Abstract
Spurious resonance suppression in ZnO based thin film BAW
resonators by the boundary ring method of is studied.
Electrical responses of resonators with varying width of
the boundary ring structure are measured. Very clean
resonator response is reached with optimum dimensions.
Emergence of the piston mode and simultaneous spurious
resonance suppression is demonstrated by 2D FEM
simulation with a model corresponding to the measured
devices. Good correlation between measurement and
simulation is found.
Original language | English |
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Title of host publication | 2005 IEEE International Ultrasonics Symposium |
Publisher | IEEE Institute of Electrical and Electronic Engineers |
Pages | 1844-1847 |
ISBN (Print) | 0-7803-9382-1 |
DOIs | |
Publication status | Published - 2005 |
MoE publication type | A4 Article in a conference publication |
Event | IEEE International Ultrasonics Symposium - Rotterdam, Netherlands Duration: 18 Sept 2005 → 21 Sept 2005 |
Conference
Conference | IEEE International Ultrasonics Symposium |
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Country/Territory | Netherlands |
City | Rotterdam |
Period | 18/09/05 → 21/09/05 |
Keywords
- thin film
- BAW
- FBAR
- SMR
- resonatir
- ZnO
- spurious resonances
- FEM