Silicon Membranes for Nanophononics

A. Varpula, A. Shchepetov, K. Grigoras, J. Hassel, M. Prunnila, J. Ahopelto (Corresponding author)

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    The highly reduced thermal conductivity arising from confinement of acoustic phonons and enhanced phonon scattering in ultra-thin freestanding silicon membranes enables fabrication of sensitive thermal thermoelectric detectors. The devices show very low noise equivalent power of 13 pW/ Hz 1/2 and relatively fast operation. By optimizing the structure and electrical properties of the detector, the operation can approach the temperature fluctuation limit.

    Original languageEnglish
    Title of host publication18th International Conference on Nanotechnology, NANO 2018
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Number of pages2
    ISBN (Electronic)978-1-5386-5336-4
    ISBN (Print)978-1-5386-5337-1
    DOIs
    Publication statusPublished - 24 Jan 2019
    MoE publication typeA4 Article in a conference publication
    Event18th International Conference on Nanotechnology, NANO 2018 - Cork, Ireland
    Duration: 23 Jul 201826 Jul 2018
    Conference number: 18

    Publication series

    SeriesProceedings of the IEEE Conference on Nanotechnology
    ISSN1944-9399

    Conference

    Conference18th International Conference on Nanotechnology, NANO 2018
    Abbreviated titleNANO 2018
    CountryIreland
    CityCork
    Period23/07/1826/07/18

    Fingerprint

    Silicon
    membranes
    Detectors
    Membranes
    Phonon scattering
    detectors
    silicon
    Phonons
    low noise
    Thermal conductivity
    Electric properties
    phonons
    thermal conductivity
    Acoustics
    electrical properties
    Fabrication
    fabrication
    acoustics
    scattering
    Temperature

    Keywords

    • silicon
    • biomembranes
    • phonons
    • detectors
    • thermal conductivity
    • conductivity
    • nanoscale devices

    Cite this

    Varpula, A., Shchepetov, A., Grigoras, K., Hassel, J., Prunnila, M., & Ahopelto, J. (2019). Silicon Membranes for Nanophononics. In 18th International Conference on Nanotechnology, NANO 2018 [8626348] IEEE Institute of Electrical and Electronic Engineers . Proceedings of the IEEE Conference on Nanotechnology https://doi.org/10.1109/NANO.2018.8626348
    Varpula, A. ; Shchepetov, A. ; Grigoras, K. ; Hassel, J. ; Prunnila, M. ; Ahopelto, J. / Silicon Membranes for Nanophononics. 18th International Conference on Nanotechnology, NANO 2018. IEEE Institute of Electrical and Electronic Engineers , 2019. (Proceedings of the IEEE Conference on Nanotechnology).
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    title = "Silicon Membranes for Nanophononics",
    abstract = "The highly reduced thermal conductivity arising from confinement of acoustic phonons and enhanced phonon scattering in ultra-thin freestanding silicon membranes enables fabrication of sensitive thermal thermoelectric detectors. The devices show very low noise equivalent power of 13 pW/ Hz 1/2 and relatively fast operation. By optimizing the structure and electrical properties of the detector, the operation can approach the temperature fluctuation limit.",
    keywords = "silicon, biomembranes, phonons, detectors, thermal conductivity, conductivity, nanoscale devices",
    author = "A. Varpula and A. Shchepetov and K. Grigoras and J. Hassel and M. Prunnila and J. Ahopelto",
    year = "2019",
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    Varpula, A, Shchepetov, A, Grigoras, K, Hassel, J, Prunnila, M & Ahopelto, J 2019, Silicon Membranes for Nanophononics. in 18th International Conference on Nanotechnology, NANO 2018., 8626348, IEEE Institute of Electrical and Electronic Engineers , Proceedings of the IEEE Conference on Nanotechnology, 18th International Conference on Nanotechnology, NANO 2018, Cork, Ireland, 23/07/18. https://doi.org/10.1109/NANO.2018.8626348

    Silicon Membranes for Nanophononics. / Varpula, A.; Shchepetov, A.; Grigoras, K.; Hassel, J.; Prunnila, M.; Ahopelto, J. (Corresponding author).

    18th International Conference on Nanotechnology, NANO 2018. IEEE Institute of Electrical and Electronic Engineers , 2019. 8626348 (Proceedings of the IEEE Conference on Nanotechnology).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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    Varpula A, Shchepetov A, Grigoras K, Hassel J, Prunnila M, Ahopelto J. Silicon Membranes for Nanophononics. In 18th International Conference on Nanotechnology, NANO 2018. IEEE Institute of Electrical and Electronic Engineers . 2019. 8626348. (Proceedings of the IEEE Conference on Nanotechnology). https://doi.org/10.1109/NANO.2018.8626348