Abstract
| Original language | English |
|---|---|
| Pages (from-to) | 1731-1744 |
| Number of pages | 14 |
| Journal | IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control |
| Volume | 56 |
| Issue number | 8 |
| DOIs | |
| Publication status | Published - 2009 |
| MoE publication type | A1 Journal article-refereed |
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Spurious Resonance Suppression in Gigahertz-Range ZnO Thin-Film Bulk Acoustic Wave Resonators by the Boundary Frame Method : Modeling and Experiment. / Pensala, Tuomas; Ylilammi, Markku.
In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 56, No. 8, 2009, p. 1731-1744.Research output: Contribution to journal › Article › Scientific › peer-review
TY - JOUR
T1 - Spurious Resonance Suppression in Gigahertz-Range ZnO Thin-Film Bulk Acoustic Wave Resonators by the Boundary Frame Method
T2 - Modeling and Experiment
AU - Pensala, Tuomas
AU - Ylilammi, Markku
PY - 2009
Y1 - 2009
N2 - Zinc-oxide-based thin-film bulk acoustic wave (BAW) resonators operating at 932 MHz are investigated with respect to variation of dimensions of a boundary frame spurious mode suppression structure. A plate wave dispersion-based semi-2-D model and a 2-D finite element method are used to predict the eigenmode spectrum of the resonators to explain the detailed behavior. The models show how the boundary frame method changes the eigenmodes and their coupling to the driving electrical field via the modification of the mechanical boundary condition and leads to emergence of a flat-amplitude piston mode and suppression of spurious modes. Narrow band suppression of a single mode with a nonoptimal boundary frame is observed. Reduction of the effective electromechanical coupling coefficient keff 2 as a function of the boundary width is observed and predicted by both models. The simple semi-2-D plate model is shown to predict the device behavior very well, and the 2-D finite element method results are shown to coincide with them with some additional effects. Breaking the resonator behavior down to eigenmodes, which are not directly observable in measurements, by the models, yields insight into the physics of the device operation.
AB - Zinc-oxide-based thin-film bulk acoustic wave (BAW) resonators operating at 932 MHz are investigated with respect to variation of dimensions of a boundary frame spurious mode suppression structure. A plate wave dispersion-based semi-2-D model and a 2-D finite element method are used to predict the eigenmode spectrum of the resonators to explain the detailed behavior. The models show how the boundary frame method changes the eigenmodes and their coupling to the driving electrical field via the modification of the mechanical boundary condition and leads to emergence of a flat-amplitude piston mode and suppression of spurious modes. Narrow band suppression of a single mode with a nonoptimal boundary frame is observed. Reduction of the effective electromechanical coupling coefficient keff 2 as a function of the boundary width is observed and predicted by both models. The simple semi-2-D plate model is shown to predict the device behavior very well, and the 2-D finite element method results are shown to coincide with them with some additional effects. Breaking the resonator behavior down to eigenmodes, which are not directly observable in measurements, by the models, yields insight into the physics of the device operation.
U2 - 10.1109/TUFFC.2009.1238
DO - 10.1109/TUFFC.2009.1238
M3 - Article
VL - 56
SP - 1731
EP - 1744
JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
SN - 0885-3010
IS - 8
ER -