Siloxane-based hybrid glass materials for binary and grayscale mask photoimaging

Ari Kärkkäinen (Corresponding Author), Juha Rantala, Arto Maaninen, Jabbour Ghassan, Michael Descour

Research output: Contribution to journalArticleScientificpeer-review

21 Citations (Scopus)


Hybrid (organic–inorganic) glass materials, synthesized by the hybrid sol‐gel method, are demonstrated to have potential for fabrication of micro‐optical and opto‐mechanical structures by UV patterning in a single step. The Figure, an SEM image, shows a micro‐lens array photolithographically patterned in hybrid glass material using a grayscale photomask.
Original languageEnglish
Pages (from-to)535-540
JournalAdvanced Materials
Issue number7
Publication statusPublished - 2002
MoE publication typeA1 Journal article-refereed


Dive into the research topics of 'Siloxane-based hybrid glass materials for binary and grayscale mask photoimaging'. Together they form a unique fingerprint.

Cite this