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Spectrometer based on MOEMS shutter array

  • Marco Pizzi
  • , Valerian Konyashkin
  • , Piero Busso
  • , Vladimir Zelezny
  • , Premysl Vaněk
  • , Josef Bursik
  • , Milan Hokr
  • , Ville Moilanen
  • , Ralf Marbach
  • Centro Ricerche Fiat (CFR)
  • Sobolev Institute of Mathematics of SB RAS
  • Institute of Physics of the Czech Academy of Sciences
  • Institute of Inorganic Chemistry of the Czech Academy of Sciences
  • Technical University of Liberec (TUL)

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

In this work a MOEMS shutter array was developed to be a wavelength selective component inside the spectrometer. This paper presents the implemented spectrometer prototype based on the MOEMS shutter array.
Original languageEnglish
Title of host publicationIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005.
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages179 -180
ISBN (Print)978-0-7803-9278-6
DOIs
Publication statusPublished - 2005
MoE publication typeA4 Article in a conference publication
EventIEEE/LEOS International Conference on Optical MEMs and Their Applications - Oulu, Finland
Duration: 1 Aug 2005 → 4 Aug 2005

Publication series

SeriesOptical MEMS, IEEE/LEOS International Conference on
Volume2005
ISSN2160-5033

Conference

ConferenceIEEE/LEOS International Conference on Optical MEMs and Their Applications
Country/TerritoryFinland
CityOulu
Period1/08/05 → 4/08/05

Keywords

  • MOEMS shutter array
  • spectrometer

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