@inproceedings{457ed6661232477691d123908e32bda7,
title = "Spurious resonance suppression in ZnO based thin-film BAW resonators: FEM modeling and experiment",
abstract = "Spurious resonance suppression in ZnO based thin film BAW resonators by the boundary ring method of is studied. Electrical responses of resonators with varying width of the boundary ring structure are measured. Very clean resonator response is reached with optimum dimensions. Emergence of the piston mode and simultaneous spurious resonance suppression is demonstrated by 2D FEM simulation with a model corresponding to the measured devices. Good correlation between measurement and simulation is found.",
keywords = "thin film, BAW, FBAR, SMR, resonatir, ZnO, spurious resonances, FEM",
author = "Tuomas Pensala and Markku Ylilammi and Tapani Makkonen",
year = "2005",
doi = "10.1109/ULTSYM.2005.1603229",
language = "English",
isbn = "978-0-7803-9382-0",
series = "Proceedings - IEEE Ultrasonics Symposium",
publisher = "IEEE Institute of Electrical and Electronic Engineers",
pages = "1844--1847",
booktitle = "2005 IEEE International Ultrasonics Symposium",
address = "United States",
note = "IEEE International Ultrasonics Symposium ; Conference date: 18-09-2005 Through 21-09-2005",
}