Silicon micromechanical resonators for RF-Applications

Tomi Mattila, Ville Kaajakari, Jyrki Kiihamäki, Aarne Oja, Hannu Kattelus, Heikki Seppä, Mika Koskenvuori, Pekka Rantakari, Ilkka Tittonen

Research output: Contribution to journalArticleScientificpeer-review

6 Citations (Scopus)


The small size and integrability make the silicon micromechanical rf-resonators attractive components for future wireless communication devices. In particular, we show that using the microresonators one can construct oscillators exhibiting low phase noise and good long-term stability. Such compact solutions challenge conventional quartz crystals in frequency reference applications.
Original languageEnglish
Pages (from-to)181 - 183
Number of pages3
JournalPhysica Scripta
Publication statusPublished - 2004
MoE publication typeA1 Journal article-refereed
Event20th Nordic Semiconductor Meeting, NSM20 - Tampere, Finland
Duration: 25 Aug 200327 Aug 2003

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