SIMS- and NRA-measurements of depth profiles of implanted ions

Jari Likonen; Mikko Hautala

SIMS- and NRA-measurements of depth profiles of implanted ions

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	Secondary ion mass spectrometry SIMS VIII
Subtitle of host publication	Proceedings of the eighth International Conference on Secondary Ion Mass Spectrometry (SIMS VIII)
Editors	A. Benninghoven
Place of Publication	Chichester
Publisher	Wiley
Pages	415-418
ISBN (Print)	978-0-471-93064-8
Publication status	Published - 1992
MoE publication type	A4 Article in a conference publication
Event	8th International Conference on Secondary Ion Mass Spectrometry (SIMS VIII) - Amsterdam, Netherlands Duration: 15 Sep 1991 → 20 Sep 1991

Conference

Conference	8th International Conference on Secondary Ion Mass Spectrometry (SIMS VIII)
Country	Netherlands
City	Amsterdam
Period	15/09/91 → 20/09/91

Cite this

@inproceedings{079de9c076554a05a16f19c8ff2a90e2,

title = "SIMS- and NRA-measurements of depth profiles of implanted ions",

author = "Jari Likonen and Mikko Hautala",

note = "Project code: REA1522; 8th International Conference on Secondary Ion Mass Spectrometry (SIMS VIII) ; Conference date: 15-09-1991 Through 20-09-1991",

year = "1992",

language = "English",

isbn = "978-0-471-93064-8",

pages = "415--418",

editor = "A. Benninghoven",

booktitle = "Secondary ion mass spectrometry SIMS VIII",

publisher = "Wiley",

address = "United States",

}

Likonen, J & Hautala, M 1992, SIMS- and NRA-measurements of depth profiles of implanted ions. in A Benninghoven (ed.), Secondary ion mass spectrometry SIMS VIII: Proceedings of the eighth International Conference on Secondary Ion Mass Spectrometry (SIMS VIII). Wiley, Chichester, pp. 415-418, 8th International Conference on Secondary Ion Mass Spectrometry (SIMS VIII), Amsterdam, Netherlands, 15/09/91.

SIMS- and NRA-measurements of depth profiles of implanted ions. / Likonen, Jari; Hautala, Mikko.

Secondary ion mass spectrometry SIMS VIII: Proceedings of the eighth International Conference on Secondary Ion Mass Spectrometry (SIMS VIII). ed. / A. Benninghoven. Chichester : Wiley, 1992. p. 415-418.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - SIMS- and NRA-measurements of depth profiles of implanted ions

AU - Likonen, Jari

AU - Hautala, Mikko

N1 - Project code: REA1522

PY - 1992

Y1 - 1992

M3 - Conference article in proceedings

SN - 978-0-471-93064-8

SP - 415

EP - 418

BT - Secondary ion mass spectrometry SIMS VIII

A2 - Benninghoven, A.

PB - Wiley

CY - Chichester

T2 - 8th International Conference on Secondary Ion Mass Spectrometry (SIMS VIII)

Y2 - 15 September 1991 through 20 September 1991

ER -