devices show very low noise equivalent power of 13 pW/ Hz 1/2 and relatively fast operation. By optimizing the structure and electrical properties of the detector, the operation can approach the temperature fluctuation limit.

AB - The highly reduced thermal conductivity arising from confinement of acoustic phonons and enhanced phonon scattering in ultra-thin freestanding silicon membranes enables fabrication of sensitive thermal thermoelectric detectors. The devices show very low noise equivalent power of 13 pW/ Hz 1/2 and relatively fast operation. By optimizing the structure and electrical properties of the detector, the operation can approach the temperature fluctuation limit.

KW - silicon

KW - biomembranes

KW - phonons

KW - detectors

KW - thermal conductivity

KW - conductivity

KW - nanoscale devices

KW - OtaNano

UR - http://www.scopus.com/inward/record.url?scp=85062285234&partnerID=8YFLogxK

U2 - 10.1109/NANO.2018.8626348

DO - 10.1109/NANO.2018.8626348

M3 - Conference article in proceedings

AN - SCOPUS:85062285234

SN - 978-1-5386-5337-1

T3 - Proceedings of the IEEE Conference on Nanotechnology

BT - 18th International Conference on Nanotechnology, NANO 2018

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - 18th International Conference on Nanotechnology, NANO 2018

Y2 - 23 July 2018 through 26 July 2018

ER -

Silicon Membranes for Nanophononics

Abstract

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OtaNano

Cite this

Silicon Membranes for Nanophononics

Abstract

Publication series

Conference

Funding

Keywords

Access to Document

Other files and links

Fingerprint

Equipment

OtaNano

Cite this