Sol-gel hybrid glass diffractive elements by direct electron-beam exposure

Juha Rantala, N. Nordman, O. Nordman, Jouko Vähäkangas, Seppo Honkanen, Nasser Peyghambarian

Research output: Contribution to journalArticleScientificpeer-review

30 Citations (Scopus)


The authors propose and demonstrate direct electron-beam writing of surface relief diffractive elements into hybrid inorganic/organic sol-gel glass films. The etch depth and phase delay can be controlled by the electron dose. The potential applications include multi-phase-level diffractive elements and apodised planar waveguide gratings.
Original languageEnglish
Pages (from-to)455-456
JournalElectronics Letters
Issue number5
Publication statusPublished - 1998
MoE publication typeA1 Journal article-refereed


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