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Siloxane-based hybrid glass materials for binary and grayscale mask photoimaging

  • Ari Kärkkäinen*
  • , Juha Rantala
  • , Arto Maaninen
  • , Jabbour Ghassan
  • , Michael Descour
  • *Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

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Material Science