Silicon micromechanical resonators for RF-Applications

Tomi Mattila, Ville Kaajakari, Jyrki Kiihamäki, Aarne Oja, Hannu Kattelus, Heikki Seppä, Mika Koskenvuori, Pekka Rantakari, Ilkka Tittonen

Research output: Contribution to journalArticleScientificpeer-review

6 Citations (Scopus)

Abstract

The small size and integrability make the silicon micromechanical rf-resonators attractive components for future wireless communication devices. In particular, we show that using the microresonators one can construct oscillators exhibiting low phase noise and good long-term stability. Such compact solutions challenge conventional quartz crystals in frequency reference applications.
Original languageEnglish
Pages (from-to)181 - 183
Number of pages3
JournalPhysica Scripta
VolumeT114
DOIs
Publication statusPublished - 2004
MoE publication typeA1 Journal article-refereed
Event20th Nordic Semiconductor Meeting, NSM20 - Tampere, Finland
Duration: 25 Aug 200327 Aug 2003

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Microresonators
Phase Noise
wireless communication
Resonator
quartz crystals
Wireless Communication
Integrability
Silicon
Crystal
resonators
oscillators
silicon

Cite this

Mattila, Tomi ; Kaajakari, Ville ; Kiihamäki, Jyrki ; Oja, Aarne ; Kattelus, Hannu ; Seppä, Heikki ; Koskenvuori, Mika ; Rantakari, Pekka ; Tittonen, Ilkka. / Silicon micromechanical resonators for RF-Applications. In: Physica Scripta. 2004 ; Vol. T114. pp. 181 - 183.
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Silicon micromechanical resonators for RF-Applications. / Mattila, Tomi; Kaajakari, Ville; Kiihamäki, Jyrki; Oja, Aarne; Kattelus, Hannu; Seppä, Heikki; Koskenvuori, Mika; Rantakari, Pekka; Tittonen, Ilkka.

In: Physica Scripta, Vol. T114, 2004, p. 181 - 183.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Silicon micromechanical resonators for RF-Applications

AU - Mattila, Tomi

AU - Kaajakari, Ville

AU - Kiihamäki, Jyrki

AU - Oja, Aarne

AU - Kattelus, Hannu

AU - Seppä, Heikki

AU - Koskenvuori, Mika

AU - Rantakari, Pekka

AU - Tittonen, Ilkka

PY - 2004

Y1 - 2004

N2 - The small size and integrability make the silicon micromechanical rf-resonators attractive components for future wireless communication devices. In particular, we show that using the microresonators one can construct oscillators exhibiting low phase noise and good long-term stability. Such compact solutions challenge conventional quartz crystals in frequency reference applications.

AB - The small size and integrability make the silicon micromechanical rf-resonators attractive components for future wireless communication devices. In particular, we show that using the microresonators one can construct oscillators exhibiting low phase noise and good long-term stability. Such compact solutions challenge conventional quartz crystals in frequency reference applications.

U2 - 10.1088/0031-8949/2004/T114/045

DO - 10.1088/0031-8949/2004/T114/045

M3 - Article

VL - T114

SP - 181

EP - 183

JO - Physica Scripta

JF - Physica Scripta

SN - 0031-8949

ER -