Spurious resonance suppression in ZnO based thin-film BAW resonators: FEM modeling and experiment

Tuomas Pensala; Markku Ylilammi; Tapani Makkonen

doi:10.1109/ULTSYM.2005.1603229

Spurious resonance suppression in ZnO based thin-film BAW resonators: FEM modeling and experiment

Tuomas Pensala, Markku Ylilammi, Tapani Makkonen

VTT Technical Research Centre of Finland

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

5 Citations (Scopus)

Abstract

Spurious resonance suppression in ZnO based thin film BAW resonators by the boundary ring method of is studied. Electrical responses of resonators with varying width of the boundary ring structure are measured. Very clean resonator response is reached with optimum dimensions. Emergence of the piston mode and simultaneous spurious resonance suppression is demonstrated by 2D FEM simulation with a model corresponding to the measured devices. Good correlation between measurement and simulation is found.

Original language	English
Title of host publication	2005 IEEE International Ultrasonics Symposium
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	1844-1847
ISBN (Print)	0-7803-9382-1
DOIs	https://doi.org/10.1109/ULTSYM.2005.1603229
Publication status	Published - 2005
MoE publication type	A4 Article in a conference publication
Event	IEEE International Ultrasonics Symposium - Rotterdam, Netherlands Duration: 18 Sep 2005 → 21 Sep 2005

Conference

Conference	IEEE International Ultrasonics Symposium
Country/Territory	Netherlands
City	Rotterdam
Period	18/09/05 → 21/09/05

Keywords

thin film
BAW
FBAR
SMR
resonatir
ZnO
spurious resonances
FEM

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10.1109/ULTSYM.2005.1603229

Cite this

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title = "Spurious resonance suppression in ZnO based thin-film BAW resonators: FEM modeling and experiment",

abstract = "Spurious resonance suppression in ZnO based thin film BAW resonators by the boundary ring method of is studied. Electrical responses of resonators with varying width of the boundary ring structure are measured. Very clean resonator response is reached with optimum dimensions. Emergence of the piston mode and simultaneous spurious resonance suppression is demonstrated by 2D FEM simulation with a model corresponding to the measured devices. Good correlation between measurement and simulation is found.",

keywords = "thin film, BAW, FBAR, SMR, resonatir, ZnO, spurious resonances, FEM",

author = "Tuomas Pensala and Markku Ylilammi and Tapani Makkonen",

year = "2005",

doi = "10.1109/ULTSYM.2005.1603229",

language = "English",

isbn = "0-7803-9382-1",

pages = "1844--1847",

booktitle = "2005 IEEE International Ultrasonics Symposium",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

address = "United States",

note = "IEEE International Ultrasonics Symposium ; Conference date: 18-09-2005 Through 21-09-2005",

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Pensala, T, Ylilammi, M & Makkonen, T 2005, Spurious resonance suppression in ZnO based thin-film BAW resonators: FEM modeling and experiment. in 2005 IEEE International Ultrasonics Symposium. IEEE Institute of Electrical and Electronic Engineers, pp. 1844-1847, IEEE International Ultrasonics Symposium, Rotterdam, Netherlands, 18/09/05. https://doi.org/10.1109/ULTSYM.2005.1603229

Spurious resonance suppression in ZnO based thin-film BAW resonators: FEM modeling and experiment. / Pensala, Tuomas; Ylilammi, Markku; Makkonen, Tapani.

2005 IEEE International Ultrasonics Symposium. IEEE Institute of Electrical and Electronic Engineers, 2005. p. 1844-1847.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Spurious resonance suppression in ZnO based thin-film BAW resonators: FEM modeling and experiment

AU - Pensala, Tuomas

AU - Ylilammi, Markku

AU - Makkonen, Tapani

PY - 2005

Y1 - 2005

N2 - Spurious resonance suppression in ZnO based thin film BAW resonators by the boundary ring method of is studied. Electrical responses of resonators with varying width of the boundary ring structure are measured. Very clean resonator response is reached with optimum dimensions. Emergence of the piston mode and simultaneous spurious resonance suppression is demonstrated by 2D FEM simulation with a model corresponding to the measured devices. Good correlation between measurement and simulation is found.

AB - Spurious resonance suppression in ZnO based thin film BAW resonators by the boundary ring method of is studied. Electrical responses of resonators with varying width of the boundary ring structure are measured. Very clean resonator response is reached with optimum dimensions. Emergence of the piston mode and simultaneous spurious resonance suppression is demonstrated by 2D FEM simulation with a model corresponding to the measured devices. Good correlation between measurement and simulation is found.

KW - thin film

KW - BAW

KW - FBAR

KW - SMR

KW - resonatir

KW - ZnO

KW - spurious resonances

KW - FEM

U2 - 10.1109/ULTSYM.2005.1603229

DO - 10.1109/ULTSYM.2005.1603229

M3 - Conference article in proceedings

SN - 0-7803-9382-1

SP - 1844

EP - 1847

BT - 2005 IEEE International Ultrasonics Symposium

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - IEEE International Ultrasonics Symposium

Y2 - 18 September 2005 through 21 September 2005

ER -

Spurious resonance suppression in ZnO based thin-film BAW resonators: FEM modeling and experiment

Abstract

Conference

Keywords

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