Siloxane-based hybrid glass materials for binary and grayscale mask photoimaging
- Ari Kärkkäinen*
- , Juha Rantala
- , Arto Maaninen
- , Jabbour Ghassan
- , Michael Descour
*Corresponding author for this work
- VTT (former employee or external)
- University of Arizona
- GuideOptics Oy
Research output: Contribution to journal › Article › Scientific › peer-review
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