Silicon micromechanical resonators for RF-Applications

Tomi Mattila, Ville Kaajakari, Jyrki Kiihamäki, Aarne Oja, Hannu Kattelus, Heikki Seppä, Mika Koskenvuori, Pekka Rantakari, Ilkka Tittonen

    Research output: Contribution to journalArticleScientificpeer-review

    9 Citations (Scopus)


    The small size and integrability make the silicon micromechanical rf-resonators attractive components for future wireless communication devices. In particular, we show that using the microresonators one can construct oscillators exhibiting low phase noise and good long-term stability. Such compact solutions challenge conventional quartz crystals in frequency reference applications.
    Original languageEnglish
    Pages (from-to)181 - 183
    Number of pages3
    JournalPhysica Scripta
    Publication statusPublished - 2004
    MoE publication typeA1 Journal article-refereed
    Event20th Nordic Semiconductor Meeting, NSM20 - Tampere, Finland
    Duration: 25 Aug 200327 Aug 2003


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