Silicon Membranes for Nanophononics

A. Varpula, A. Shchepetov, K. Grigoras, J. Hassel, Mika Prunnila, J. Ahopelto (Corresponding author)

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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Chemical Compounds

Engineering & Materials Science

Physics & Astronomy