Spectral imaging device based on a tuneable MEMS Fabry-Perot interferometer

Jarkko Antila, Uula Kantojärvi, Rami Mannila, Anna Rissanen, Ismo Näkki, Jyrki Ollila, Heikki Saari

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

27 Citations (Scopus)


The trend in the development of single-point spectrometric sensors is miniaturization, cost reduction and increase of functionality and versatility.
MEMS Fabry-Perot interferometers (FPI) have been proven to meet many of these requirements in the form of miniaturized spectrometer modules and tuneable light sources. Recent development of MEMS FPI devices based on ALD thin film structures potentially addresses all of these main trends. In this paper we present a device and first measurement results of a small imaging spectrometer utilizing a 1.5 mm tuneable MEMS FPI filter working in the visible range of 430-580 nm.
The construction of the instrument and the properties of the tuneable filter are explained especially from imaging requirements point of view.
Original languageEnglish
Title of host publicationProceedings of SPIE 8374
Subtitle of host publicationNext-Generation Spectroscopic Technologies V
EditorsMark A. Druy
PublisherInternational Society for Optics and Photonics SPIE
ISBN (Print)978-0-8194-9052-0
Publication statusPublished - 2012
MoE publication typeNot Eligible
EventNext-Generation Spectroscopic Technologies V - Baltimore, Maryland, United States
Duration: 23 Apr 201224 Apr 2012

Publication series

SeriesProceedings of SPIE


ConferenceNext-Generation Spectroscopic Technologies V
Country/TerritoryUnited States
CityBaltimore, Maryland


  • Hyperspectral sensors
  • multispectral image sensors
  • Fabry-Perot Interferometer
  • Piezo actuators
  • imaging spectrometer
  • UAV
  • airbone
  • medical imaging
  • precision agriculture
  • target detection


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