Spectral imaging device based on a tuneable MEMS Fabry-Perot interferometer

Jarkko Antila, Uula Kantojärvi, Rami Mannila, Anna Rissanen, Ismo Näkki, Jyrki Ollila, Heikki Saari

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

18 Citations (Scopus)

Abstract

The trend in the development of single-point spectrometric sensors is miniaturization, cost reduction and increase of functionality and versatility.
MEMS Fabry-Perot interferometers (FPI) have been proven to meet many of these requirements in the form of miniaturized spectrometer modules and tuneable light sources. Recent development of MEMS FPI devices based on ALD thin film structures potentially addresses all of these main trends. In this paper we present a device and first measurement results of a small imaging spectrometer utilizing a 1.5 mm tuneable MEMS FPI filter working in the visible range of 430-580 nm.
The construction of the instrument and the properties of the tuneable filter are explained especially from imaging requirements point of view.
Original languageEnglish
Title of host publicationProceedings of SPIE 8374
Subtitle of host publicationNext-Generation Spectroscopic Technologies V
EditorsMark A. Druy
PublisherInternational Society for Optics and Photonics SPIE
ISBN (Print)978-0-8194-9052-0
Publication statusPublished - 2012
MoE publication typeNot Eligible
EventNext-Generation Spectroscopic Technologies V - Baltimore, Maryland, United States
Duration: 23 Apr 201224 Apr 2012

Publication series

SeriesProceedings of SPIE
Volume8374
ISSN0277-786X

Conference

ConferenceNext-Generation Spectroscopic Technologies V
CountryUnited States
CityBaltimore, Maryland
Period23/04/1224/04/12

Fingerprint

Fabry-Perot interferometers
microelectromechanical systems
trends
filters
requirements
cost reduction
imaging spectrometers
miniaturization
versatility
light sources
modules
spectrometers
sensors
thin films

Keywords

  • Hyperspectral sensors
  • multispectral image sensors
  • Fabry-Perot Interferometer
  • Piezo actuators
  • imaging spectrometer
  • UAV
  • airbone
  • medical imaging
  • precision agriculture
  • target detection

Cite this

Antila, J., Kantojärvi, U., Mannila, R., Rissanen, A., Näkki, I., Ollila, J., & Saari, H. (2012). Spectral imaging device based on a tuneable MEMS Fabry-Perot interferometer. In M. A. Druy (Ed.), Proceedings of SPIE 8374: Next-Generation Spectroscopic Technologies V [83740F ] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 8374
Antila, Jarkko ; Kantojärvi, Uula ; Mannila, Rami ; Rissanen, Anna ; Näkki, Ismo ; Ollila, Jyrki ; Saari, Heikki. / Spectral imaging device based on a tuneable MEMS Fabry-Perot interferometer. Proceedings of SPIE 8374: Next-Generation Spectroscopic Technologies V. editor / Mark A. Druy. International Society for Optics and Photonics SPIE, 2012. (Proceedings of SPIE, Vol. 8374).
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title = "Spectral imaging device based on a tuneable MEMS Fabry-Perot interferometer",
abstract = "The trend in the development of single-point spectrometric sensors is miniaturization, cost reduction and increase of functionality and versatility. MEMS Fabry-Perot interferometers (FPI) have been proven to meet many of these requirements in the form of miniaturized spectrometer modules and tuneable light sources. Recent development of MEMS FPI devices based on ALD thin film structures potentially addresses all of these main trends. In this paper we present a device and first measurement results of a small imaging spectrometer utilizing a 1.5 mm tuneable MEMS FPI filter working in the visible range of 430-580 nm. The construction of the instrument and the properties of the tuneable filter are explained especially from imaging requirements point of view.",
keywords = "Hyperspectral sensors, multispectral image sensors, Fabry-Perot Interferometer, Piezo actuators, imaging spectrometer, UAV, airbone, medical imaging, precision agriculture, target detection",
author = "Jarkko Antila and Uula Kantoj{\"a}rvi and Rami Mannila and Anna Rissanen and Ismo N{\"a}kki and Jyrki Ollila and Heikki Saari",
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Antila, J, Kantojärvi, U, Mannila, R, Rissanen, A, Näkki, I, Ollila, J & Saari, H 2012, Spectral imaging device based on a tuneable MEMS Fabry-Perot interferometer. in MA Druy (ed.), Proceedings of SPIE 8374: Next-Generation Spectroscopic Technologies V., 83740F , International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 8374, Next-Generation Spectroscopic Technologies V, Baltimore, Maryland, United States, 23/04/12.

Spectral imaging device based on a tuneable MEMS Fabry-Perot interferometer. / Antila, Jarkko; Kantojärvi, Uula; Mannila, Rami; Rissanen, Anna; Näkki, Ismo; Ollila, Jyrki; Saari, Heikki.

Proceedings of SPIE 8374: Next-Generation Spectroscopic Technologies V. ed. / Mark A. Druy. International Society for Optics and Photonics SPIE, 2012. 83740F (Proceedings of SPIE, Vol. 8374).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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AU - Antila, Jarkko

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AB - The trend in the development of single-point spectrometric sensors is miniaturization, cost reduction and increase of functionality and versatility. MEMS Fabry-Perot interferometers (FPI) have been proven to meet many of these requirements in the form of miniaturized spectrometer modules and tuneable light sources. Recent development of MEMS FPI devices based on ALD thin film structures potentially addresses all of these main trends. In this paper we present a device and first measurement results of a small imaging spectrometer utilizing a 1.5 mm tuneable MEMS FPI filter working in the visible range of 430-580 nm. The construction of the instrument and the properties of the tuneable filter are explained especially from imaging requirements point of view.

KW - Hyperspectral sensors

KW - multispectral image sensors

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KW - airbone

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KW - precision agriculture

KW - target detection

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Antila J, Kantojärvi U, Mannila R, Rissanen A, Näkki I, Ollila J et al. Spectral imaging device based on a tuneable MEMS Fabry-Perot interferometer. In Druy MA, editor, Proceedings of SPIE 8374: Next-Generation Spectroscopic Technologies V. International Society for Optics and Photonics SPIE. 2012. 83740F . (Proceedings of SPIE, Vol. 8374).