Silicon micromechanical resonators for RF-Applications

Tomi Mattila; Ville Kaajakari; Jyrki Kiihamäki; Aarne Oja; Hannu Kattelus; Heikki Seppä; Mika Koskenvuori; Pekka Rantakari; Ilkka Tittonen

doi:10.1088/0031-8949/2004/T114/045

Silicon micromechanical resonators for RF-Applications

Tomi Mattila
, Ville Kaajakari
, Jyrki Kiihamäki
, Aarne Oja
, Hannu Kattelus
, Heikki Seppä
, Mika Koskenvuori
, Pekka Rantakari
, Ilkka Tittonen

Helsinki University of Technology

Research output: Contribution to journal › Article › Scientific › peer-review

9 Citations (Scopus)

Abstract

The small size and integrability make the silicon micromechanical rf-resonators attractive components for future wireless communication devices. In particular, we show that using the microresonators one can construct oscillators exhibiting low phase noise and good long-term stability. Such compact solutions challenge conventional quartz crystals in frequency reference applications.

Original language	English
Pages (from-to)	181 - 183
Number of pages	3
Journal	Physica Scripta
Volume	T114
DOIs	https://doi.org/10.1088/0031-8949/2004/T114/045
Publication status	Published - 2004
MoE publication type	A1 Journal article-refereed
Event	20th Nordic Semiconductor Meeting, NSM20 - Tampere, Finland Duration: 25 Aug 2003 → 27 Aug 2003

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10.1088/0031-8949/2004/T114/045

Cite this

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title = "Silicon micromechanical resonators for RF-Applications",

abstract = "The small size and integrability make the silicon micromechanical rf-resonators attractive components for future wireless communication devices. In particular, we show that using the microresonators one can construct oscillators exhibiting low phase noise and good long-term stability. Such compact solutions challenge conventional quartz crystals in frequency reference applications.",

author = "Tomi Mattila and Ville Kaajakari and Jyrki Kiiham{\"a}ki and Aarne Oja and Hannu Kattelus and Heikki Sepp{\"a} and Mika Koskenvuori and Pekka Rantakari and Ilkka Tittonen",

year = "2004",

doi = "10.1088/0031-8949/2004/T114/045",

language = "English",

volume = "T114",

pages = "181 -- 183",

journal = "Physica Scripta",

issn = "0281-1847",

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note = "20th Nordic Semiconductor Meeting, NSM20 ; Conference date: 25-08-2003 Through 27-08-2003",

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TY - JOUR

T1 - Silicon micromechanical resonators for RF-Applications

AU - Mattila, Tomi

AU - Kaajakari, Ville

AU - Kiihamäki, Jyrki

AU - Oja, Aarne

AU - Kattelus, Hannu

AU - Seppä, Heikki

AU - Koskenvuori, Mika

AU - Rantakari, Pekka

AU - Tittonen, Ilkka

PY - 2004

Y1 - 2004

N2 - The small size and integrability make the silicon micromechanical rf-resonators attractive components for future wireless communication devices. In particular, we show that using the microresonators one can construct oscillators exhibiting low phase noise and good long-term stability. Such compact solutions challenge conventional quartz crystals in frequency reference applications.

AB - The small size and integrability make the silicon micromechanical rf-resonators attractive components for future wireless communication devices. In particular, we show that using the microresonators one can construct oscillators exhibiting low phase noise and good long-term stability. Such compact solutions challenge conventional quartz crystals in frequency reference applications.

U2 - 10.1088/0031-8949/2004/T114/045

DO - 10.1088/0031-8949/2004/T114/045

M3 - Article

SN - 0281-1847

VL - T114

SP - 181

EP - 183

JO - Physica Scripta

JF - Physica Scripta

T2 - 20th Nordic Semiconductor Meeting, NSM20

Y2 - 25 August 2003 through 27 August 2003

ER -

Silicon micromechanical resonators for RF-Applications

Abstract

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