Sol-gel technology is employed for the fabrication of diffractive elements and organic light emitting devices, and hybrid sol-gel materials are used for the first time for electron beam lithography and direct writing of surface relief diffractive elements. These materials can be tailored to have a sufficient response to electron radiation and ultra-violet light and to form submicrometer-sized features. The technology has a potential for cost-effective mass-production of micro and integrated optics. A novel method for the fabrication of organic light emitting micro-pixels by means of photopatternable dielectric hybrid sol-gel material is also demonstrated.
|Place of Publication||Espoo|
|Publication status||Published - 1998|
|MoE publication type||G4 Doctoral dissertation (monograph)|
- sol-gel materials
- light emitting devices
- hybrid materials
- thin film optics