SIMS technique in semiconductor technology

    Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

    Original languageEnglish
    Title of host publicationHigh Technology in Finland 1995
    EditorsLauri Kinnunen
    Place of PublicationEspoo
    PublisherFinnish Academies of Technology
    ISBN (Print)978-951-666-434-0
    Publication statusPublished - 1995
    MoE publication typeD2 Article in professional manuals or guides or professional information systems or text book material

    Cite this

    Likonen, J. (1995). SIMS technique in semiconductor technology. In L. Kinnunen (Ed.), High Technology in Finland 1995 (pp. 180-181). Finnish Academies of Technology.