@inproceedings{9ba779e2b12347c681fb9d7418e3ace8,
title = "Spatial conversion of excimer laser beam",
abstract = "The optical attachment for transformation the spatial characteristics of excimer laser has been experimentally investigated. The laser beam of rectangular section with sizes of 3 x 20 mm and divergence of 2 x 5 mrad after passage of an optical attachment got the square form 20 ? 20 mm and equal divergence of 5 ? 5 mrad orthogonal directions. It is shown, that application of such unit in the facilities for microprocessing of materials simplifies an optical path of illumination module, allows to receive the optimum uniformity of irradiation (within 2 %) at reproductive image with micron accuracy in plane of processed material and to mitigate the beam load on optical elements due to suppression of influence of {"}hot{"} points.",
author = "Alexander Grishkanich and Alexander Zhevlakov and Sergey Kascheev and Veli Kujanpaa and Timo Savinainen",
year = "2016",
doi = "10.1117/12.2219934",
language = "English",
series = "Proceedings of SPIE",
publisher = "International Society for Optics and Photonics SPIE",
booktitle = "Optical Microlithography XXIX",
address = "United States",
note = "Optical Microlithography XXIX ; Conference date: 15-03-2016 Through 15-03-2016",
}