Spectral imaging device based on a tuneable MEMS Fabry-Perot interferometer

Jarkko Antila; Uula Kantojärvi; Rami Mannila; Anna Rissanen; Ismo Näkki; Jyrki Ollila; Heikki Saari

Spectral imaging device based on a tuneable MEMS Fabry-Perot interferometer

Jarkko Antila, Uula Kantojärvi, Rami Mannila, Anna Rissanen, Ismo Näkki, Jyrki Ollila, Heikki Saari

VTT Technical Research Centre of Finland

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

29 Citations (Scopus)

Abstract

The trend in the development of single-point spectrometric sensors is miniaturization, cost reduction and increase of functionality and versatility.
MEMS Fabry-Perot interferometers (FPI) have been proven to meet many of these requirements in the form of miniaturized spectrometer modules and tuneable light sources. Recent development of MEMS FPI devices based on ALD thin film structures potentially addresses all of these main trends. In this paper we present a device and first measurement results of a small imaging spectrometer utilizing a 1.5 mm tuneable MEMS FPI filter working in the visible range of 430-580 nm.
The construction of the instrument and the properties of the tuneable filter are explained especially from imaging requirements point of view.

Original language	English
Title of host publication	Proceedings of SPIE 8374
Subtitle of host publication	Next-Generation Spectroscopic Technologies V
Editors	Mark A. Druy
Publisher	International Society for Optics and Photonics SPIE
ISBN (Print)	978-0-8194-9052-0
Publication status	Published - 2012
MoE publication type	Not Eligible
Event	Next-Generation Spectroscopic Technologies V - Baltimore, Maryland, United States Duration: 23 Apr 2012 → 24 Apr 2012

Publication series

Series	Proceedings of SPIE
Volume	8374
ISSN	0277-786X

Conference

Conference	Next-Generation Spectroscopic Technologies V
Country/Territory	United States
City	Baltimore, Maryland
Period	23/04/12 → 24/04/12

Keywords

Hyperspectral sensors
multispectral image sensors
Fabry-Perot Interferometer
Piezo actuators
imaging spectrometer
UAV
airbone
medical imaging
precision agriculture
target detection

Cite this

@inproceedings{3c9b8d269b5a40639bd3f6731e3b0061,

title = "Spectral imaging device based on a tuneable MEMS Fabry-Perot interferometer",

abstract = "The trend in the development of single-point spectrometric sensors is miniaturization, cost reduction and increase of functionality and versatility. MEMS Fabry-Perot interferometers (FPI) have been proven to meet many of these requirements in the form of miniaturized spectrometer modules and tuneable light sources. Recent development of MEMS FPI devices based on ALD thin film structures potentially addresses all of these main trends. In this paper we present a device and first measurement results of a small imaging spectrometer utilizing a 1.5 mm tuneable MEMS FPI filter working in the visible range of 430-580 nm. The construction of the instrument and the properties of the tuneable filter are explained especially from imaging requirements point of view.",

keywords = "Hyperspectral sensors, multispectral image sensors, Fabry-Perot Interferometer, Piezo actuators, imaging spectrometer, UAV, airbone, medical imaging, precision agriculture, target detection",

author = "Jarkko Antila and Uula Kantoj{\"a}rvi and Rami Mannila and Anna Rissanen and Ismo N{\"a}kki and Jyrki Ollila and Heikki Saari",

year = "2012",

language = "English",

isbn = "978-0-8194-9052-0",

series = "Proceedings of SPIE",

publisher = "International Society for Optics and Photonics SPIE",

editor = "Druy, {Mark A.}",

booktitle = "Proceedings of SPIE 8374",

address = "United States",

note = "Next-Generation Spectroscopic Technologies V ; Conference date: 23-04-2012 Through 24-04-2012",

}

Antila, J, Kantojärvi, U, Mannila, R, Rissanen, A, Näkki, I, Ollila, J & Saari, H 2012, Spectral imaging device based on a tuneable MEMS Fabry-Perot interferometer. in MA Druy (ed.), Proceedings of SPIE 8374: Next-Generation Spectroscopic Technologies V., 83740F , International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 8374, Next-Generation Spectroscopic Technologies V, Baltimore, Maryland, United States, 23/04/12.

Spectral imaging device based on a tuneable MEMS Fabry-Perot interferometer. / Antila, Jarkko; Kantojärvi, Uula; Mannila, Rami et al.
Proceedings of SPIE 8374: Next-Generation Spectroscopic Technologies V. ed. / Mark A. Druy. International Society for Optics and Photonics SPIE, 2012. 83740F (Proceedings of SPIE, Vol. 8374).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

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T1 - Spectral imaging device based on a tuneable MEMS Fabry-Perot interferometer

AU - Antila, Jarkko

AU - Kantojärvi, Uula

AU - Mannila, Rami

AU - Rissanen, Anna

AU - Näkki, Ismo

AU - Ollila, Jyrki

AU - Saari, Heikki

PY - 2012

Y1 - 2012

N2 - The trend in the development of single-point spectrometric sensors is miniaturization, cost reduction and increase of functionality and versatility. MEMS Fabry-Perot interferometers (FPI) have been proven to meet many of these requirements in the form of miniaturized spectrometer modules and tuneable light sources. Recent development of MEMS FPI devices based on ALD thin film structures potentially addresses all of these main trends. In this paper we present a device and first measurement results of a small imaging spectrometer utilizing a 1.5 mm tuneable MEMS FPI filter working in the visible range of 430-580 nm. The construction of the instrument and the properties of the tuneable filter are explained especially from imaging requirements point of view.

AB - The trend in the development of single-point spectrometric sensors is miniaturization, cost reduction and increase of functionality and versatility. MEMS Fabry-Perot interferometers (FPI) have been proven to meet many of these requirements in the form of miniaturized spectrometer modules and tuneable light sources. Recent development of MEMS FPI devices based on ALD thin film structures potentially addresses all of these main trends. In this paper we present a device and first measurement results of a small imaging spectrometer utilizing a 1.5 mm tuneable MEMS FPI filter working in the visible range of 430-580 nm. The construction of the instrument and the properties of the tuneable filter are explained especially from imaging requirements point of view.

KW - Hyperspectral sensors

KW - multispectral image sensors

KW - Fabry-Perot Interferometer

KW - Piezo actuators

KW - imaging spectrometer

KW - UAV

KW - airbone

KW - medical imaging

KW - precision agriculture

KW - target detection

M3 - Conference article in proceedings

SN - 978-0-8194-9052-0

T3 - Proceedings of SPIE

BT - Proceedings of SPIE 8374

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PB - International Society for Optics and Photonics SPIE

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Y2 - 23 April 2012 through 24 April 2012

ER -

Spectral imaging device based on a tuneable MEMS Fabry-Perot interferometer

Abstract

Publication series

Conference

Keywords

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Cite this