| Original language | English |
|---|---|
| Title of host publication | Secondary ion mass spectrometry SIMS VIII |
| Subtitle of host publication | Proceedings of the eighth International Conference on Secondary Ion Mass Spectrometry (SIMS VIII) |
| Editors | A. Benninghoven |
| Place of Publication | Chichester |
| Publisher | Wiley |
| Pages | 415-418 |
| ISBN (Print) | 978-0-471-93064-8 |
| Publication status | Published - 1992 |
| MoE publication type | A4 Article in a conference publication |
| Event | 8th International Conference on Secondary Ion Mass Spectrometry (SIMS VIII) - Amsterdam, Netherlands Duration: 15 Sep 1991 → 20 Sep 1991 |
Conference
| Conference | 8th International Conference on Secondary Ion Mass Spectrometry (SIMS VIII) |
|---|---|
| Country | Netherlands |
| City | Amsterdam |
| Period | 15/09/91 → 20/09/91 |
Cite this
Likonen, J., & Hautala, M. (1992). SIMS- and NRA-measurements of depth profiles of implanted ions. In A. Benninghoven (Ed.), Secondary ion mass spectrometry SIMS VIII: Proceedings of the eighth International Conference on Secondary Ion Mass Spectrometry (SIMS VIII) (pp. 415-418). Wiley.