Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications

Ville Kaajakari, Tomi Mattila, Aarne Oja, Jyrki Kiihamäki, Heikki Seppä

Research output: Contribution to journalArticleScientificpeer-review

156 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science