Sputtered W-N diffusion barriers

Hannu Kattelus, Elzbieta Kolawa, Klaus Affolter, Marc Nicolet

Research output: Contribution to journalArticleScientificpeer-review

105 Citations (Scopus)

Fingerprint Dive into the research topics of 'Sputtered W-N diffusion barriers'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy