SOI wafers with buried cavities

Tommi Suni, Kimmo Henttinen, James Dekker, Hannu Luoto, Martin Kulawski, J. Mäkinen, R. Mutikainen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    1 Citation (Scopus)

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    Physics & Astronomy