Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications

Ville Kaajakari, Tomi Mattila, Aarne Oja, Jyrki Kiihamäki, Heikki Seppä

Research output: Contribution to journalArticleScientificpeer-review

150 Citations (Scopus)

Abstract

A micromechanical 13.1-MHz bulk acoustic mode silicon resonator having a high quality factor (Q=130 000) and high maximum drive level (P= 0.12 mW at the hysteresis limit) is demonstrated. The prototype resonator is fabricated of single-crystal silicon by reactive ion etching of a silicon-on-insulator wafer. A demonstration oscillator based on the new resonator shows single-sideband phase noise of -138 dBc/Hz at 1 kHz offset from the carrier.
Original languageEnglish
Pages (from-to)173 - 175
Number of pages3
JournalIEEE Electron Device Letters
Volume25
Issue number4
DOIs
Publication statusPublished - 2004
MoE publication typeA1 Journal article-refereed

Fingerprint

Micromechanical resonators
Silicon
Phase noise
Resonators
Single crystals
Reactive ion etching
Hysteresis
Demonstrations

Keywords

  • micromechanical oscillators
  • bulk acoustic wave devices
  • microresonators
  • oscillator noise
  • phase noise
  • resonators
  • silicon on insulator technology

Cite this

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title = "Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications",
abstract = "A micromechanical 13.1-MHz bulk acoustic mode silicon resonator having a high quality factor (Q=130 000) and high maximum drive level (P= 0.12 mW at the hysteresis limit) is demonstrated. The prototype resonator is fabricated of single-crystal silicon by reactive ion etching of a silicon-on-insulator wafer. A demonstration oscillator based on the new resonator shows single-sideband phase noise of -138 dBc/Hz at 1 kHz offset from the carrier.",
keywords = "micromechanical oscillators, bulk acoustic wave devices, microresonators, oscillator noise, phase noise, resonators, silicon on insulator technology",
author = "Ville Kaajakari and Tomi Mattila and Aarne Oja and Jyrki Kiiham{\"a}ki and Heikki Sepp{\"a}",
year = "2004",
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language = "English",
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publisher = "Institute of Electrical and Electronic Engineers IEEE",
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Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications. / Kaajakari, Ville; Mattila, Tomi; Oja, Aarne; Kiihamäki, Jyrki; Seppä, Heikki.

In: IEEE Electron Device Letters, Vol. 25, No. 4, 2004, p. 173 - 175.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications

AU - Kaajakari, Ville

AU - Mattila, Tomi

AU - Oja, Aarne

AU - Kiihamäki, Jyrki

AU - Seppä, Heikki

PY - 2004

Y1 - 2004

N2 - A micromechanical 13.1-MHz bulk acoustic mode silicon resonator having a high quality factor (Q=130 000) and high maximum drive level (P= 0.12 mW at the hysteresis limit) is demonstrated. The prototype resonator is fabricated of single-crystal silicon by reactive ion etching of a silicon-on-insulator wafer. A demonstration oscillator based on the new resonator shows single-sideband phase noise of -138 dBc/Hz at 1 kHz offset from the carrier.

AB - A micromechanical 13.1-MHz bulk acoustic mode silicon resonator having a high quality factor (Q=130 000) and high maximum drive level (P= 0.12 mW at the hysteresis limit) is demonstrated. The prototype resonator is fabricated of single-crystal silicon by reactive ion etching of a silicon-on-insulator wafer. A demonstration oscillator based on the new resonator shows single-sideband phase noise of -138 dBc/Hz at 1 kHz offset from the carrier.

KW - micromechanical oscillators

KW - bulk acoustic wave devices

KW - microresonators

KW - oscillator noise

KW - phase noise

KW - resonators

KW - silicon on insulator technology

U2 - 10.1109/LED.2004.824840

DO - 10.1109/LED.2004.824840

M3 - Article

VL - 25

SP - 173

EP - 175

JO - IEEE Electron Device Letters

JF - IEEE Electron Device Letters

SN - 0741-3106

IS - 4

ER -