SIMS technique in semiconductor technology

Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Professional

Original language	English
Title of host publication	High Technology in Finland 1995
Editors	Lauri Kinnunen
Place of Publication	Espoo
Publisher	Finnish Academies of Technology
Pages	180-181
ISBN (Print)	978-951-666-434-0
Publication status	Published - 1995
MoE publication type	D2 Article in professional manuals or guides or professional information systems or text book material

Cite this

@inbook{8379e3dcbb71452eb8804257fd65e178,

title = "SIMS technique in semiconductor technology",

author = "Jari Likonen",

year = "1995",

language = "English",

isbn = "978-951-666-434-0",

pages = "180--181",

editor = "Lauri Kinnunen",

booktitle = "High Technology in Finland 1995",

publisher = "Finnish Academies of Technology",

address = "Finland",

}