Spatial conversion of excimer laser beam

Alexander Grishkanich, Alexander Zhevlakov, Sergey Kascheev, Veli Kujanpaa, Timo Savinainen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    2 Citations (Scopus)


    The optical attachment for transformation the spatial characteristics of excimer laser has been experimentally investigated. The laser beam of rectangular section with sizes of 3 x 20 mm and divergence of 2 x 5 mrad after passage of an optical attachment got the square form 20 ? 20 mm and equal divergence of 5 ? 5 mrad orthogonal directions. It is shown, that application of such unit in the facilities for microprocessing of materials simplifies an optical path of illumination module, allows to receive the optimum uniformity of irradiation (within 2 %) at reproductive image with micron accuracy in plane of processed material and to mitigate the beam load on optical elements due to suppression of influence of "hot" points.
    Original languageEnglish
    Title of host publicationOptical Microlithography XXIX
    PublisherInternational Society for Optics and Photonics SPIE
    Number of pages6
    Publication statusPublished - 2016
    MoE publication typeA4 Article in a conference publication
    EventOptical Microlithography XXIX - San Jose, United States
    Duration: 15 Mar 201615 Mar 2016

    Publication series

    SeriesProceedings of SPIE


    ConferenceOptical Microlithography XXIX
    Country/TerritoryUnited States
    CitySan Jose


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