Spurious resonance suppression in ZnO based thin-film BAW resonators: FEM modeling and experiment

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5 Citations (Scopus)

Abstract

Spurious resonance suppression in ZnO based thin film BAW resonators by the boundary ring method of is studied. Electrical responses of resonators with varying width of the boundary ring structure are measured. Very clean resonator response is reached with optimum dimensions. Emergence of the piston mode and simultaneous spurious resonance suppression is demonstrated by 2D FEM simulation with a model corresponding to the measured devices. Good correlation between measurement and simulation is found.
Original languageEnglish
Title of host publication2005 IEEE International Ultrasonics Symposium
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages1844-1847
ISBN (Print)0-7803-9382-1
DOIs
Publication statusPublished - 2005
MoE publication typeA4 Article in a conference publication
EventIEEE International Ultrasonics Symposium - Rotterdam, Netherlands
Duration: 18 Sep 200521 Sep 2005

Conference

ConferenceIEEE International Ultrasonics Symposium
CountryNetherlands
CityRotterdam
Period18/09/0521/09/05

Keywords

  • thin film
  • BAW
  • FBAR
  • SMR
  • resonatir
  • ZnO
  • spurious resonances
  • FEM

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