Spatial micro-processing of mono-crystalline silicon with hybrid chemical-laser etching method in KOH with the use of fiber laser

A. Rosowski, H. Piili, R. Pawlak, Veli Kujanpää, A. Salminen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings of the 28th International Conference on Lasers and Electro-Optics, ICALEO 2009
PublisherLaser Institute of America
Pages950-958
ISBN (Electronic)978-0-912035-59-8
DOIs
Publication statusPublished - 2009
MoE publication typeA4 Article in a conference publication
Event28th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2009: - Orlando, United States
Duration: 2 Nov 20095 Nov 2009

Conference

Conference28th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2009:
Abbreviated titleICALEO 2009
CountryUnited States
CityOrlando
Period2/11/095/11/09

Cite this

Rosowski, A., Piili, H., Pawlak, R., Kujanpää, V., & Salminen, A. (2009). Spatial micro-processing of mono-crystalline silicon with hybrid chemical-laser etching method in KOH with the use of fiber laser. In Proceedings of the 28th International Conference on Lasers and Electro-Optics, ICALEO 2009 (pp. 950-958). Laser Institute of America. https://doi.org/10.2351/1.5061671
Rosowski, A. ; Piili, H. ; Pawlak, R. ; Kujanpää, Veli ; Salminen, A. / Spatial micro-processing of mono-crystalline silicon with hybrid chemical-laser etching method in KOH with the use of fiber laser. Proceedings of the 28th International Conference on Lasers and Electro-Optics, ICALEO 2009. Laser Institute of America, 2009. pp. 950-958
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title = "Spatial micro-processing of mono-crystalline silicon with hybrid chemical-laser etching method in KOH with the use of fiber laser",
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year = "2009",
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Rosowski, A, Piili, H, Pawlak, R, Kujanpää, V & Salminen, A 2009, Spatial micro-processing of mono-crystalline silicon with hybrid chemical-laser etching method in KOH with the use of fiber laser. in Proceedings of the 28th International Conference on Lasers and Electro-Optics, ICALEO 2009. Laser Institute of America, pp. 950-958, 28th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2009: , Orlando, United States, 2/11/09. https://doi.org/10.2351/1.5061671

Spatial micro-processing of mono-crystalline silicon with hybrid chemical-laser etching method in KOH with the use of fiber laser. / Rosowski, A.; Piili, H.; Pawlak, R.; Kujanpää, Veli; Salminen, A.

Proceedings of the 28th International Conference on Lasers and Electro-Optics, ICALEO 2009. Laser Institute of America, 2009. p. 950-958.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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T1 - Spatial micro-processing of mono-crystalline silicon with hybrid chemical-laser etching method in KOH with the use of fiber laser

AU - Rosowski, A.

AU - Piili, H.

AU - Pawlak, R.

AU - Kujanpää, Veli

AU - Salminen, A.

PY - 2009

Y1 - 2009

U2 - 10.2351/1.5061671

DO - 10.2351/1.5061671

M3 - Conference article in proceedings

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EP - 958

BT - Proceedings of the 28th International Conference on Lasers and Electro-Optics, ICALEO 2009

PB - Laser Institute of America

ER -

Rosowski A, Piili H, Pawlak R, Kujanpää V, Salminen A. Spatial micro-processing of mono-crystalline silicon with hybrid chemical-laser etching method in KOH with the use of fiber laser. In Proceedings of the 28th International Conference on Lasers and Electro-Optics, ICALEO 2009. Laser Institute of America. 2009. p. 950-958 https://doi.org/10.2351/1.5061671