Fingerprint
Dive into the research topics of 'Smooth silicon sidewall etching for waveguide structures using a modified Bosch process'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Smooth silicon sidewall etching for waveguide structures using a modified Bosch process
Feng Gao, Sami Ylinen, Markku Kainlauri, Markku Kapulainen
Research output: Contribution to journal › Article › Scientific › peer-review
40
Citations
(Scopus)