Abstract
Sol-gel technology is employed for the fabrication of
diffractive elements and organic light emitting devices,
and hybrid sol-gel materials are used for the first time
for electron beam lithography and direct writing of
surface relief diffractive elements. These materials can
be tailored to have a sufficient response to electron
radiation and ultra-violet light and to form
submicrometer-sized features. The technology has a
potential for cost-effective mass-production of micro and
integrated optics. A novel method for the fabrication of
organic light emitting micro-pixels by means of
photopatternable dielectric hybrid sol-gel material is
also demonstrated.
| Original language | English |
|---|---|
| Qualification | Doctor Degree |
| Awarding Institution |
|
| Place of Publication | Espoo |
| Publisher | |
| Print ISBNs | 951-38-5354-3 |
| Electronic ISBNs | 951-38-5355-1 |
| Publication status | Published - 1998 |
| MoE publication type | G4 Doctoral dissertation (monograph) |
Keywords
- sol-gel materials
- light emitting devices
- hybrid materials
- thin film optics