Simultaneous qualitative analysis of volatile and nonvolatile organic contamination on silicon wafer by online pyrolysis mass spectrometry
- Raimo A. Ketola
- , Jari Kiuru
- , Virpi Tarkiainen
- , Arto Kiviranta
- , Jaakko Räsänen
- , Heini Ritala
- , Simo Eränen
- Murata Electronics Oy
Research output: Contribution to journal › Article › Scientific › peer-review
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