Spurious resonance suppression in ZnO based thin-film BAW resonators: FEM modeling and experiment

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    6 Citations (Scopus)

    Abstract

    Spurious resonance suppression in ZnO based thin film BAW resonators by the boundary ring method of is studied. Electrical responses of resonators with varying width of the boundary ring structure are measured. Very clean resonator response is reached with optimum dimensions. Emergence of the piston mode and simultaneous spurious resonance suppression is demonstrated by 2D FEM simulation with a model corresponding to the measured devices. Good correlation between measurement and simulation is found.
    Original languageEnglish
    Title of host publication2005 IEEE International Ultrasonics Symposium
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages1844-1847
    ISBN (Print)978-0-7803-9382-0
    DOIs
    Publication statusPublished - 2005
    MoE publication typeA4 Article in a conference publication
    EventIEEE International Ultrasonics Symposium - Rotterdam, Netherlands
    Duration: 18 Sept 200521 Sept 2005

    Publication series

    SeriesProceedings - IEEE Ultrasonics Symposium
    Volume2005
    ISSN1051-0117

    Conference

    ConferenceIEEE International Ultrasonics Symposium
    Country/TerritoryNetherlands
    CityRotterdam
    Period18/09/0521/09/05

    Keywords

    • thin film
    • BAW
    • FBAR
    • SMR
    • resonatir
    • ZnO
    • spurious resonances
    • FEM

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