Simultaneous qualitative analysis of volatile and nonvolatile organic contamination on silicon wafer by online pyrolysis mass spectrometry

Raimo A. Ketola, Jari Kiuru, Virpi Tarkiainen, Arto Kiviranta, Jaakko Räsänen, Heini Ritala, Simo Eränen

Research output: Contribution to journal › Article › Scientific › peer-review

1 Citation (Scopus)

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Chemistry

Chemical Engineering