The small size and integrability make the silicon micromechanical rf-resonators attractive components for future wireless communication devices. In particular, we show that using the microresonators one can construct oscillators exhibiting low phase noise and good long-term stability. Such compact solutions challenge conventional quartz crystals in frequency reference applications.
|Pages (from-to)||181 - 183|
|Number of pages||3|
|Publication status||Published - 2004|
|MoE publication type||A1 Journal article-refereed|
|Event||20th Nordic Semiconductor Meeting, NSM20 - Tampere, Finland|
Duration: 25 Aug 2003 → 27 Aug 2003