Abstract
The highly reduced thermal conductivity arising from confinement of acoustic phonons and enhanced phonon scattering in ultra-thin freestanding silicon membranes enables fabrication of sensitive thermal thermoelectric detectors. The devices show very low noise equivalent power of 13 pW/ Hz 1/2 and relatively fast operation. By optimizing the structure and electrical properties of the detector, the operation can approach the temperature fluctuation limit.
Original language | English |
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Title of host publication | 18th International Conference on Nanotechnology, NANO 2018 |
Publisher | IEEE Institute of Electrical and Electronic Engineers |
Number of pages | 2 |
ISBN (Electronic) | 978-1-5386-5336-4 |
ISBN (Print) | 978-1-5386-5337-1 |
DOIs | |
Publication status | Published - 24 Jan 2019 |
MoE publication type | A4 Article in a conference publication |
Event | 18th International Conference on Nanotechnology, NANO 2018 - Cork, Ireland Duration: 23 Jul 2018 → 26 Jul 2018 Conference number: 18 |
Publication series
Series | Proceedings of the IEEE Conference on Nanotechnology |
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ISSN | 1944-9399 |
Conference
Conference | 18th International Conference on Nanotechnology, NANO 2018 |
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Abbreviated title | NANO 2018 |
Country/Territory | Ireland |
City | Cork |
Period | 23/07/18 → 26/07/18 |
Keywords
- silicon
- biomembranes
- phonons
- detectors
- thermal conductivity
- conductivity
- nanoscale devices
- OtaNano