Sol-gel hybrid glass diffractive elements by direct electron-beam exposure

Juha Rantala, N. Nordman, O. Nordman, Jouko Vähäkangas, Seppo Honkanen, Nasser Peyghambarian

Research output: Contribution to journalArticleScientificpeer-review

27 Citations (Scopus)

Abstract

The authors propose and demonstrate direct electron-beam writing of surface relief diffractive elements into hybrid inorganic/organic sol-gel glass films. The etch depth and phase delay can be controlled by the electron dose. The potential applications include multi-phase-level diffractive elements and apodised planar waveguide gratings.
Original languageEnglish
Pages (from-to)455-456
JournalElectronics Letters
Volume34
Issue number5
DOIs
Publication statusPublished - 1998
MoE publication typeA1 Journal article-refereed

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Planar waveguides
Sol-gels
Electron beams
Glass
Electrons

Cite this

Rantala, J., Nordman, N., Nordman, O., Vähäkangas, J., Honkanen, S., & Peyghambarian, N. (1998). Sol-gel hybrid glass diffractive elements by direct electron-beam exposure. Electronics Letters, 34(5), 455-456. https://doi.org/10.1049/el:19980368
Rantala, Juha ; Nordman, N. ; Nordman, O. ; Vähäkangas, Jouko ; Honkanen, Seppo ; Peyghambarian, Nasser. / Sol-gel hybrid glass diffractive elements by direct electron-beam exposure. In: Electronics Letters. 1998 ; Vol. 34, No. 5. pp. 455-456.
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Rantala, J, Nordman, N, Nordman, O, Vähäkangas, J, Honkanen, S & Peyghambarian, N 1998, 'Sol-gel hybrid glass diffractive elements by direct electron-beam exposure', Electronics Letters, vol. 34, no. 5, pp. 455-456. https://doi.org/10.1049/el:19980368

Sol-gel hybrid glass diffractive elements by direct electron-beam exposure. / Rantala, Juha; Nordman, N.; Nordman, O.; Vähäkangas, Jouko; Honkanen, Seppo; Peyghambarian, Nasser.

In: Electronics Letters, Vol. 34, No. 5, 1998, p. 455-456.

Research output: Contribution to journalArticleScientificpeer-review

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T1 - Sol-gel hybrid glass diffractive elements by direct electron-beam exposure

AU - Rantala, Juha

AU - Nordman, N.

AU - Nordman, O.

AU - Vähäkangas, Jouko

AU - Honkanen, Seppo

AU - Peyghambarian, Nasser

PY - 1998

Y1 - 1998

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AB - The authors propose and demonstrate direct electron-beam writing of surface relief diffractive elements into hybrid inorganic/organic sol-gel glass films. The etch depth and phase delay can be controlled by the electron dose. The potential applications include multi-phase-level diffractive elements and apodised planar waveguide gratings.

U2 - 10.1049/el:19980368

DO - 10.1049/el:19980368

M3 - Article

VL - 34

SP - 455

EP - 456

JO - Electronics Letters

JF - Electronics Letters

SN - 0013-5194

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Rantala J, Nordman N, Nordman O, Vähäkangas J, Honkanen S, Peyghambarian N. Sol-gel hybrid glass diffractive elements by direct electron-beam exposure. Electronics Letters. 1998;34(5):455-456. https://doi.org/10.1049/el:19980368