Spurious Resonance Suppression in Gigahertz-Range ZnO Thin-Film Bulk Acoustic Wave Resonators by the Boundary Frame Method: Modeling and Experiment

Tuomas Pensala, Markku Ylilammi

    Research output: Contribution to journal › Article › Scientific › peer-review

    18 Citations (Scopus)

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    Physics & Astronomy

    Engineering & Materials Science