Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications

Ville Kaajakari, Tomi Mattila, Aarne Oja, Jyrki Kiihamäki, Heikki Seppä

Research output: Contribution to journalArticleScientificpeer-review

153 Citations (Scopus)


A micromechanical 13.1-MHz bulk acoustic mode silicon resonator having a high quality factor (Q=130 000) and high maximum drive level (P= 0.12 mW at the hysteresis limit) is demonstrated. The prototype resonator is fabricated of single-crystal silicon by reactive ion etching of a silicon-on-insulator wafer. A demonstration oscillator based on the new resonator shows single-sideband phase noise of -138 dBc/Hz at 1 kHz offset from the carrier.
Original languageEnglish
Pages (from-to)173 - 175
Number of pages3
JournalIEEE Electron Device Letters
Issue number4
Publication statusPublished - 2004
MoE publication typeA1 Journal article-refereed



  • micromechanical oscillators
  • bulk acoustic wave devices
  • microresonators
  • oscillator noise
  • phase noise
  • resonators
  • silicon on insulator technology

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