Simultaneous qualitative analysis of volatile and nonvolatile organic contamination on silicon wafer by online pyrolysis mass spectrometry

  • Raimo A. Ketola
  • , Jari Kiuru
  • , Virpi Tarkiainen
  • , Arto Kiviranta
  • , Jaakko Räsänen
  • , Heini Ritala
  • , Simo Eränen

Research output: Contribution to journal › Article › Scientific › peer-review

1 Citation (Scopus)

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Chemistry

Chemical Engineering