Abstract
The highly reduced thermal conductivity arising from confinement of acoustic phonons and enhanced phonon scattering in ultra-thin freestanding silicon membranes enables fabrication of sensitive thermal thermoelectric detectors. The devices show very low noise equivalent power of 13 pW/ Hz 1/2 and relatively fast operation. By optimizing the structure and electrical properties of the detector, the operation can approach the temperature fluctuation limit.
Original language | English |
---|---|
Title of host publication | 18th International Conference on Nanotechnology, NANO 2018 |
Publisher | IEEE Institute of Electrical and Electronic Engineers |
Number of pages | 2 |
ISBN (Electronic) | 978-1-5386-5336-4 |
ISBN (Print) | 978-1-5386-5337-1 |
DOIs | |
Publication status | Published - 2 Jul 2018 |
MoE publication type | A4 Article in a conference publication |
Event | 18th International Conference on Nanotechnology, NANO 2018 - Cork, Ireland Duration: 23 Jul 2018 → 26 Jul 2018 Conference number: 18 |
Publication series
Series | Proceedings of the IEEE Conference on Nanotechnology |
---|---|
Volume | 18 |
ISSN | 1944-9399 |
Conference
Conference | 18th International Conference on Nanotechnology, NANO 2018 |
---|---|
Abbreviated title | NANO 2018 |
Country/Territory | Ireland |
City | Cork |
Period | 23/07/18 → 26/07/18 |
Funding
The work has been partially supported This work has been financially supported by the European Union Seventh Framework Programme (Grant Agreement No. 309150, project MERGING, Grant Agreement No. 713450, project PHENOMEN and Grant Agreement No. 604668, project QUANTIHEAT) and by the Academy of Finland (Grant Nos. 295329 and 252598 and the Finnish Centre of Excellence in Atomic Layer Deposition).
Keywords
- silicon
- biomembranes
- phonons
- detectors
- thermal conductivity
- conductivity
- nanoscale devices
- OtaNano