SIMS- and NRA-measurements of depth profiles of implanted ions

Jari Likonen, Mikko Hautala

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Original languageEnglish
    Title of host publicationSecondary ion mass spectrometry SIMS VIII
    Subtitle of host publicationProceedings of the eighth International Conference on Secondary Ion Mass Spectrometry (SIMS VIII)
    EditorsA. Benninghoven
    Place of PublicationChichester
    PublisherWiley
    Pages415-418
    ISBN (Print)978-0-471-93064-8
    Publication statusPublished - 1992
    MoE publication typeA4 Article in a conference publication
    Event8th International Conference on Secondary Ion Mass Spectrometry (SIMS VIII) - Amsterdam, Netherlands
    Duration: 15 Sep 199120 Sep 1991

    Conference

    Conference8th International Conference on Secondary Ion Mass Spectrometry (SIMS VIII)
    CountryNetherlands
    CityAmsterdam
    Period15/09/9120/09/91

    Cite this

    Likonen, J., & Hautala, M. (1992). SIMS- and NRA-measurements of depth profiles of implanted ions. In A. Benninghoven (Ed.), Secondary ion mass spectrometry SIMS VIII: Proceedings of the eighth International Conference on Secondary Ion Mass Spectrometry (SIMS VIII) (pp. 415-418). Wiley.