@inproceedings{079de9c076554a05a16f19c8ff2a90e2,
title = "SIMS- and NRA-measurements of depth profiles of implanted ions",
author = "Jari Likonen and Mikko Hautala",
note = "Project code: REA1522; 8th International Conference on Secondary Ion Mass Spectrometry (SIMS VIII) ; Conference date: 15-09-1991 Through 20-09-1991",
year = "1992",
language = "English",
isbn = "978-0-471-93064-8",
pages = "415--418",
editor = "A. Benninghoven",
booktitle = "Secondary ion mass spectrometry SIMS VIII",
publisher = "Wiley",
address = "United States",
}