Abstract
Hybrid (organic–inorganic) glass materials, synthesized by the hybrid sol‐gel method, are demonstrated to have potential for fabrication of micro‐optical and opto‐mechanical structures by UV patterning in a single step. The Figure, an SEM image, shows a micro‐lens array photolithographically patterned in hybrid glass material using a grayscale photomask.
Original language | English |
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Pages (from-to) | 535-540 |
Journal | Advanced Materials |
Volume | 14 |
Issue number | 7 |
DOIs | |
Publication status | Published - 2002 |
MoE publication type | A1 Journal article-refereed |