Spatial micro-processing of mono-crystalline silicon with hybrid chemical-laser etching method in KOH with the use of fiber laser

A. Rosowski, H. Piili, R. Pawlak, Veli Kujanpää, A. Salminen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    2 Citations (Scopus)
    Original languageEnglish
    Title of host publicationProceedings of the 28th International Conference on Lasers and Electro-Optics, ICALEO 2009
    PublisherLaser Institute of America
    Pages950-958
    ISBN (Electronic)978-0-912035-59-8
    DOIs
    Publication statusPublished - 2009
    MoE publication typeA4 Article in a conference publication
    Event28th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2009: - Orlando, United States
    Duration: 2 Nov 20095 Nov 2009

    Conference

    Conference28th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2009:
    Abbreviated titleICALEO 2009
    CountryUnited States
    CityOrlando
    Period2/11/095/11/09

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