Silicon micromechanical resonators for RF-Applications

Tomi Mattila, Ville Kaajakari, Jyrki Kiihamäki, Aarne Oja, Hannu Kattelus, Heikki Seppä, Mika Koskenvuori, Pekka Rantakari, Ilkka Tittonen

Research output: Contribution to journalArticleScientificpeer-review

6 Citations (Scopus)

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Mathematics

Physics & Astronomy